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1. 发明授权

US08111114B2 MEMS filter with voltage tunable center frequency and bandwidth 有权
标题翻译：具有电压可调中心频率和带宽的MEMS滤波器
公开(公告)号：US08111114B2
公开(公告)日：2012-02-07
申请号：US12299341
申请日：2007-05-02
申请人： Sunil Bhave , Lih Feng Cheow
发明人： Sunil Bhave , Lih Feng Cheow
IPC分类号： H03H9/46 , H03H3/013
CPC分类号： H01P1/203
摘要： A tunable MEMS filter is disclosed, having a substrate with first and second isolated substrate areas. First and second anchor points are coupled to the substrate. A base is coupled to the first and second anchor points by first and second coupling beams, respectively. A dielectric layer is coupled to the base. An input conductor is coupled to the at least one dielectric layer. An output conductor is coupled to the at least one dielectric layer.A method of tuning a center frequency and a bandwidth of a MEMS resonator filter is also disclosed. A first bias voltage is adjusted between a base layer and input and output conductor layers. A second bias voltage is adjusted between the base layer and isolated substrate areas. The center frequency and the bandwidth are determined until the adjustments to the bias voltages provide a desired center frequency and a desired bandwidth.
摘要翻译：公开了一种可调谐MEMS滤波器，其具有具有第一和第二隔离衬底区域的衬底。第一和第二锚定点耦合到基底。基座分别通过第一和第二耦合梁耦合到第一和第二锚定点。电介质层耦合到基底。输入导体耦合到至少一个电介质层。输出导体耦合到至少一个电介质层。还公开了一种调谐MEMS谐振滤波器的中心频率和带宽的方法。在基极层和输入和输出导体层之间调节第一偏置电压。在基极层和隔离的衬底区域之间调节第二偏置电压。确定中心频率和带宽，直到对偏置电压的调整提供期望的中心频率和期望的带宽。

2. 发明申请

US20090322448A1 MEMS FILTER WITH VOLTAGE TUNABLE CENTER FREQUENCY AND BANDWIDTH 有权
标题翻译：具有电压中心频率和带宽的MEMS滤波器
公开(公告)号：US20090322448A1
公开(公告)日：2009-12-31
申请号：US12299341
申请日：2007-05-02
申请人： Sunil Bhave , Lih Feng Cheow
发明人： Sunil Bhave , Lih Feng Cheow
IPC分类号： H03H9/02
CPC分类号： H01P1/203
摘要： A tamable MEMS filter is disclosed, having a substrate with first and second isolated substrate areas. First and second anchor points are coupled to the substrate. A base is coupled to the first and second anchor points by first and second coupling beams, respectively. A dielectric layer is coupled to the base. An input conductor is coupled to the at least one dielectric layer. An output conductor is coupled to the at least one dielectric layer.A method of tuning a center frequency and a bandwidth of a MEMS resonator filter is also disclosed. A first bias voltage is adjusted between a base layer and input and output conductor layers. A second bias voltage is adjusted between the base layer and isolated substrate areas. The center frequency and the bandwidth are determined until the adjustments to the bias voltages provide a desired center frequency and a desired bandwidth.
摘要翻译：公开了一种可变MEMS MEMS滤波器，其具有具有第一和第二隔离衬底区域的衬底。第一和第二锚定点耦合到基底。基座分别通过第一和第二耦合梁耦合到第一和第二锚定点。电介质层耦合到基底。输入导体耦合到至少一个电介质层。输出导体耦合到至少一个电介质层。还公开了一种调谐MEMS谐振滤波器的中心频率和带宽的方法。在基极层和输入和输出导体层之间调节第一偏置电压。在基极层和隔离的衬底区域之间调节第二偏置电压。确定中心频率和带宽，直到对偏置电压的调整提供期望的中心频率和期望的带宽。

