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1. 发明申请

US20130130405A1 APPARATUS AND METHODS FOR SILICON OXIDE CVD RESIST PLANARIZATION 有权
标题翻译：硅氧烷CVD抗蚀剂平面化的设备和方法
公开(公告)号：US20130130405A1
公开(公告)日：2013-05-23
申请号：US13659555
申请日：2012-10-24
申请人： Steven VERHAVERBEKE , Roman GOUK , Li-Qun XIA , Mei-yee SHEK , Yu JIN
发明人： Steven VERHAVERBEKE , Roman GOUK , Li-Qun XIA , Mei-yee SHEK , Yu JIN
IPC分类号： H01L21/02
CPC分类号： H01F41/34 , G11B5/743 , G11B5/84 , H01L21/0332 , H01L21/67161 , H01L21/67736
摘要： Embodiments of the present invention provide methods and apparatus for forming a patterned magnetic layer for use in magnetic media. According to embodiments of the present application, a silicon oxide layer formed by low temperature chemical vapor deposition is used to form a pattern in a hard mask layer, and the patterned hard mask is used to form a patterned magnetic layer by plasma ion implantation.
摘要翻译：本发明的实施例提供了用于形成用于磁性介质的图案化磁性层的方法和装置。根据本申请的实施例，使用通过低温化学气相沉积形成的氧化硅层在硬掩模层中形成图案，并且使用图案化的硬掩模通过等离子体离子注入形成图案化的磁性层。

2. 发明申请

US20130221595A1 SUBSTRATE CARRIER PLATE 审中-公开
标题翻译：基板载体板
公开(公告)号：US20130221595A1
公开(公告)日：2013-08-29
申请号：US13764132
申请日：2013-02-11
申请人： Steven VERHAVERBEKE , Roman GOUK
发明人： Steven VERHAVERBEKE , Roman GOUK
IPC分类号： B05C13/02
CPC分类号： B05C13/02 , H01L21/67754 , H01L21/68707 , H01L21/68771
摘要： A method and apparatus for processing multiple substrates simultaneously is provided. In one embodiment, a carrier plate for supporting a plurality of substrates is provided. The carrier plate comprises a disk-shaped body having a first side and a substantially planar second side opposite the first side, and a plurality of depressions formed in the first side of the disk-shaped body. Each of the plurality of depressions comprise a sidewall tapering from a surface of the first side and a bottom surface of the depression, and a support structure disposed above the bottom surface of, and geometrically centered in, the depression.
摘要翻译：提供了一种用于同时处理多个基板的方法和装置。在一个实施例中，提供了用于支撑多个基板的承载板。承载板包括具有第一侧和与第一侧相对的基本平坦的第二侧的盘形主体，以及形成在盘形体的第一侧中的多个凹部。多个凹陷中的每一个包括从凹部的第一侧面和底面的表面逐渐变细的侧壁，以及设置在凹部的底面的上方，几何中央的支撑结构。

3. 发明申请

US20110180133A1 Enhanced Silicon-TCO Interface in Thin Film Silicon Solar Cells Using Nickel Nanowires 审中-公开
标题翻译：使用镍纳米线的薄膜硅太阳能电池中增强的硅-TCO界面
公开(公告)号：US20110180133A1
公开(公告)日：2011-07-28
申请号：US12766829
申请日：2010-04-23
申请人： Steven VERHAVERBEKE , Roman GOUK , Kurtis LESCHKIES
发明人： Steven VERHAVERBEKE , Roman GOUK , Kurtis LESCHKIES
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01B1/02 , B82Y20/00 , B82Y25/00 , H01B1/08 , H01F1/0081 , H01F1/405 , H01L51/5206
摘要： This invention provides an optically transparent electrically conductive layer with a desirable combination of low electrical sheet resistance and good optical transparency. The conductive layer comprises a multiplicity of magnetic nanostructures in a plane, aligned into a plurality of roughly parallel continuous conductive pathways, wherein the density of the magnetic nanostructures allows for substantial optical transparency of the conductive layer. The magnetic nanostructures may be nanoparticles, nanowires or compound nanowires. A method of forming the conductive layer on a substrate includes: depositing a multiplicity of magnetic nanostructures on the substrate and applying a magnetic field to form the nanostructures into a plurality of conductive pathways parallel to the surface of the substrate. The conductive layer may be used to provide an enhanced silicon to transparent conductive oxide (TCO) interface in thin film silicon solar cells.
摘要翻译：本发明提供了具有低电薄片电阻和良好的光学透明度的理想组合的光学透明导电层。导电层包括在平面中的多个磁性纳米结构，其排列成多个大致平行的连续导电通路，其中磁性纳米结构的密度允许导电层的实质光学透明度。磁性纳米结构可以是纳米颗粒，纳米线或复合纳米线。在衬底上形成导电层的方法包括：在衬底上沉积多个磁性纳米结构并施加磁场以将纳米结构形成平行于衬底表面的多个导电路径。导电层可以用于在薄膜硅太阳能电池中提供增强的硅到透明导电氧化物（TCO）界面。

