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    • 1. 发明授权
    • Method for fabricating cell structure of non-volatile memory device
    • 非易失性存储器件单元结构的制造方法
    • US07445992B2
    • 2008-11-04
    • US11281471
    • 2005-11-18
    • Tae-Jung LeeByung-Sun KimJoon-Hyung Lee
    • Tae-Jung LeeByung-Sun KimJoon-Hyung Lee
    • H01L21/336
    • H01L29/66825H01L21/28273H01L29/42324H01L29/7885
    • A cell structure of a non-volatile memory device, which uses a nitride layer as a floating gate spacer, includes a gate stack and a floating gate transistor formed over a semiconductor substrate. The gate stack includes a first portion of a floating gate, a control gate formed over the first portion of the floating gate, and a non-nitride spacer adjacent to sidewalls of the first portion of floating gate. The floating gate transistor includes a second portion of the floating gate, which substantially overlaps a source and/or drain formed in the substrate. The application of ultraviolet rays to the non-nitride spacer of a programmed cell can causes the second portion of the floating gate to discharge, thereby easily erasing the programmed cell.
    • 使用氮化物层作为浮动栅极隔离物的非易失性存储器件的单元结构包括形成在半导体衬底上的栅极堆叠和浮置栅极晶体管。 栅极堆叠包括浮置栅极的第一部分,形成在浮置栅极的第一部分上的控制栅极以及与浮动栅极的第一部分的侧壁相邻的非氮化物间隔物。 浮栅晶体管包括浮置栅极的第二部分,其基本上与衬底中形成的源极和/或漏极重叠。 将紫外线施加到编程单元的非氮化物间隔物可能导致浮栅的第二部分放电,从而容易地擦除编程的单元。
    • 2. 发明授权
    • Dual port semiconductor memory device
    • 双端口半导体存储器件
    • US07120080B2
    • 2006-10-10
    • US10751178
    • 2004-01-02
    • Tae-Jung LeeByung-Sun KimJoon-Hyung Lee
    • Tae-Jung LeeByung-Sun KimJoon-Hyung Lee
    • G11C8/00G11C5/06G11C11/00G06F12/00G06F13/28
    • H01L27/1104G09G3/3611G11C7/02G11C8/16G11C11/4125H01L27/11
    • A dual port semiconductor memory device, including PMOS scan transistors, is provided. The dual port semiconductor memory device includes two PMOS transistors, two NMOS pull-down transistors, two NMOS pass transistors, and a PMOS scan transistor. The scan transistor being PMOS, noise margins can be improved. In addition, these seven transistors are arranged in two n-wells and 2 p-wells, while n-wells and p-wells are arranged in series and in alternating fashion. Therefore, the length of a memory cell along the minor axis of the memory cell is relatively short. This memory cell layout helps shorten the length of a bit line by arranging a pair of bitlines in parallel with well boundaries, i.e., in the direction of the short axis of the memory cell, and makes it possible to prevent crosstalk between a bitline and a complementary bitline by arranging conductive lines between the bitline and the complementary bitline.
    • 提供了包括PMOS扫描晶体管的双端口半导体存储器件。 双端口半导体存储器件包括两个PMOS晶体管,两个NMOS下拉晶体管,两个NMOS传输晶体管和PMOS扫描晶体管。 作为PMOS的扫描晶体管,可以提高噪声容限。 此外,这七个晶体管排列在两个n阱和2个p阱中,而n阱和p阱以串联和交替的方式排列。 因此,沿着存储单元的短轴的存储单元的长度相对较短。 该存储单元布局通过将一对位线与阱边界并排布置,即在存储单元的短轴方向上有助于缩短位线的长度,并且可以防止位线与位线之间的串扰 通过在位线和互补位线之间布置导线来补充位线。
    • 6. 发明授权
    • Dual port semiconductor memory device
    • 双端口半导体存储器件
    • US07330392B2
    • 2008-02-12
    • US11470826
    • 2006-09-07
    • Tae-Jung LeeByung-Sun KimJoon-Hung Lee
    • Tae-Jung LeeByung-Sun KimJoon-Hung Lee
    • G11C8/00
    • H01L27/1104G09G3/3611G11C7/02G11C8/16G11C11/4125H01L27/11
    • A dual port semiconductor memory device, including PMOS scan transistors, is provided. The dual port semiconductor memory device includes two PMOS transistors, two NMOS pull-down transistors, two NMOS pass transistors, and a PMOS scan transistor. The scan transistor being PMOS, noise margins can be improved. In addition, these seven transistors are arranged in two n-wells and 2 p-wells, while n-wells and p-wells are arranged in series and in alternating fashion. Therefore, the length of a memory cell along the minor axis of the memory cell is relatively short. This memory cell layout helps shorten the length of a bit line by arranging a pair of bitlines in parallel with well boundaries, i.e., in the direction of the short axis of the memory cell, and makes it possible to prevent crosstalk between a bitline and a complementary bitline by arranging conductive lines between the bitline and the complementary bitline.
    • 提供了包括PMOS扫描晶体管的双端口半导体存储器件。 双端口半导体存储器件包括两个PMOS晶体管,两个NMOS下拉晶体管,两个NMOS传输晶体管和PMOS扫描晶体管。 作为PMOS的扫描晶体管,可以提高噪声容限。 此外,这七个晶体管排列在两个n阱和2个p阱中,而n阱和p阱以串联和交替的方式排列。 因此,沿着存储单元的短轴的存储单元的长度相对较短。 该存储单元布局通过将一对位线与阱边界并排布置,即在存储单元的短轴方向上有助于缩短位线的长度,并且可以防止位线与位线之间的串扰 通过在位线和互补位线之间布置导线来补充位线。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20080035986A1
    • 2008-02-14
    • US11834129
    • 2007-08-06
    • Sang-Soo KimByung-Sun Kim
    • Sang-Soo KimByung-Sun Kim
    • H01L29/792
    • H01L27/11526H01L27/105H01L27/11546
    • A method of fabricating a semiconductor device having a non-volatile memory cell includes forming an insulation layer as an uppermost/outermost portion of the memory cell to enhance the charge retention capability of the memory cell. The insulation layer is formed after the gate structure and integrate dielectric of the non-volatile memory cell, and a gate of a logic transistor are formed. The insulation layer thus enhances the function of the intergate dielectric. Subsequently, a conductive layer is formed on the substrate including over the gate of the logic transistor. A silicide layer is then formed on the gate of the logic transistor and on the substrate adjacent opposite sides of the gate. The insulation layer thus also serves prevent the formation of a silicide layer on the non-volatile memory cell.
    • 制造具有非易失性存储单元的半导体器件的方法包括形成作为存储单元的最上部/最外部的绝缘层,以提高存储单元的电荷保持能力。 在栅极结构之后形成绝缘层并且整合非易失性存储单元的电介质,并且形成逻辑晶体管的栅极。 因此,绝缘层增强了隔间电介质的功能。 随后,在包括在逻辑晶体管的栅极上的衬底上形成导电层。 然后在逻辑晶体管的栅极上和邻近栅极的相对侧的衬底上形成硅化物层。 因此,绝缘层也用于防止在非易失性存储单元上形成硅化物层。