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    • 1. 发明申请
    • VACUUM PROCESSING SYSTEM
    • 真空加工系统
    • US20120067521A1
    • 2012-03-22
    • US12968357
    • 2010-12-15
    • Takahiro SHIMOMURAYutaka KudouTakashi UemuraMasakazu Isozaki
    • Takahiro SHIMOMURAYutaka KudouTakashi UemuraMasakazu Isozaki
    • H01L21/3065C23C16/458
    • H01L21/67109H01L21/67178
    • A vacuum processing system including a cassette holder for setting up cassettes in which samples are stored, an air-transfer chamber for transferring the samples, lock chambers for storing the samples transferred from the air-transfer chamber, the lock chambers being capable of switching between air atmosphere and vacuum atmosphere in their inside, a vacuum transfer chamber connected to the lock chambers, vacuum containers for processing the samples transferred via the vacuum transfer chamber, a cooling chamber for cooling the samples down to a first temperature, the samples being processed in at least one of the vacuum containers, and a cooling unit for cooling the samples down to a second temperature, the samples being cooled in the cooling chamber. The cooling unit is deployed in the air transfer chamber, and has a cooling part for cooling the samples, being cooled in the cooling chamber, down to the second temperature.
    • 一种真空处理系统,包括用于设置其中存储样品的盒的盒保持器,用于传送样品的空气传送室,用于存储从空气传送室传送的样品的锁定室,能够在 空气气氛和真空气氛,连接到锁定室的真空传送室,用于处理通过真空传送室传送的样品的真空容器,用于将样品冷却至第一温度的冷却室,将样品加工成 至少一个真空容器和用于将样品冷却至第二温度的冷却单元,样品在冷却室中被冷却。 冷却单元布置在空气传送室中,并且具有冷却部件,用于冷却样品,在冷却室中冷却至第二温度。
    • 2. 发明申请
    • VACUUM PROCESSING APPARATUS
    • 真空加工设备
    • US20120067522A1
    • 2012-03-22
    • US13022232
    • 2011-02-07
    • Takahiro ShimomuraYutaka KudouMasakazu IsozakiTakashi Uemura
    • Takahiro ShimomuraYutaka KudouMasakazu IsozakiTakashi Uemura
    • C23F1/08B05C13/00B05C11/00
    • H01L21/67167H01L21/67109
    • A vacuum processing apparatus having an atmospheric-pressure transport chamber for conveying samples, lock chambers that accommodate the samples conveyed in and have an ambient capable of being switched between an atmospheric ambient and a vacuum ambient, a vacuum transport chamber coupled to the lock chambers, and at least one vacuum chamber for processing the samples. The apparatus further includes cooling portions operable to cool the high-temperature samples processed by the vacuum chamber. Each cooling portion has: a sample stage over which the high-temperature samples are placed and which has a coolant channel; gas-blowing tubes disposed closer to the inlet/exit port and acting to blow gas toward the sample stage; and an exhaust port disposed on the opposite side of the sample stage with regard to the inlet/exit port and acting to discharge the gas blown from the gas-blowing tubes.
    • 一种真空处理装置,具有用于输送样品的大气压输送室,容纳输送的样品的锁定室,以及能够在大气环境和真空环境之间切换的环境,耦合到锁定室的真空输送室, 以及用于处理样品的至少一个真空室。 该装置还包括可操作以冷却由真空室处理的高温样品的冷却部分。 每个冷却部分具有:样品台,高温样品放置在该样品台上,并具有冷却剂通道; 设置在入口/出口附近并用于向样品台吹气的气体吹送管; 以及排气口,其相对于入口/出口设置在样品台的相对侧上,并用于排出从气体吹送管吹出的气体。
    • 3. 发明申请
    • VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
    • 真空加工设备和真空加工方法
    • US20120093617A1
    • 2012-04-19
    • US13011041
    • 2011-01-21
    • Yutaka KudouHiroaki TakikawaTakahiro ShimomuraMasakazu IsozakiTakashi Uemura
    • Yutaka KudouHiroaki TakikawaTakahiro ShimomuraMasakazu IsozakiTakashi Uemura
    • H01L21/67
    • H01L21/67745H01L21/67748
    • A vacuum processing apparatus including a processing chamber for processing a sample to be processed, a cooling chamber for cooling the high-temperature sample processed in the processing chamber, and a vacuum transfer chamber for establishing a connection between the processing chamber and the cooling chamber, a vacuum transfer robot equipped inside the vacuum transfer chamber, wherein the cooling chamber includes a gas-exhausting unit for reducing pressure inside the cooling chamber, a gas-supplying unit for supplying a gas into the cooling chamber, a pressure-controlling unit for controlling the pressure inside the cooling chamber, a supporting unit for supporting the high-temperature sample, and a mounting stage for proximity-holding the sample supported by the supporting unit, the mounting stage having a temperature-adjusting unit for adjusting the temperature of surface of the mounting stage into a temperature which is capable of cooling the high-temperature sample, the supporting unit having an ascending/descending-speed varying unit.
