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1. 发明申请

US20140131308A1 PATTERN FORTIFICATION FOR HDD BIT PATTERNED MEDIA PATTERN TRANSFER 审中-公开
标题翻译：用于硬盘位图形图形图形传输的图案化
公开(公告)号：US20140131308A1
公开(公告)日：2014-05-15
申请号：US13800362
申请日：2013-03-13
申请人： Roman GOUK , Steven VERHAVERBEKE , Alexander KONTOS , Adolph Miller ALLEN , Kevin MORAES
发明人： Roman GOUK , Steven VERHAVERBEKE , Alexander KONTOS , Adolph Miller ALLEN , Kevin MORAES
IPC分类号： H01L43/12
CPC分类号： H01L43/12 , G11B5/746 , G11B5/855 , G11C11/16 , H01F41/34 , H01L21/2855 , H01L21/3081
摘要： A method and apparatus for forming a magnetic layer having a pattern of magnetic properties on a substrate is described. The method includes using a metal nitride hardmask layer to pattern the magnetic layer by plasma exposure. The metal nitride layer is patterned using a nanoimprint patterning process with a silicon oxide pattern negative material. The pattern is developed in the metal nitride using a halogen and oxygen containing remote plasma, and is removed after plasma exposure using a caustic wet strip process. All processing is done at low temperatures to avoid thermal damage to magnetic materials.
摘要翻译：描述了在基板上形成具有磁特性图案的磁性层的方法和装置。该方法包括使用金属氮化物硬掩模层通过等离子体曝光对磁性层进行图案化。使用具有氧化硅图案负材料的纳米压印图案化工艺对金属氮化物层进行构图。在使用含卤素和含氧远距离等离子体的金属氮化物中形成图案，并且在使用苛性湿法剥离法等离子体暴露后除去。所有加工都是在低温下进行，以避免热损坏磁性材料。

2. 发明申请

US20130221595A1 SUBSTRATE CARRIER PLATE 审中-公开
标题翻译：基板载体板
公开(公告)号：US20130221595A1
公开(公告)日：2013-08-29
申请号：US13764132
申请日：2013-02-11
申请人： Steven VERHAVERBEKE , Roman GOUK
发明人： Steven VERHAVERBEKE , Roman GOUK
IPC分类号： B05C13/02
CPC分类号： B05C13/02 , H01L21/67754 , H01L21/68707 , H01L21/68771
摘要： A method and apparatus for processing multiple substrates simultaneously is provided. In one embodiment, a carrier plate for supporting a plurality of substrates is provided. The carrier plate comprises a disk-shaped body having a first side and a substantially planar second side opposite the first side, and a plurality of depressions formed in the first side of the disk-shaped body. Each of the plurality of depressions comprise a sidewall tapering from a surface of the first side and a bottom surface of the depression, and a support structure disposed above the bottom surface of, and geometrically centered in, the depression.
摘要翻译：提供了一种用于同时处理多个基板的方法和装置。在一个实施例中，提供了用于支撑多个基板的承载板。承载板包括具有第一侧和与第一侧相对的基本平坦的第二侧的盘形主体，以及形成在盘形体的第一侧中的多个凹部。多个凹陷中的每一个包括从凹部的第一侧面和底面的表面逐渐变细的侧壁，以及设置在凹部的底面的上方，几何中央的支撑结构。

3. 发明申请

US20130130405A1 APPARATUS AND METHODS FOR SILICON OXIDE CVD RESIST PLANARIZATION 有权
标题翻译：硅氧烷CVD抗蚀剂平面化的设备和方法
公开(公告)号：US20130130405A1
公开(公告)日：2013-05-23
申请号：US13659555
申请日：2012-10-24
申请人： Steven VERHAVERBEKE , Roman GOUK , Li-Qun XIA , Mei-yee SHEK , Yu JIN
发明人： Steven VERHAVERBEKE , Roman GOUK , Li-Qun XIA , Mei-yee SHEK , Yu JIN
IPC分类号： H01L21/02
CPC分类号： H01F41/34 , G11B5/743 , G11B5/84 , H01L21/0332 , H01L21/67161 , H01L21/67736
摘要： Embodiments of the present invention provide methods and apparatus for forming a patterned magnetic layer for use in magnetic media. According to embodiments of the present application, a silicon oxide layer formed by low temperature chemical vapor deposition is used to form a pattern in a hard mask layer, and the patterned hard mask is used to form a patterned magnetic layer by plasma ion implantation.
摘要翻译：本发明的实施例提供了用于形成用于磁性介质的图案化磁性层的方法和装置。根据本申请的实施例，使用通过低温化学气相沉积形成的氧化硅层在硬掩模层中形成图案，并且使用图案化的硬掩模通过等离子体离子注入形成图案化的磁性层。

4. 发明申请

US20110180133A1 Enhanced Silicon-TCO Interface in Thin Film Silicon Solar Cells Using Nickel Nanowires 审中-公开
标题翻译：使用镍纳米线的薄膜硅太阳能电池中增强的硅-TCO界面
公开(公告)号：US20110180133A1
公开(公告)日：2011-07-28
申请号：US12766829
申请日：2010-04-23
申请人： Steven VERHAVERBEKE , Roman GOUK , Kurtis LESCHKIES
发明人： Steven VERHAVERBEKE , Roman GOUK , Kurtis LESCHKIES
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01B1/02 , B82Y20/00 , B82Y25/00 , H01B1/08 , H01F1/0081 , H01F1/405 , H01L51/5206
摘要： This invention provides an optically transparent electrically conductive layer with a desirable combination of low electrical sheet resistance and good optical transparency. The conductive layer comprises a multiplicity of magnetic nanostructures in a plane, aligned into a plurality of roughly parallel continuous conductive pathways, wherein the density of the magnetic nanostructures allows for substantial optical transparency of the conductive layer. The magnetic nanostructures may be nanoparticles, nanowires or compound nanowires. A method of forming the conductive layer on a substrate includes: depositing a multiplicity of magnetic nanostructures on the substrate and applying a magnetic field to form the nanostructures into a plurality of conductive pathways parallel to the surface of the substrate. The conductive layer may be used to provide an enhanced silicon to transparent conductive oxide (TCO) interface in thin film silicon solar cells.
摘要翻译：本发明提供了具有低电薄片电阻和良好的光学透明度的理想组合的光学透明导电层。导电层包括在平面中的多个磁性纳米结构，其排列成多个大致平行的连续导电通路，其中磁性纳米结构的密度允许导电层的实质光学透明度。磁性纳米结构可以是纳米颗粒，纳米线或复合纳米线。在衬底上形成导电层的方法包括：在衬底上沉积多个磁性纳米结构并施加磁场以将纳米结构形成平行于衬底表面的多个导电路径。导电层可以用于在薄膜硅太阳能电池中提供增强的硅到透明导电氧化物（TCO）界面。

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