4. 发明申请

US20140131308A1 PATTERN FORTIFICATION FOR HDD BIT PATTERNED MEDIA PATTERN TRANSFER 审中-公开
标题翻译：用于硬盘位图形图形图形传输的图案化
公开(公告)号：US20140131308A1
公开(公告)日：2014-05-15
申请号：US13800362
申请日：2013-03-13
申请人： Roman GOUK , Steven VERHAVERBEKE , Alexander KONTOS , Adolph Miller ALLEN , Kevin MORAES
发明人： Roman GOUK , Steven VERHAVERBEKE , Alexander KONTOS , Adolph Miller ALLEN , Kevin MORAES
IPC分类号： H01L43/12
CPC分类号： H01L43/12 , G11B5/746 , G11B5/855 , G11C11/16 , H01F41/34 , H01L21/2855 , H01L21/3081
摘要： A method and apparatus for forming a magnetic layer having a pattern of magnetic properties on a substrate is described. The method includes using a metal nitride hardmask layer to pattern the magnetic layer by plasma exposure. The metal nitride layer is patterned using a nanoimprint patterning process with a silicon oxide pattern negative material. The pattern is developed in the metal nitride using a halogen and oxygen containing remote plasma, and is removed after plasma exposure using a caustic wet strip process. All processing is done at low temperatures to avoid thermal damage to magnetic materials.
摘要翻译：描述了在基板上形成具有磁特性图案的磁性层的方法和装置。该方法包括使用金属氮化物硬掩模层通过等离子体曝光对磁性层进行图案化。使用具有氧化硅图案负材料的纳米压印图案化工艺对金属氮化物层进行构图。在使用含卤素和含氧远距离等离子体的金属氮化物中形成图案，并且在使用苛性湿法剥离法等离子体暴露后除去。所有加工都是在低温下进行，以避免热损坏磁性材料。

5. 发明申请

US20100101832A1 COMPOUND MAGNETIC NANOWIRES FOR TCO REPLACEMENT 审中-公开
标题翻译：用于替代TCO的复合磁性纳米颗粒
公开(公告)号：US20100101832A1
公开(公告)日：2010-04-29
申请号：US12553300
申请日：2009-09-03
申请人： Steven VERHAVERBEKE , Omkaram Nalamasu , Victor L. Pushparaj , Roman Gouk
发明人： Steven VERHAVERBEKE , Omkaram Nalamasu , Victor L. Pushparaj , Roman Gouk
IPC分类号： H01B5/00 , B05B5/12
CPC分类号： H01J9/02 , B82Y25/00 , H01B1/02 , H01B1/04 , H01B1/08 , H01F1/0054 , H01F1/0081 , H01F1/445 , H01J2217/49207 , H01L51/5206 , Y10T29/49206
摘要： This invention provides an optically transparent electrically conductive layer with a desirable combination of low electrical sheet resistance and good optical transparency. The conductive layer comprises a multiplicity of compound magnetic nanowires in a plane, the compound nanowires being aligned roughly (1) parallel to each other and (2) with the long axes of the compound nanowires in the plane of the layer, the compound nanowires further being configured to provide a plurality of continuous conductive pathways, and wherein the density of the multiplicity of compound magnetic nanowires allows for substantial optical transparency of the conductive layer. A compound magnetic nanowire may comprise a silver nanowire covered by a layer of magnetic metal such as nickel or cobalt. Furthermore, a compound magnetic nanowire may comprise a carbon nanotubes (CNT) attached to a magnetic metal nanowire. A method of forming the conductive layer on a substrate includes: depositing a multiplicity of compound magnetic conductive nanowires on the substrate and applying a magnetic field to form the compound nanowires into a plurality of conductive pathways parallel to the surface of the substrate.
摘要翻译：本发明提供了具有低电薄片电阻和良好的光学透明度的理想组合的光学透明导电层。导电层在平面中包含多个复合磁性纳米线，复合纳米线大致（1）彼此平行排列，（2）与层的平面中的化合物纳米线的长轴相比，化合物纳米线进一步被配置为提供多个连续导电路径，并且其中多个复合磁性纳米线的密度允许导电层的实质的光学透明度。复合磁性纳米线可以包括由诸如镍或钴的磁性金属层覆盖的银纳米线。此外，复合磁性纳米线可以包括附着在磁性金属纳米线上的碳纳米管（CNT）。在衬底上形成导电层的方法包括：在衬底上沉积多个复合导电纳米线并施加磁场以将复合纳米线形成平行于衬底表面的多个导电通路。

