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    • 1. 发明授权
    • Displacement sensor
    • 位移传感器
    • US08040529B2
    • 2011-10-18
    • US12712475
    • 2010-02-25
    • Takahiro OkudaTakahiro SugaHiroaki TakimasaShinsuke Yamakawa
    • Takahiro OkudaTakahiro SugaHiroaki TakimasaShinsuke Yamakawa
    • G01B11/14
    • G01B11/03G02B13/22
    • A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an image formation lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4.
    • 通过共焦位移仪在焦点周围拍摄聚焦图像。 在测量装置中,共焦位移计系统OPT-A包括激光二极管1,准直透镜4,物镜6,半反射镜3,光阑板31和光电二极管2.观察图像成像系统OPT -B是远心光接收光学系统,观察图像成像系统OPT-B包括白色光源94,物镜6,二向色镜5,光阑板81,成像透镜82和图像 传感器9.准直透镜4以双向箭头方向由振荡器7扫描。 隔膜板81的隔膜孔的直径被设定为使得物镜6的景深不低于准直透镜4的扫描幅度。
    • 2. 发明申请
    • DISPLACEMENT SENSOR
    • 位移传感器
    • US20100231925A1
    • 2010-09-16
    • US12712475
    • 2010-02-25
    • Takahiro OKUDATakahiro SugaHiroaki TakimasaShinsuke Yamakawa
    • Takahiro OKUDATakahiro SugaHiroaki TakimasaShinsuke Yamakawa
    • G01B11/14
    • G01B11/03G02B13/22
    • A focused image is taken around the focal point by a confocal displacement meter. In a measurement apparatus, a confocal displacement meter system OPT-A includes a laser diode 1, a collimator lens 4, an objective lens 6, a half mirror 3, a diaphragm plate 31, and a photodiode 2. An observation image imaging system OPT-B is a telecentric light receiving optical system, and the observation image imaging system OPT-B includes a white light source 94, an objective lens 6, a dichroic mirror 5, a diaphragm plate 81, an image formation lens 82, and an image sensor 9. The collimator lens 4 is swept by an oscillator 7 in a two-headed arrow direction. A diameter of a diaphragm hole of the diaphragm plate 81 is set such that a depth of field of the objective lens 6 is not lower than sweep amplitude of the collimator lens 4.
    • 通过共焦位移仪在焦点周围拍摄聚焦图像。 在测量装置中,共焦位移计系统OPT-A包括激光二极管1,准直透镜4,物镜6,半反射镜3,光阑板31和光电二极管2.观察图像成像系统OPT -B是远心光接收光学系统,观察图像成像系统OPT-B包括白色光源94,物镜6,二向色镜5,光阑板81,成像透镜82和图像 传感器9.准直透镜4以双向箭头方向由振荡器7扫描。 隔膜板81的隔膜孔的直径被设定为使得物镜6的景深不低于准直透镜4的扫描幅度。