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    • 6. 发明授权
    • Method of fabricating a semiconductor memory device
    • 制造半导体存储器件的方法
    • US5405800A
    • 1995-04-11
    • US274048
    • 1994-07-12
    • Hisashi OgawaSusumu MatsumotoShin HashimotoHiroyuki Umimoto
    • Hisashi OgawaSusumu MatsumotoShin HashimotoHiroyuki Umimoto
    • H01L27/108H01L21/70
    • H01L27/10808
    • A method of fabricating a semiconductor memory device on a semiconductor substrate is disclosed. A gate electrode that becomes a word line, a bit line, and a charge-storage electrode are formed in a memory cell array region of a semiconductor substrate. A capacitor insulator layer and a plate electrode are formed in that order. Then, a BPSG film is formed in the memory cell array region and in the peripheral circuit region. A resist pattern is formed on the BPSG film, leaving the memory cell array region exposed. Using the resist pattern thus formed as a mask, an etching treatment is applied to remove an upper surface portion of the BPSG film lying within the memory cell array region by a given amount. After the resist pattern is removed, the BPSG film is heated in order that it reflows to planarize.
    • 公开了一种在半导体衬底上制造半导体存储器件的方法。 在半导体衬底的存储单元阵列区域中形成成为字线,位线和电荷存储电极的栅电极。 依次形成电容器绝缘体层和平板电极。 然后,在存储单元阵列区域和外围电路区域中形成BPSG膜。 在BPSG膜上形成抗蚀剂图案,使存储单元阵列区域暴露。 使用如此形成的抗蚀剂图案作为掩模,进行蚀刻处理以将存在于存储单元阵列区域内的BPSG膜的上表面部分除去给定量。 在除去抗蚀剂图案之后,加热BPSG膜,使其回流平坦化。
    • 9. 发明授权
    • Speed increasing/decreasing apparatus
    • 速度增减装置
    • US08672792B2
    • 2014-03-18
    • US13003724
    • 2009-10-06
    • Yasuyoshi TozakiTakeshi YoshimiHiroyuki SonobeIsamu ShiotsuSusumu Matsumoto
    • Yasuyoshi TozakiTakeshi YoshimiHiroyuki SonobeIsamu ShiotsuSusumu Matsumoto
    • F16H13/08
    • F16H13/08F16C19/163F16C19/364F16C19/542F16C2240/34F16C2361/61
    • A first rotary shaft and a second rotary are rotatable around a rotation axis. The second rotary shaft has a cylindrical supporting part that covers an end section of the first rotary shaft. A case supports the first and second rotary shafts. A first rolling bearing is disposed between the first rotary shaft and the case and rotatably supports the first rotary shaft. A second rolling bearing is disposed between the supporting part and the first rotary shaft and supports the first rotary shaft and the second rotary shaft such that they are rotatable relative to each other. A transmission part of the second rotary shaft transmits to the second rolling bearing a preload force that pushes the second rotary shaft to the first rotary shaft side. A load-receiving part of the case receives the preload force transmitted from the second rolling bearing to the first rolling bearing.
    • 第一旋转轴和第二旋转体可围绕旋转轴线旋转。 第二旋转轴具有覆盖第一旋转轴的端部的筒状支撑部。 壳体支撑第一和第二旋转轴。 第一滚动轴承设置在第一旋转轴和壳体之间并且可旋转地支撑第一旋转轴。 第二滚动轴承设置在支撑部分和第一旋转轴之间,并且支撑第一旋转轴和第二旋转轴使得它们能够相对于彼此旋转。 第二旋转轴的变速部向第二滚动轴承传递将第二旋转轴推到第一旋转轴侧的预压力。 壳体的承载部接收从第二滚动轴承传递到第一滚动轴承的预载荷力。