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    • 3. 发明授权
    • Semiconductor devices and methods of forming the same
    • 半导体器件及其形成方法
    • US07656008B2
    • 2010-02-02
    • US11968234
    • 2008-01-02
    • Sun-Ha Hwang
    • Sun-Ha Hwang
    • H01L29/8605
    • H01L27/0629H01L21/743H01L21/76802H01L23/485H01L28/20H01L29/41766H01L29/665H01L29/7833H01L2924/0002H01L2924/3011H01L2924/00
    • Semiconductor devices are disclose that include a first doped region and a second doped region spaced apart from each other and defined within a same well of a semiconductor substrate. A gate insulating layer and a gate electrode are stacked on a channel region between the first and second doped regions. Spacers are on opposite sidewalls of gate electrode. A first surface metal silicide layer extends across a top surface of the first doped region adjacent to the spacer. A second surface metal silicide layer extends across a top surface of the second doped region adjacent to the spacer. At least one insulation layer extends across the semiconductor substrate including the first and second surface metal silicide layers. A first contact plug extends through the insulation layer and contacts the first surface metal silicide layer. A second contact plug extends through the insulation layer, the second surface metal silicide layer, and the second doped region into the well within the semiconductor substrate. Related methods of forming semiconductor devices are disclosed.
    • 公开了半导体器件,其包括彼此间隔开并限定在半导体衬底的同一阱内的第一掺杂区域和第二掺杂区域。 栅极绝缘层和栅电极堆叠在第一和第二掺杂区域之间的沟道区上。 隔板位于栅电极的相对侧壁上。 第一表面金属硅化物层延伸穿过与间隔物相邻的第一掺杂区域的顶表面。 第二表面金属硅化物层延伸穿过邻近间隔物的第二掺杂区的顶表面。 至少一个绝缘层延伸穿过包括第一和第二表面金属硅化物层的半导体衬底。 第一接触插塞延伸穿过绝缘层并接触第一表面金属硅化物层。 第二接触插塞穿过绝缘层,第二表面金属硅化物层和第二掺杂区域延伸到半导体衬底内的阱中。 公开了形成半导体器件的相关方法。
    • 6. 发明申请
    • SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
    • 半导体器件及其形成方法
    • US20080169515A1
    • 2008-07-17
    • US11968234
    • 2008-01-02
    • Sun-Ha Hwang
    • Sun-Ha Hwang
    • H01L21/8234H01L27/06
    • H01L27/0629H01L21/743H01L21/76802H01L23/485H01L28/20H01L29/41766H01L29/665H01L29/7833H01L2924/0002H01L2924/3011H01L2924/00
    • Semiconductor devices are disclose that include a first doped region and a second doped region spaced apart from each other and defined within a same well of a semiconductor substrate. A gate insulating layer and a gate electrode are stacked on a channel region between the first and second doped regions. Spacers are on opposite sidewalls of gate electrode. A first surface metal silicide layer extends across a top surface of the first doped region adjacent to the spacer. A second surface metal silicide layer extends across a top surface of the second doped region adjacent to the spacer. At least one insulation layer extends across the semiconductor substrate including the first and second surface metal silicide layers. A first contact plug extends through the insulation layer and contacts the first surface metal silicide layer. A second contact plug extends through the insulation layer, the second surface metal silicide layer, and the second doped region into the well within the semiconductor substrate. Related methods of forming semiconductor devices are disclosed.
    • 公开了半导体器件,其包括彼此间隔开并限定在半导体衬底的同一阱内的第一掺杂区域和第二掺杂区域。 栅极绝缘层和栅电极堆叠在第一和第二掺杂区域之间的沟道区上。 隔板位于栅电极的相对侧壁上。 第一表面金属硅化物层延伸穿过与间隔物相邻的第一掺杂区域的顶表面。 第二表面金属硅化物层延伸穿过邻近间隔物的第二掺杂区的顶表面。 至少一个绝缘层延伸穿过包括第一和第二表面金属硅化物层的半导体衬底。 第一接触插塞延伸穿过绝缘层并接触第一表面金属硅化物层。 第二接触插塞穿过绝缘层,第二表面金属硅化物层和第二掺杂区域延伸到半导体衬底内的阱中。 公开了形成半导体器件的相关方法。