    • 一种真空处理设备,包括处理待处理样品的处理室,用于冷却在处理室中处理的高温样品的冷却室和用于建立处理室和冷却室之间的连接的真空传送室, 设置在真空传送室内部的真空传送机器人,其中冷却室包括用于减小冷却室内的压力的排气单元,用于将气体供应到冷却室中的气体供应单元,用于控制 冷却室内的压力,用于支撑高温试样的支撑单元和用于接近保持由支撑单元支撑的样品的安装台,安装台具有用于调节表面温度的温度调节单元 将安装阶段转换成能够冷却高温样品的载体 g单元具有上升/下降速度变化单元。
    • 6. 发明授权
    • Lithium battery
    • 锂电池
    • US08197970B2
    • 2012-06-12
    • US12208497
    • 2008-09-11
    • Ryoko KandaNobuhiro OtaTakashi UemuraKentaro YoshidaMitsuyasu Ogawa
    • Ryoko KandaNobuhiro OtaTakashi UemuraKentaro YoshidaMitsuyasu Ogawa
    • H01M4/13H01M4/58H01M2/16H01M2/14H01M2/18H01M4/82H01M6/00
    • H01M10/0525H01M4/13H01M4/485H01M10/0562H01M10/0585Y10T29/49115
    • A lithium battery includes a substrate, a positive electrode layer, a negative electrode layer, and a sulfide solid electrolyte layer disposed between the positive electrode layer and the negative electrode layer, the positive electrode layer, the negative electrode layer, and the sulfide solid electrolyte layer being provided on the substrate. In this lithium battery, the positive electrode layer is formed by a vapor-phase deposition method, and a buffer layer that suppresses nonuniformity of distribution of lithium ions near the interface between the positive electrode layer and the sulfide solid electrolyte layer is provided between the positive electrode layer and the sulfide solid electrolyte layer. As the buffer layer, a lithium-ion conductive oxide, in particular, LixLa(2−x)/3TiO3 (x=0.1 to 0.5), Li7+xLa3Zr2O12+(x/2) (−5≦x≦3, preferably −2≦x≦2), or LiNbO3 is preferably used.
    • 锂电池包括设置在正极层和负极层之间的基板,正极层,负极层和硫化物固体电解质层,正极层,负极层和硫化物固体电解质 层设置在基板上。 在该锂电池中,通过气相沉积法形成正极层,并且在正极层和硫化物固体电解质层之间的界面附近抑制锂离子分布的不均匀性的缓冲层设置在阳极 电极层和硫化物固体电解质层。 作为缓冲层,特别是锂离子传导性氧化物,特别是LixLa(2-x)/ 3TiO3(x = 0.1〜0.5),Li7 + xLa3Zr2O12 +(x / 2)(-5< lE; x≦̸ 3,优选-2& ; x和nlE; 2)或LiNbO 3。
    • 7. 发明申请
    • NONAQUEOUS ELECTROLYTE SECONDARY BATTERY AND METHOD FOR PRODUCING THE SAME
    • 非电解电解质二次电池及其制造方法
    • US20100279176A1
    • 2010-11-04
    • US12743287
    • 2009-06-29
    • Mitsuyasu OgawaNobuhiro OtaTakashi UemuraRyoko KandaKentaro Yoshida
    • Mitsuyasu OgawaNobuhiro OtaTakashi UemuraRyoko KandaKentaro Yoshida
    • H01M4/131H01M4/04
    • H01M10/0525H01M4/131H01M4/366H01M4/525H01M4/62H01M4/624H01M10/0562Y02T10/7011
    • There is provided a nonaqueous electrolyte secondary battery in which lithium ions can move smoothly between a positive electrode and a solid electrolyte layer, the nonaqueous electrolyte secondary battery having improved internal resistance.The nonaqueous electrolyte secondary battery includes a positive electrode 1, a negative electrode 2, and a solid electrolyte layer 3 arranged between the positive and negative electrodes. The positive electrode 1 includes a positive-electrode sintered body 10 formed by firing a powder containing a positive-electrode active material and includes a cover layer 11 arranged on a surface of the positive-electrode sintered body 10 adjacent to the solid electrolyte layer 3, the cover layer containing a positive-electrode active material. The cover layer 11 contains a compound having a layered rock-salt structure. Preferably, the direction of the c-axis of the crystal of the compound is not perpendicular to the surface of the positive-electrode sintered body. More preferably, a buffer layer 4 composed of LiNbO3 is arranged between the positive electrode 1 and the solid electrolyte layer 3, the buffer layer being configured to reduce interface resistance.
    • 提供一种非水电解质二次电池,其中锂离子可以在正电极和固体电解质层之间平稳移动,非水电解质二次电池具有改善的内阻。 非水电解质二次电池包括正极1,负极2和布置在正极和负极之间的固体电解质层3。 正极1包括通过焙烧包含正极活性物质的粉末而形成的正极烧结体10,并且包括布置在与固体电解质层3相邻的正极烧结体10的表面上的覆盖层11, 所述覆盖层含有正极活性物质。 覆盖层11含有具有层状岩盐结构的化合物。 优选地,化合物的晶体的c轴方向不垂直于正极烧结体的表面。 更优选地,在正极1和固体电解质层3之间配置有由LiNbO 3组成的缓冲层4,缓冲层被配置为降低界面电阻。