6. 发明申请

US20100101829A1 MAGNETIC NANOWIRES FOR TCO REPLACEMENT 审中-公开
标题翻译：用于替代TCO的磁性纳米颗粒
公开(公告)号：US20100101829A1
公开(公告)日：2010-04-29
申请号：US12258263
申请日：2008-10-24
申请人： Steven VERHAVERBEKE , Omkaram Nalamasu , Nety M. Krishna
发明人： Steven VERHAVERBEKE , Omkaram Nalamasu , Nety M. Krishna
IPC分类号： H01B5/00 , H05K3/10
CPC分类号： H01L31/022425 , G02F1/13439 , H01B1/02 , H01B1/08 , H01L31/022475 , H01L31/022483 , H01L31/1884 , H05K1/097 , Y02E10/50 , Y10T29/49155
摘要： This invention provides an optically transparent conductive layer with a desirable combination of low electrical sheet resistance and good optical transparency. The conductive layer comprises a multiplicity of magnetic nanowires in a plane, the nanowires being aligned roughly (1) parallel to each other and (2) with the long axes of the nanowires in the plane of the layer, the nanowires further being configured to provide a plurality of continuous conductive pathways, and wherein the density of the multiplicity of magnetic nanowires allows for substantial optical transparency of the conductive layer. Furthermore, the conductive layer can include an optically transparent continuous conductive film, wherein the multiplicity of magnetic nanowires are electrically connected to the continuous conductive film. A method of forming the conductive layer on a substrate includes: depositing a multiplicity of magnetic conductive nanowires on the substrate and applying a magnetic field to form the nanowires into a plurality of conductive pathways parallel to the surface of the substrate.
摘要翻译：本发明提供了具有低电薄片电阻和良好的光学透明度的期望组合的光学透明导电层。导电层在平面中包括多个磁性纳米线，纳米线大致（1）彼此平行对准，（2）与该层的平面中的纳米线的长轴对准，纳米线还被配置成提供多个连续导电路径，并且其中多个磁性纳米线的密度允许导电层的实质的光学透明度。此外，导电层可以包括光学透明的连续导电膜，其中多个磁性纳米线电连接到连续导电膜。在衬底上形成导电层的方法包括：在衬底上沉积多个导电纳米线并施加磁场以形成平行于衬底表面的多个导电通路中的纳米线。

7. 发明申请

US20130302595A1 SUPER-HYDROPHOBIC AND OLEOPHOBIC TRANSPARENT COATINGS FOR DISPLAYS 审中-公开
标题翻译：超级疏水性和渗透色透明涂料
公开(公告)号：US20130302595A1
公开(公告)日：2013-11-14
申请号：US13797486
申请日：2013-03-12
申请人： Biao LIU , Han-Wen CHEN , Steven VERHAVERBEKE , Robert VISSER , Kurtis LESCHKIES
发明人： Biao LIU , Han-Wen CHEN , Steven VERHAVERBEKE , Robert VISSER , Kurtis LESCHKIES
IPC分类号： C03C17/00
CPC分类号： C03C17/007 , C03C17/42 , C03C2217/42 , C03C2217/76 , C03C2218/115 , C23C16/4488 , D01D5/0007 , Y10T428/249921 , Y10T428/265
摘要： Embodiments described herein generally relate to methods of creating super-hydrophobic and super-oleophobic layers and the resulting composition of matter. A method for creating a super-hydrophobic and super-oleophobic surface can include positioning a substrate with an exposed surface in a processing chamber, injecting an electrically charged silicon-containing deposition material towards the surface of the substrate, depositing silicon-containing nanofibers onto the exposed surface of the substrate, and depositing a thin low surface energy layer over the exposed surface of the substrate and the silicon-containing nanofibers. A substrate with a super-hydrophobic and super-oleophobic surface can include a substrate with an exposed surface, one or more layers of nanofibers disposed on the exposed surface, and a thin low surface energy material deposited over both the nanofibers and the exposed surface.
摘要翻译：本文描述的实施方案通常涉及产生超疏水和超疏油层的方法以及所得的物质组合物。用于产生超疏水和超疏油表面的方法可以包括将具有暴露表面的基底定位在处理室中，将带电荷的含硅沉积材料注入基底表面，将含硅纳米纤维沉积到在衬底的暴露表面和含硅纳米纤维上沉积薄的低表面能层。具有超疏水和超疏油表面的基底可以包括具有暴露表面的基底，设置在暴露表面上的一层或多层纳米纤维，以及沉积在纳米纤维和暴露表面上的薄的低表面能材料。

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