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    • 2. 发明申请
    • System for treating conditions of the periodontium
    • 治疗牙周膜病变的系统
    • US20060280698A1
    • 2006-12-14
    • US11152499
    • 2005-06-14
    • Subhash GuptaDennis Flanagan
    • Subhash GuptaDennis Flanagan
    • A61K8/96A61K36/18
    • A61Q11/00A61K8/97A61K36/18
    • A system for treating conditions of the periodontium, such as gingivitis and periodontitis, includes an Ayurvedic medicinal solution and an applicator for delivering the solution to the periodontium. The Ayurvedic medicinal solution utilizes herbal extracts to break-down bacteria which can inflame gum tissue. In one embodiment, the solution comprises approximately 1 gram of triphala extract for every 10 ml of glycerine. In another embodiment, the solution comprises approximately 1 gram of amla extract for every 10 ml of glycerine. The applicator for delivering the solution to the periodontium may either be in the form of a cotton swab-type wand, a pipette or a spray dispenser.
    • 用于治疗牙周病例如牙龈炎和牙周炎的系统包括阿育吠陀药用溶液和用于将溶液递送到牙周膜的施用器。 阿育吠陀药用溶液利用草药提取物分解可以使牙龈组织发炎的细菌。 在一个实施方案中,该溶液包含每10ml甘油约1克的三菌属提取物。 在另一个实施方案中,该溶液包含每10ml甘油约1克的amla提取物。 用于将溶液递送到牙周组织的施用器可以是棉签式棒,移液管或喷雾分配器的形式。
    • 9. 发明授权
    • Composite silicon-metal nitride barrier to prevent formation of metal fluorides in copper damascene
    • 复合硅 - 金属氮化物屏障,以防铜铜镶嵌中金属氟化物的形成
    • US06465888B2
    • 2002-10-15
    • US10043604
    • 2002-01-14
    • Simon ChooiSubhash GuptaMei Sheng ZhouSang Ki Hong
    • Simon ChooiSubhash GuptaMei Sheng ZhouSang Ki Hong
    • H01L2352
    • H01L21/76844H01L21/76807H01L21/76831H01L21/76855
    • A method of forming amorphous silicon spacers followed by the forming of metal nitride over the spacers in a copper damascene structure—single, dual, or multi-structure—is disclosed in order to prevent the formation of fluorides in copper. In a first embodiment, the interconnection between the copper damascene and an underlying copper metal layer is made by forming an opening from the dual damascene structure to the underlying copper layer after the formation of the metal nitride layer over the amorphous silicon spacers formed on the inside walls of the dual damascene structure. In the second embodiment, the interconnection between the dual damascene structure and the underlying copper line is made from the dual damascene structure by etching into the underlying copper layer after the forming of the amorphous silicon spacers and before the forming of the metal nitride layer. In the third embodiment, the ternary metal silicon nitride spacer is formed by etching after having first formed the amorphous silicon layer and the nitride layer, in that order, and then etching the passivation/barrier layer at the bottom of the damascene structure into the underlying copper layer. In all three embodiments, metal nitride reacts with amorphous silicon to form a ternary metal silicon nitride having an excellent property of adhering to copper while at the same time for forming an excellent barrier to diffusion of copper.
    • 公开了一种形成非晶硅间隔物的方法,随后在铜镶嵌结构 - 单,双或多结构中在间隔物上形成金属氮化物,以防止铜中氟化物的形成。 在第一实施例中,通过在形成在内部的非晶硅间隔物上形成金属氮化物层之后,通过从双镶嵌结构形成开口到下面的铜层来形成铜镶嵌层和下面的铜金属层之间的互连 双镶嵌结构的墙壁。 在第二实施例中,通过在形成非晶硅间隔物之后并且在形成金属氮化物层之前通过蚀刻到下面的铜层中,由双镶嵌结构制造双镶嵌结构和下面的铜线之间的互连。 在第三实施例中,三元金属氮化硅间隔物依次先形成非晶硅层和氮化物层后,通过蚀刻形成,然后在镶嵌结构底部蚀刻钝化/阻挡层,形成底层 铜层。 在所有三个实施例中,金属氮化物与非晶硅反应形成具有优异的粘附铜特性的三元金属氮化硅,同时形成对铜的扩散的优异屏障。
    • 10. 发明授权
    • Composite silicon-metal nitride barrier to prevent formation of metal fluorides in copper damascene
    • 复合硅 - 金属氮化物屏障,以防铜铜镶嵌中金属氟化物的形成
    • US06372636B1
    • 2002-04-16
    • US09587467
    • 2000-06-05
    • Simon ChooiSubhash GuptaMei-Sheng ZhouSangki Hong
    • Simon ChooiSubhash GuptaMei-Sheng ZhouSangki Hong
    • H01L214763
    • H01L21/76844H01L21/76807H01L21/76831H01L21/76855
    • A method of forming amorphous silicon spacers followed by the forming of metal nitride over the spacers in a copper damascene structure -single, dual, or multi-structure- is disclosed in order to prevent the formation of fluorides in copper. In a first embodiment, the interconnection between the copper damascene and an underlying copper metal layer is made by forming an opening from the dual damascene structure to the underlying copper layer after the formation of the metal nitride layer over the amorphous silicon spacers formed on the inside walls of the dual damascene structure. In the second embodiment, the interconnection between the dual damascene structure and the underlying copper line is made from the dual damascene structure by etching into the underlying copper layer after the forming of the amorphous silicon spacers and before the forming of the metal nitride layer. In the third embodiment, the ternary metal silicon nitride spacer is formed by etching after having first formed the amorphous silicon layer and the nitride layer, in that order, and then etching the passivation/barrier layer at the bottom of the damascene structure into the underlying copper layer. In all three embodiments, metal nitride reacts with amorphous silicon to form a ternary metal silicon nitride having an excellent property of adhering to copper while at the same time for forming an excellent barrier to diffusion of copper.
    • 公开了一种形成非晶硅间隔物的方法,随后在铜镶嵌结构 - 单,双或多结构中在间隔物上形成金属氮化物,以防止在铜中形成氟化物。 在第一实施例中,通过在形成在内部的非晶硅间隔物上形成金属氮化物层之后,通过从双镶嵌结构形成开口到下面的铜层来形成铜镶嵌层和下面的铜金属层之间的互连 双镶嵌结构的墙壁。 在第二实施例中,通过在形成非晶硅间隔物之后并且在形成金属氮化物层之前通过蚀刻到下面的铜层中,由双镶嵌结构制造双镶嵌结构和下面的铜线之间的互连。 在第三实施例中,三元金属氮化硅间隔物依次先形成非晶硅层和氮化物层后,通过蚀刻形成,然后在镶嵌结构的底部蚀刻钝化/阻挡层,形成底层 铜层。 在所有三个实施例中,金属氮化物与非晶硅反应形成具有优异的粘附铜特性的三元金属氮化硅,同时形成对铜的扩散的优异屏障。