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    • 3. 发明申请
    • Calibration Method For Edge Inspection Apparatus
    • 边缘检测仪的校准方法
    • US20090201495A1
    • 2009-08-13
    • US12305993
    • 2007-06-14
    • Kazuyuki HiramotoTsuyoshi Iwasaki
    • Kazuyuki HiramotoTsuyoshi Iwasaki
    • G01N21/93
    • G01N21/9503G01B11/306G01N21/274G01N21/4788
    • A calibration method for an edge inspection apparatus having: a light emitting portion which irradiates light onto an edge of a substrate being inspected; and a detection portion which detects optical characteristics of the light reflected by the edge to detect the defect occurring in the edge based on the optical characteristics, wherein the calibration method including: a pseudo-defect formation step of forming a plurality of pseudo-defects on an edge of a substrate for calibration along a circumferential direction thereof, in which at least one of a position in the thickness direction of the substrate, the shape and the size is set so as to be different between the pseudo-defects; a detection step of irradiating the inspection light onto the respective pseudo-defects, and detecting the optical characteristics of the reflection light by the detection portion; and an adjustment step of calibrating the edge inspection apparatus based on the optical characteristics.
    • 一种边缘检查装置的校准方法,具有:发光部,其将光照射到被检查的基板的边缘上; 以及检测部,其检测由所述边缘反射的光的光学特性,以基于所述光学特性来检测所述边缘中出现的缺陷,其中所述校准方法包括:伪缺陷形成步骤,形成多个伪缺陷 沿着其圆周方向进行校准的基板的边缘,其中基板的厚度方向的位置,形状和尺寸中的至少一个被设置为在伪缺陷之间不同; 检测步骤,将检查光照射到各个伪缺陷上,并通过检测部分检测反射光的光学特性; 以及基于光学特性校准边缘检查装置的调整步骤。