3. 发明申请

US20070103258A1 DIELECTRICALLY TRANSDUCED SINGLE-ENDED TO DIFFERENTIAL MEMS FILTER 有权
标题翻译：电介质传输单端到差分MEMS滤波器
公开(公告)号：US20070103258A1
公开(公告)日：2007-05-10
申请号：US11556510
申请日：2006-11-03
申请人： Dana Weinstein , Sunil Bhave
发明人： Dana Weinstein , Sunil Bhave
IPC分类号： H03H9/46
CPC分类号： H03H9/2431 , H03H3/0072 , H03H9/02259 , H03H9/02433 , H03H9/2436 , H03H9/505 , H03H2009/02354 , H03H2009/0248 , H03H2009/02503
摘要： A MEMS filter has an input layer for receiving a signal input, and an output layer for providing a signal output. The MEMS filter also has a first resonator and a second resonator coupled to the first resonator such that movement transduced in the first resonator by the signal input causes movement of the second resonator which transduces the signal output. A method of manufacturing a MEMS filter is also disclosed. A dielectric layer is formed on a base. A patterned electrode layer is formed at least in part on the dielectric layer. The base is etched to define a resonator structure. A method of adjusting a desired input impedance and an output impedance of a dielectrically transduced MEMS filter having transduction electrodes coupled to a dielectric film is further disclosed. The method includes adjusting a DC bias voltage on the transduction electrodes.
摘要翻译： MEMS滤波器具有用于接收信号输入的输入层和用于提供信号输出的输出层。 MEMS滤波器还具有耦合到第一谐振器的第一谐振器和第二谐振器，使得通过信号输入在第一谐振器中转换的运动引起转换信号输出的第二谐振器的移动。还公开了一种制造MEMS滤波器的方法。在基底上形成电介质层。图案化的电极层至少部分地形成在电介质层上。蚀刻基底以限定谐振器结构。还公开了一种调节具有耦合到电介质膜的换向电极的介电转换MEMS滤波器的期望输入阻抗和输出阻抗的方法。该方法包括调整转导电极上的直流偏置电压。

4. 发明申请

US20140260614A1 GYROSCOPES BASED ON OPTOMECHANICAL SENSING 有权
标题翻译：基于光化学感测的GYROSCOPES
公开(公告)号：US20140260614A1
公开(公告)日：2014-09-18
申请号：US14232880
申请日：2012-07-16
申请人： Sunil Bhave , Renyuan Wang
发明人： Sunil Bhave , Renyuan Wang
IPC分类号： G01C19/04
CPC分类号： G01C19/04 , G01C19/5677 , G01C19/5726
摘要： Gyroscopes based on optomechanical designs to provide sensitive sensing while providing relatively large bandwidth and dynamic range with enhanced noise performance.
摘要翻译：基于光机械设计的陀螺仪提供灵敏感测，同时提供相对较大的带宽和动态范围，增强噪声性能。

5. 发明授权

US09528829B2 Gyroscopes based on optomechanical sensing 有权
标题翻译：基于机电感测的陀螺仪
公开(公告)号：US09528829B2
公开(公告)日：2016-12-27
申请号：US14232880
申请日：2012-07-16
申请人： Sunil Bhave , Renyuan Wang
发明人： Sunil Bhave , Renyuan Wang
IPC分类号： G01C19/56 , G01C19/04 , G01C19/5677 , G01C19/5726
CPC分类号： G01C19/04 , G01C19/5677 , G01C19/5726
摘要： Gyroscopes based on optomechanical designs to provide sensitive sensing while providing relatively large bandwidth and dynamic range with enhanced noise performance.
摘要翻译：基于光机械设计的陀螺仪提供灵敏感测，同时提供相对较大的带宽和动态范围，增强噪声性能。

