专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06740580B1 Method to form copper interconnects by adding an aluminum layer to the copper diffusion barrier 失效
标题翻译：通过向铜扩散阻挡层添加铝层来形成铜互连的方法
公开(公告)号：US06740580B1
公开(公告)日：2004-05-25
申请号：US09389633
申请日：1999-09-03
申请人： Subhash Gupta , Chyi S. Chern , Mei Sheng Zhou
发明人： Subhash Gupta , Chyi S. Chern , Mei Sheng Zhou
IPC分类号： H01L214763
CPC分类号： H01L21/76846 , H01L21/76873 , H01L21/76874 , H01L23/53238 , H01L2924/0002 , H01L2924/00
摘要： A method to form copper interconnects is described. The method may be used to form single or dual damascene interconnects. The addition of an aluminum barrier layer to the conventional barrier layer creates a superior barrier to copper diffusion. A substrate layer is provided. A dielectric layer is deposited overlying the substrate layer. The dielectric layer patterned to form interconnect trenches. An optional titanium adhesion layer may be deposited. An aluminum barrier layer is deposited overlying the interior surfaces of the trenches. A second barrier layer, comprising for instance titanium and titanium nitride, is deposited overlying the aluminum barrier layer. A copper layer is deposited overlying the second barrier layer and filling the interconnect trenches. The copper layer, the second barrier layer, and the aluminum barrier layer are polished down to the top surface of the dielectric layer to define the copper interconnects, and complete the fabrication of the integrated circuit device.
摘要翻译：描述形成铜互连的方法。该方法可以用于形成单镶嵌或双镶嵌互连。向常规阻挡层添加铝阻挡层产生对铜扩散的优异屏障。提供基底层。沉积在基底层上的电介质层。图案化的电介质层形成互连沟槽。可以沉积可选的钛粘合层。覆盖在沟槽的内表面上的铝阻挡层被沉积。包含例如钛和氮化钛的第二阻挡层沉积在铝阻挡层上。沉积铜层，覆盖第二阻挡层并填充互连沟槽。铜层，第二阻挡层和铝阻挡层被抛光到介电层的顶表面以限定铜互连，并且完成集成电路器件的制造。

2. 发明授权

US06650018B1 High power, high luminous flux light emitting diode and method of making same 有权
标题翻译：大功率，高光通量发光二极管及其制作方法
公开(公告)号：US06650018B1
公开(公告)日：2003-11-18
申请号：US10155001
申请日：2002-05-24
申请人： Yongsheng Zhao , William W. So , Kevin Y. Ma , Chyi S. Chern , Heng Liu , Eugene J. Ruddy
发明人： Yongsheng Zhao , William W. So , Kevin Y. Ma , Chyi S. Chern , Heng Liu , Eugene J. Ruddy
IPC分类号： H01L3300
CPC分类号： H01L33/38 , H01L33/20 , H01L2933/0016
摘要： A high power, high luminous flux light emitting diode (LED) comprises a substrate, a light-emitting structure, a first electrode and a second electrode. The LED has a top surface layout design in which the first electrode has a number of legs extending in one direction, and the second electrode has a number of legs extending in the opposite direction. At least portions of the legs of the first electrode are interspersed with and spaced apart from portions of the legs of the second electrode. This provides a configuration that enhances current spreading along the length of the legs of both electrodes.
摘要翻译：高功率，高光通量发光二极管（LED）包括基板，发光结构，第一电极和第二电极。 LED具有顶表面布局设计，其中第一电极具有沿一个方向延伸的多个支脚，并且第二电极具有沿相反方向延伸的多个支脚。第一电极的腿部的至少部分与第二电极的腿的部分分开并间隔开。这提供了增强沿着两个电极的腿的长度的电流扩散的配置。

3. 发明授权

US07642183B2 High power, high luminous flux light emitting diode and method of making same 有权
标题翻译：大功率，高光通量发光二极管及其制作方法
公开(公告)号：US07642183B2
公开(公告)日：2010-01-05
申请号：US11150155
申请日：2005-06-13
申请人： Yongsheng Zhao , William W. So , Kevin Y. Ma , Chyi S. Chern , Heng Liu , Eugene J. Ruddy
发明人： Yongsheng Zhao , William W. So , Kevin Y. Ma , Chyi S. Chern , Heng Liu , Eugene J. Ruddy
IPC分类号： H01L33/00
CPC分类号： H01L33/38 , H01L33/08 , H01L33/20 , H01L33/46
摘要： A high power, high luminous flux light emitting diode (LED) comprises a substrate, a light-emitting structure, a first electrode and a second electrode. The LED has a top surface layout design in which the first electrode has a number of legs extending in one direction, and the second electrode has a number of legs extending in the opposite direction. At least portions of the legs of the first electrode are interspersed with and spaced apart from portions of the legs of the second electrode. This provides a configuration that enhances current spreading along the length of the legs of both electrodes.
摘要翻译：高功率，高光通量发光二极管（LED）包括基板，发光结构，第一电极和第二电极。 LED具有顶表面布局设计，其中第一电极具有沿一个方向延伸的多个支脚，并且第二电极具有沿相反方向延伸的多个支脚。第一电极的腿部的至少部分与第二电极的腿的部分分开并间隔开。这提供了增强沿着两个电极的腿的长度的电流扩散的配置。

4. 发明授权

US07193245B2 High power, high luminous flux light emitting diode and method of making same 有权
标题翻译：大功率，高光通量发光二极管及其制作方法
公开(公告)号：US07193245B2
公开(公告)日：2007-03-20
申请号：US11044714
申请日：2005-01-28
申请人： Yongsheng Zhao , William W. So , Kevin Y. Ma , Chyi S. Chern , Heng Liu , Eugene J. Ruddy
发明人： Yongsheng Zhao , William W. So , Kevin Y. Ma , Chyi S. Chern , Heng Liu , Eugene J. Ruddy
IPC分类号： H01L33/00
CPC分类号： H01L33/38 , H01L33/08 , H01L33/20 , H01L33/46
摘要： A high power, high luminous flux light emitting diode (LED) comprises a substrate, a light-emitting structure, a first electrode and a second electrode. The LED has a top surface layout design in which the first electrode has a number of legs extending in one direction, and the second electrode has a number of legs extending in the opposite direction. At least portions of the legs of the first electrode are interspersed with and spaced apart from portions of the legs of the second electrode. This provides a configuration that enhances current spreading along the length of the legs of both electrodes.
摘要翻译：高功率，高光通量发光二极管（LED）包括基板，发光结构，第一电极和第二电极。 LED具有顶表面布局设计，其中第一电极具有沿一个方向延伸的多个支脚，并且第二电极具有沿相反方向延伸的多个支脚。第一电极的腿部的至少部分与第二电极的腿的部分分开并间隔开。这提供了增强沿着两个电极的腿的长度的电流扩散的配置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式