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    • 1. 发明申请
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US20070010036A1
    • 2007-01-11
    • US11480895
    • 2006-07-06
    • Taichi EndoTeruyuki FujiiKiyofumi Ogino
    • Taichi EndoTeruyuki FujiiKiyofumi Ogino
    • H01L21/00
    • G03F7/2024G03F7/0007H01L27/3244H01L51/5284H01L2251/5315
    • It is an object of the present invention to provide a method for manufacturing a semiconductor device that can suppress generation of a crack and peeling in a resin BM and deterioration of coverage of an upper layer of the resin BM, even if a black resin is used as a material of the resin BM in order to improve a contrast of brightness and a contrast of color. As a method for manufacturing a semiconductor device, a non-photosensitive black resin layer is formed over a substrate, a positive resist film is formed over the non-photosensitive black resin layer, the positive resist film is exposed, a resin black matrix layer made of the non-photosensitive black resin layer is formed over the substrate by developing the positive resist film by using a first developing solution and by etching the non-photosensitive black resin layer, a non-exposed positive resist film over the resin black matrix layer, which remains after the development, is exposed, and the positive resist film is removed by using a second developing solution.
    • 本发明的目的是提供一种半导体器件的制造方法,即使使用黑色树脂,也能够抑制树脂BM的裂纹产生和树脂BM的剥离以及树脂BM的上层的覆盖的劣化 作为树脂BM的材料,以提高亮度的对比度和颜色的对比度。 作为半导体器件的制造方法,在基板上形成非感光性黑色树脂层,在非感光性黑色树脂层上形成正性抗蚀剂膜,曝光正性抗蚀剂膜,使树脂黑色矩阵层 通过使用第一显影液显影正性抗蚀剂膜并通过在树脂黑色矩阵层上蚀刻非感光性黑色树脂层,未曝光的正性抗蚀剂膜,在基材上形成非感光性黑色树脂层, 在显影后保留,曝光,通过使用第二显影液除去正性抗蚀剂膜。
    • 2. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07470621B2
    • 2008-12-30
    • US11480895
    • 2006-07-06
    • Taichi EndoTeruyuki FujiiKiyofumi Ogino
    • Taichi EndoTeruyuki FujiiKiyofumi Ogino
    • H01L21/302
    • G03F7/2024G03F7/0007H01L27/3244H01L51/5284H01L2251/5315
    • It is an object of the present invention to provide a method for manufacturing a semiconductor device that can suppress generation of a crack and peeling in a resin BM and deterioration of coverage of an upper layer of the resin BM, even if a black resin is used as a material of the resin BM in order to improve a contrast of brightness and a contrast of color. As a method for manufacturing a semiconductor device, a non-photosensitive black resin layer is formed over a substrate, a positive resist film is formed over the non-photosensitive black resin layer, the positive resist film is exposed, a resin black matrix layer made of the non-photosensitive black resin layer is formed over the substrate by developing the positive resist film by using a first developing solution and by etching the non-photosensitive black resin layer, a non-exposed positive resist film over the resin black matrix layer, which remains after the development, is exposed, and the positive resist film is removed by using a second developing solution.
    • 本发明的目的是提供一种半导体器件的制造方法,即使使用黑色树脂,也能够抑制树脂BM的裂纹产生和树脂BM的剥离以及树脂BM的上层的覆盖的劣化 作为树脂BM的材料,以提高亮度的对比度和颜色的对比度。 作为半导体器件的制造方法,在基板上形成非感光性黑色树脂层,在非感光性黑色树脂层上形成正性抗蚀剂膜,曝光正性抗蚀剂膜,使树脂黑色矩阵层 通过使用第一显影液显影正性抗蚀剂膜并通过在树脂黑色矩阵层上蚀刻非感光性黑色树脂层,未曝光的正性抗蚀剂膜,在基材上形成非感光性黑色树脂层, 在显影后保留,曝光,通过使用第二显影液除去正性抗蚀剂膜。
    • 3. 发明申请
    • Manufacturing method of display device and semiconductor device
    • 显示器件和半导体器件的制造方法
    • US20050245078A1
    • 2005-11-03
    • US11114870
    • 2005-04-26
    • Hideto OhnumaKiyofumi OginoTeruyuki Fujii
    • Hideto OhnumaKiyofumi OginoTeruyuki Fujii
    • H01L21/44H01L21/77
    • H01L27/1292
    • It is an object of the present invention to improve the surface planarity of a film by uniforming the thickness of an insulating layer. Further, it is another object of the invention to provide a technology for manufacturing an electronic device typified by a high-definition and high-quality display device with high yield at low cost with the use of the insulating layer. In a method for manufacturing a semiconductor device according to the invention, a semiconductor layer is formed; an insulating layer is formed over the semiconductor layer; a wiring layer connected to the semiconductor layer is formed in an opening provided in the insulating layer; and an electrode layer connected to the wiring layer is formed. The insulating layer is formed by spin coating with a composition containing an insulating material, which has a viscosity of from 10 mP·s to 50 mP·s.