6. 发明授权

US09036951B2 Silicon acousto-optic modulator structure and method 有权
标题翻译：硅声光调制器的结构与方法
公开(公告)号：US09036951B2
公开(公告)日：2015-05-19
申请号：US13556617
申请日：2012-07-24
申请人： Sunil Bhave , Suresh Sridaran
发明人： Sunil Bhave , Suresh Sridaran
IPC分类号： G02F1/01 , G02F1/035 , G02F1/295 , G02F1/335 , G02B26/02 , G02B6/12 , G02F1/11 , G02F1/125
CPC分类号： G02F1/335 , G02B6/12007 , G02B26/02 , G02F1/113 , G02F1/125 , G02F2201/17 , G02F2201/20 , G02F2201/58 , G02F2202/105 , G02F2203/15
摘要： An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated are related fabrication and operation methods.
摘要翻译：可以包括用于光声振荡器的声光调制器的电光结构包括多个刚性连接的谐振器芯组件，其被定位成可移动地分离在衬底上并且在锚点处锚定到衬底。致动器电极与刚性连接的谐振器芯部件中的第一个分离开，并且光波导与刚性连接的谐振器芯部件中的第二个分离。致动器电极的射频和直流致动在第一刚性连接的谐振器芯部件中提供机械振动，机械耦合到第二刚性连接的谐振器芯部件，其用于光学调制通过波导传输的光。也可以进行反向操作。实施例还考虑了作为辐射压力驱动检测器的第三刚性连接的谐振器芯部件。进一步考虑的是相关的制造和操作方法。

7. 发明申请

US20120294564A1 SILICON ACOUSTO-OPTIC MODULATOR STRUCTURE AND METHOD 有权
标题翻译：硅光学调制器结构与方法
公开(公告)号：US20120294564A1
公开(公告)日：2012-11-22
申请号：US13556617
申请日：2012-07-24
申请人： Sunil Bhave , Suresh Sridaran
发明人： Sunil Bhave , Suresh Sridaran
IPC分类号： G02F1/035 , G02B6/12 , H01L21/283
CPC分类号： G02F1/335 , G02B6/12007 , G02B26/02 , G02F1/113 , G02F1/125 , G02F2201/17 , G02F2201/20 , G02F2201/58 , G02F2202/105 , G02F2203/15
摘要： An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated is a related fabrication method and a related operation method.
摘要翻译：可以包括用于光声振荡器的声光调制器的电光结构包括多个刚性连接的谐振器芯组件，其被定位成可移动地分离在衬底上并且在锚点处锚定到衬底。致动器电极与刚性连接的谐振器芯部件中的第一个分离开，并且光波导与刚性连接的谐振器芯部件中的第二个分离。致动器电极的射频和直流致动在第一刚性连接的谐振器芯部件中提供机械振动，机械耦合到第二刚性连接的谐振器芯部件，其用于光学调制通过波导传输的光。也可以进行反向操作。实施例还考虑了作为辐射压力驱动检测器的第三刚性连接的谐振器芯部件。进一步考虑的是相关的制造方法和相关的操作方法。

8. 发明申请

US20060017523A1 Internal electrostatic transduction structures for bulk-mode micromechanical resonators 有权
公开(公告)号：US20060017523A1
公开(公告)日：2006-01-26
申请号：US11146303
申请日：2005-06-03
申请人： Sunil Bhave , Roger Howe
发明人： Sunil Bhave , Roger Howe
IPC分类号： H03H9/00
CPC分类号： H03H9/2405 , H03H9/02259 , H03H2009/02496 , H03H2009/02511
摘要： An electrostatic transducer for micromechanical resonators, in which the electrode gaps are filled with a dielectric material having a much higher permittivity than air. This internal electrostatic transducer has several advantages over both air-gap electrostatic and piezoelectric transduction; including lower motional impedance, compatibility with advanced scaled CMOS device technology, and extended dynamic range. In one aspect, in order to minimize energy losses, the dielectric material has an acoustic velocity which is matched to that of the resonator material. Internal electrostatic transduction can be adapted to excite and detect either vertical modes (perpendicular to the substrate) or lateral modes (in the plane of the substrate). Its increased transduction efficiency is of particular importance for reducing the motional resistance of the latter.

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