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    • 4. 发明授权
    • Elevating mechanism, carrier conveying apparatus and heat treatment installation
    • 升降机构,载体输送装置和热处理装置
    • US06902369B2
    • 2005-06-07
    • US10289636
    • 2002-11-07
    • Osamu Tanigawa
    • Osamu Tanigawa
    • H01L21/677B66F7/00
    • H01L21/67706H01L21/6773H01L21/67769
    • In an elevating mechanism 14 where an elevating mechanism 17 carried so as to rise and fall along a fixed surface 16 is moved up and down through a suspension member 18, a braking mechanism 18 is born by the elevating mechanism 17 so as to pivot vertically. A tensile spring 32 is provided on the braking mechanism 31, for pivotally urging it to the direction close to the fixed surface 16, while the suspension member 18 is connected to the braking mechanism 31, for pulling the braking mechanism 31 in the direction apart from the fixed surface 16 due to the weight of the elevating mechanism 17, in opposition to the tensile spring 32. When the suspension member 18 is cut off, then the braking mechanism 31 comes into contact with and digs into the fixed surface 16 by action of the tensile spring 32, so that the elevating mechanism 17 can be stopped from falling.
    • 在升降机构14中,沿着固定表面16上下移动的升降机构17通过悬挂构件18上下移动,制动机构18由升降机构17承受,以便垂直地枢转。 在制动机构31上设置有拉伸弹簧32,用于将其靠近固定表面16的方向枢转地推动,同时悬架构件18连接到制动机构31,用于沿制动机构31拉出制动机构31 固定表面16由于升降机构17的重量而与拉伸弹簧32相对。 当悬挂构件18被切断时,制动机构31通过拉伸弹簧32的作用与固定表面16接触并进入其中,从而能够停止升降机构17的下落。
    • 7. 发明授权
    • Door opening and closing device using a robot
    • 使用机器人的开门装置
    • US5302061A
    • 1994-04-12
    • US956281
    • 1992-10-05
    • Toyofumi TerawakiOsamu Tanigawa
    • Toyofumi TerawakiOsamu Tanigawa
    • B23Q7/04B23Q11/08B25J5/02
    • B23Q11/08B23Q7/04Y10S483/901Y10T408/50Y10T409/30392Y10T483/115
    • An NC machine surrounded by a housing provided with a door on a front surface of the housing so that a workpiece may be loaded into the housing and unloaded therefrom when the door is in an open condition. An articulated robot, for replacing the workpiece, is provided so as to be laterally movable along an opening and closing direction of the door. Such a laterally movable function of the articulated robot permits a hand of the robot to grip a desired one of the workpieces arranged in lateral and longitudinal directions on a stock table. The articulated robot is provided with a sensor for detecting a dog provided on the door and an air cylinder for connecting the robot to the door when the dog is detected by the sensor. Accordingly, after the robot is connected to the door by the air cylinder, the door can be opened and closed by the lateral movement of the articulated robot.
    • 一个NC机器被一个壳体包围,该壳体在壳体的前表面上设置有门,使得当门处于打开状态时,工件可以被装载到壳体中并从其中卸载。 提供用于更换工件的铰接机器人,以便沿着门的打开和关闭方向可横向移动。 铰接式机器人的这种侧向可移动的功能允许机器人的手抓住在库存台上沿横向和纵向布置的所需工件。 关节式机器人设置有用于检测设置在门上的狗的传感器和用于当由传感器检测到狗时将机器人连接到门的气缸。 因此,在机器人通过气缸连接到门之后,可以通过关节式机器人的横向移动来打开和关闭门。
    • 8. 发明授权
    • Elevating mechanism, carrier conveying apparatus and heat treatment installation
    • 升降机构,载体输送装置和热处理装置
    • US06499933B2
    • 2002-12-31
    • US09773379
    • 2001-02-01
    • Osamu Tanigawa
    • Osamu Tanigawa
    • B66B516
    • H01L21/67706H01L21/6773H01L21/67769
    • In an elevating mechanism 14 where an elevating mechanism 17 carried so as to rise and fall along a fixed surface 16 is moved up and down through a suspension member 18, a braking mechanism 18 is born by the elevating mechanism 17 so as to pivot vertically. A tensile spring 32 is provided on the braking mechanism 31, for pivotally urging it to the direction close to the fixed surface 16, while the suspension member 18 is connected to the braking mechanism 31, for pulling the braking mechanism 31 in the direction apart from the fixed surface 16 due to the weight of the elevating mechanism 17, in opposition to the tensile spring 32. When the suspension member 18 is cut off, then the braking mechanism 31 comes into contact with and digs into the fixed surface 16 by action of the tensile spring 32, so that the elevating mechanism 17 can be stopped from falling.
    • 在升降机构14中,沿着固定表面16上下移动的升降机构17通过悬挂构件18上下移动,制动机构18由升降机构17承受,以便垂直地枢转。 在制动机构31上设置有拉伸弹簧32,用于将其靠近固定表面16的方向枢转地推动,同时悬架构件18连接到制动机构31,用于沿制动机构31拉出制动机构31 固定表面16由于升降机构17的重量而与拉伸弹簧32相对。当悬挂构件18被切断时,制动机构31与固定表面16接触并通过 拉伸弹簧32,使得升降机构17能够停止下落。
    • 9. 发明授权
    • Method and apparatus for wafer processing
    • 晶圆加工方法及装置
    • US06302927B1
    • 2001-10-16
    • US09600704
    • 2000-07-21
    • Osamu Tanigawa
    • Osamu Tanigawa
    • H01L2100
    • H01L21/67393H01L21/67772Y10T29/41
    • A wafer treatment apparatus is divided into a working zone (S1) and a loading zone (S2) by a wall (2). A closed wafer cassette(3) has a cassette body 31 having a bottom wall provided witha normally closed valve (5). A vent pipe (51) has one end part projecting from a cassette table (6) disposed in the working zone (S1) and the other end part opening into the loading zone (S2). When the cassette (3) is placed on the cassette table (6), the vent pipe (51) wedges through an incision formed in the valve (5) into the wafer cassette (3) to enable the interior of the cassette (3) to communicate with the loading zone (S2). Consequently, the pressure difference between the interior of the cassette (3) and the loading zone (S2) is reduced to naught.
    • 晶片处理装置通过壁(2)分为工作区(S1)和装载区(S2)。 封闭的晶片盒(3)具有带有设置有常闭阀(5)的底壁的盒体31。 通气管(51)具有从设置在工作区域(S1)中的盒式工作台(6)突出的一个端部,而通向开口区域(S2)的另一端部。 当盒(3)放置在盒式台(6)上时,排气管(51)通过形成在阀(5)中的切口楔入晶片盒(3)中,使得盒(3)的内部 与加载区域通信(S2)。 因此,盒(3)的内部与装载区(S2)之间的压力差减少到零。