    • 本发明的目的是通过使绝缘层的厚度均匀化来改善膜的表面平坦度。 此外,本发明的另一个目的是提供一种使用绝缘层以低成本制造高清晰度和高质量显示装置的电子装置的制造技术。 在根据本发明的半导体器件的制造方法中,形成半导体层; 在半导体层上形成绝缘层; 连接到半导体层的布线层形成在设置在绝缘层中的开口中; 形成与布线层连接的电极层。 绝缘层通过使用粘合剂为10mP.s至50mP.s.的包含绝缘材料的组合物进行旋涂而形成。
    • 4. 发明授权
    • Manufacturing method of display device and semiconductor device
    • 显示器件和半导体器件的制造方法
    • US07259110B2
    • 2007-08-21
    • US11114870
    • 2005-04-26
    • Hideto OhnumaKiyofumi OginoTeruyuki Fujii
    • Hideto OhnumaKiyofumi OginoTeruyuki Fujii
    • H01L21/31H01L21/469
    • H01L27/1292
    • It is an object of the present invention to improve the surface planarity of a film by uniforming the thickness of an insulating layer. Further, it is another object of the invention to provide a technology for manufacturing an electronic device typified by a high-definition and high-quality display device with high yield at low cost with the use of the insulating layer. In a method for manufacturing a semiconductor device according to the invention, a semiconductor layer is formed; an insulating layer is formed over the semiconductor layer; a wiring layer connected to the semiconductor layer is formed in an opening provided in the insulating layer; and an electrode layer connected to the wiring layer is formed. The insulating layer is formed by spin coating with a composition containing an insulating material, which has a viscosity of from 10 mPa·s to 50 mPa·s.
    • 本发明的目的是通过使绝缘层的厚度均匀化来改善膜的表面平坦度。 此外,本发明的另一个目的是提供一种使用绝缘层以低成本制造高清晰度和高质量显示装置的电子装置的制造技术。 在根据本发明的半导体器件的制造方法中,形成半导体层; 在半导体层上形成绝缘层; 连接到半导体层的布线层形成在设置在绝缘层中的开口中; 形成与布线层连接的电极层。 绝缘层通过旋涂法,其中含有绝缘材料的组合物形成,该组合物的粘度为10mPa.s至50mPa.s。
    • 6. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20120193435A1
    • 2012-08-02
    • US13361988
    • 2012-01-31
    • Kazuya HANAOKAHideto OhnumaTeruyuki Fujii
    • Kazuya HANAOKAHideto OhnumaTeruyuki Fujii
    • G06K19/077
    • H01Q1/2208H01Q9/0407H01Q23/00
    • An object of the present invention is to prevent electrical characteristics of circuit elements from being adversely affected by copper diffusion in a semiconductor device having an integrated circuit and an antenna formed over one substrate, which uses copper plating for the antenna. Another object is to prevent a defect of a semiconductor device due to poor connection between an antenna and an integrated circuit in a semiconductor device having the integrated circuit and the antenna formed over one substrate. In a semiconductor device having an integrated circuit 100 and an antenna 101 formed over one substrate 102, when a copper plating layer 108 is used for a conductor of the antenna 101, it is possible to decrease an adverse effect on electrical characteristics of circuit elements due to copper diffusion because a base layer 107 of the antenna 101 uses a nitride film of a predetermined metal.
    • 本发明的目的是为了防止在具有集成电路的半导体器件中的电路元件的电气特性受到不利影响,并且在一个衬底上形成天线,该衬底使用用于天线的铜电镀。 另一个目的是防止在具有集成电路的半导体器件中的天线与集成电路之间的不良连接导致半导体器件的缺陷,并且形成在一个衬底上的天线。 在具有集成电路100和在一个基板102上形成的天线101的半导体器件中,当将铜镀层108用于天线101的导体时,可以减少对电路元件的电特性的不利影响, 由于天线101的基极层107使用预定金属的氮化物膜而导致铜扩散。
    • 10. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07750852B2
    • 2010-07-06
    • US12055918
    • 2008-03-26
    • Kazuya HanaokaHideto OhnumaTeruyuki Fujii
    • Kazuya HanaokaHideto OhnumaTeruyuki Fujii
    • H01Q1/38
    • H01Q1/2208H01Q9/0407H01Q23/00
    • An object of the present invention is to prevent electrical characteristics of circuit elements from being adversely affected by copper diffusion in a semiconductor device having an integrated circuit and an antenna formed over the same substrate, which uses copper plating for the antenna. Another object is to prevent a defect of a semiconductor device due to poor connection between an antenna and an integrated circuit in a semiconductor device having the integrated circuit and the antenna formed over the same substrate. In a semiconductor device having an integrated circuit 100 and an antenna 101 formed over one substrate 102, when a copper plating layer 108 is used for a conductor of the antenna 101, it is possible to prevent copper diffusion to circuit elements and decrease an adverse effect on electrical characteristics of circuit elements due to the copper diffusion because a base layer 107 of the antenna 101 uses a nitride film of a predetermined metal. Moreover, by the use of nickel nitride as a metal nitride for the base layer of the antenna, poor connection between the antenna and the integrated circuit can be decreased.
    • 本发明的目的是为了防止电路元件的电特性在具有集成电路的半导体器件和形成在同一衬底上的天线的铜扩散的不利影响,该天线使用用于天线的铜电镀。 另一个目的是防止由于在具有集成电路的半导体器件中的天线和集成电路之间的连接不良而导致半导体器件的缺陷,并且天线形成在同一衬底上。 在具有形成在一个基板102上的集成电路100和天线101的半导体器件中,当将铜镀层108用于天线101的导体时,可以防止铜扩散到电路元件并降低不利影响 由于铜扩散而导致的电路元件的电特性,因为天线101的基极层107使用预定金属的氮化物膜。 此外,通过使用氮化镍作为天线的基底层的金属氮化物,可以降低天线与集成电路之间的不良连接。