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    • 1. 发明授权
    • MEMS filter with voltage tunable center frequency and bandwidth
    • 具有电压可调中心频率和带宽的MEMS滤波器
    • US08111114B2
    • 2012-02-07
    • US12299341
    • 2007-05-02
    • Sunil BhaveLih Feng Cheow
    • Sunil BhaveLih Feng Cheow
    • H03H9/46H03H3/013
    • H01P1/203
    • A tunable MEMS filter is disclosed, having a substrate with first and second isolated substrate areas. First and second anchor points are coupled to the substrate. A base is coupled to the first and second anchor points by first and second coupling beams, respectively. A dielectric layer is coupled to the base. An input conductor is coupled to the at least one dielectric layer. An output conductor is coupled to the at least one dielectric layer.A method of tuning a center frequency and a bandwidth of a MEMS resonator filter is also disclosed. A first bias voltage is adjusted between a base layer and input and output conductor layers. A second bias voltage is adjusted between the base layer and isolated substrate areas. The center frequency and the bandwidth are determined until the adjustments to the bias voltages provide a desired center frequency and a desired bandwidth.
    • 公开了一种可调谐MEMS滤波器,其具有具有第一和第二隔离衬底区域的衬底。 第一和第二锚定点耦合到基底。 基座分别通过第一和第二耦合梁耦合到第一和第二锚定点。 电介质层耦合到基底。 输入导体耦合到至少一个电介质层。 输出导体耦合到至少一个电介质层。 还公开了一种调谐MEMS谐振滤波器的中心频率和带宽的方法。 在基极层和输入和输出导体层之间调节第一偏置电压。 在基极层和隔离的衬底区域之间调节第二偏置电压。 确定中心频率和带宽,直到对偏置电压的调整提供期望的中心频率和期望的带宽。
    • 5. 发明申请
    • MEMS FILTER WITH VOLTAGE TUNABLE CENTER FREQUENCY AND BANDWIDTH
    • 具有电压中心频率和带宽的MEMS滤波器
    • US20090322448A1
    • 2009-12-31
    • US12299341
    • 2007-05-02
    • Sunil BhaveLih Feng Cheow
    • Sunil BhaveLih Feng Cheow
    • H03H9/02
    • H01P1/203
    • A tamable MEMS filter is disclosed, having a substrate with first and second isolated substrate areas. First and second anchor points are coupled to the substrate. A base is coupled to the first and second anchor points by first and second coupling beams, respectively. A dielectric layer is coupled to the base. An input conductor is coupled to the at least one dielectric layer. An output conductor is coupled to the at least one dielectric layer.A method of tuning a center frequency and a bandwidth of a MEMS resonator filter is also disclosed. A first bias voltage is adjusted between a base layer and input and output conductor layers. A second bias voltage is adjusted between the base layer and isolated substrate areas. The center frequency and the bandwidth are determined until the adjustments to the bias voltages provide a desired center frequency and a desired bandwidth.
    • 公开了一种可变MEMS MEMS滤波器,其具有具有第一和第二隔离衬底区域的衬底。 第一和第二锚定点耦合到基底。 基座分别通过第一和第二耦合梁耦合到第一和第二锚定点。 电介质层耦合到基底。 输入导体耦合到至少一个电介质层。 输出导体耦合到至少一个电介质层。 还公开了一种调谐MEMS谐振滤波器的中心频率和带宽的方法。 在基极层和输入和输出导体层之间调节第一偏置电压。 在基极层和隔离的衬底区域之间调节第二偏置电压。 确定中心频率和带宽,直到对偏置电压的调整提供期望的中心频率和期望的带宽。