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1. 发明授权

US08231005B2 Reticle pod 有权
标题翻译：标线荚
公开(公告)号：US08231005B2
公开(公告)日：2012-07-31
申请号：US12088120
申请日：2006-09-27
申请人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
发明人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
摘要翻译：提供支撑结构和环境控制装置的容器包括例如与其中包含的晶片或掩模版的最小接触，其与晶片或掩模版配合以提供扩散屏障，以抵抗沉淀在晶片或掩模版的表面上的颗粒。该容器包括具有平坦抛光表面的底座，该表面具有突起，晶片或标线贴在其上。这些突起具有几何形状，例如球体，其赋予与晶片或掩模版的最小接触，并且将晶片或掩模版悬挂在基座上，从而在其间提供间隙。间隙将晶片或掩模版与基底的平坦抛光表面隔离，但其尺寸设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。扩散过滤器提供压力平衡，无需过滤介质。顶盖上的可移动的分划板针可提供掩模版限制。双重安全壳实施例提供进一步的隔离和保护。

2. 发明申请

US20130020220A1 RETICLE POD 有权
公开(公告)号：US20130020220A1
公开(公告)日：2013-01-24
申请号：US13562087
申请日：2012-07-30
申请人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
发明人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.
摘要翻译：一个双重安全壳，具有一个外舱和一个内舱，提供支撑结构和环境控制装置。内部容器包括具有平坦的抛光表面的基部，该表面具有突出部，所述掩模版位于所述底部上并且在所述掩模版和抛光表面之间提供间隙。该间隙将掩模版与基底的平坦抛光表面分开，并且其尺寸被设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。内部容器的顶盖位于靠近基座周边的抛光表面上。内部容器的顶盖上的可移动的标线接合销与外部容器的顶盖接合，当内部容器组装在外部容器内部时，提供掩模版限制。

3. 发明申请

US20080204680A1 PURGE SYSTEM FOR A SUBSTRATE CONTAINER 有权
标题翻译：用于基底容器的灌装系统
公开(公告)号：US20080204680A1
公开(公告)日：2008-08-28
申请号：US12039700
申请日：2008-02-28
申请人： Anthony Mathius Tieben , David L. Halbmaier , Steven P. Kolbow
发明人： Anthony Mathius Tieben , David L. Halbmaier , Steven P. Kolbow
IPC分类号： G03B27/52
CPC分类号： H01L21/67353 , H01L21/67017 , H01L21/67359 , H01L21/67386 , H01L21/67393 , Y10S414/14
摘要： A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.
摘要翻译：具有基板容器接收区域的清洗站具有至少一个向上延伸的清洗喷嘴。喷嘴具有圆形的接合唇缘。衬底容器具有用于至少一个衬底和吹扫口组件的支撑装置，该清洗口组件包括面向下从容器向外的密封凸缘。密封凸缘具有中心孔和与喷嘴的圆形接合唇接合的悬臂凸缘部分。由凸缘的装载部分承载的喷嘴上的基底容器的重量导致凸缘的弯曲，用于弹性软密封。

4. 发明申请

US20080121560A1 SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY 有权
标题翻译：具有流体密封流动通道的基座容器
公开(公告)号：US20080121560A1
公开(公告)日：2008-05-29
申请号：US12026336
申请日：2008-02-05
申请人： Anthony Mathius Tieben , John Lystad , David L. Halbmaier
发明人： Anthony Mathius Tieben , John Lystad , David L. Halbmaier
IPC分类号： H01L21/677 , B65B31/04
CPC分类号： H01L21/67017 , H01L21/67126 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67769
摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
摘要翻译：衬底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。进入结构包括开口和内表面。索环位于接近结构的内表面上。

5. 发明授权

US08727125B2 Substrate container with fluid-sealing flow passageway 有权
标题翻译：具有流体密封流动通道的基板容器
公开(公告)号：US08727125B2
公开(公告)日：2014-05-20
申请号：US12026336
申请日：2008-02-05
申请人： Anthony Mathius Tieben , John Lystad , David L. Halbmaier
发明人： Anthony Mathius Tieben , John Lystad , David L. Halbmaier
IPC分类号： B65B31/04
CPC分类号： H01L21/67017 , H01L21/67126 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67769
摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
摘要翻译：衬底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。进入结构包括开口和内表面。索环位于接近结构的内表面上。

6. 发明授权

US07328727B2 Substrate container with fluid-sealing flow passageway 有权
标题翻译：具有流体密封流动通道的基板容器
公开(公告)号：US07328727B2
公开(公告)日：2008-02-12
申请号：US11108619
申请日：2005-04-17
申请人： Anthony Mathius Tieben , John Lystad , David L. Halbmaier
发明人： Anthony Mathius Tieben , John Lystad , David L. Halbmaier
IPC分类号： B65B1/20
CPC分类号： H01L21/67017 , H01L21/67126 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67769
摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
摘要翻译：衬底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。进入结构包括开口和内表面。索环位于接近结构的内表面上。

7. 发明授权

US08146623B2 Purge system for a substrate container 有权
标题翻译：衬底容器的清洗系统
公开(公告)号：US08146623B2
公开(公告)日：2012-04-03
申请号：US12039700
申请日：2008-02-28
申请人： Anthony Mathius Tieben , David L. Halbmeier , Steven P. Kolbow
发明人： Anthony Mathius Tieben , David L. Halbmeier , Steven P. Kolbow
IPC分类号： B65B31/00
CPC分类号： H01L21/67353 , H01L21/67017 , H01L21/67359 , H01L21/67386 , H01L21/67393 , Y10S414/14
摘要： A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.
摘要翻译：具有基板容器接收区域的清洗站具有至少一个向上延伸的清洗喷嘴。喷嘴具有圆形的接合唇缘。衬底容器具有用于至少一个衬底和吹扫口组件的支撑装置，该清洗口组件包括面向下从容器向外的密封凸缘。密封凸缘具有中心孔和与喷嘴的圆形接合唇接合的悬臂凸缘部分。由凸缘的装载部分承载的喷嘴上的基底容器的重量导致凸缘的弯曲，用于弹性软密封。

8. 发明授权

US07578407B2 Wafer container with sealable door 有权
标题翻译：晶圆容器带密封门
公开(公告)号：US07578407B2
公开(公告)日：2009-08-25
申请号：US11108349
申请日：2005-04-17
申请人： Anthony Mathius Tieben , John Lystad
发明人： Anthony Mathius Tieben , John Lystad
IPC分类号： B65D45/16 , B65D53/00 , B65D53/02
CPC分类号： H01L21/67376 , H01L21/67126
摘要： A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure displacing the bridging portion axially toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.
摘要翻译：一种晶片容器，其包括具有限定用于插入和移除晶片的开口的门框的封闭部分和可装配在门框中以密封外壳部分的门。连续的弹性密封件围绕着门的周边延伸。密封件位于靠近门的周边的密封表面上，并且可以部分地插入门的径向凹槽中。在横截面中，弹性体密封件具有插入部分和通过桥接部分联接的密封头。密封头具有从桥接部分朝向门的密封表面突出的脚部，以及相对于桥接部分大致相对于脚的方向延伸的头部。门框具有密封接合结构，使得当门被安置在门框中时，弹性体密封件的桥接部分接触密封接合结构，使桥接部分轴向朝向密封表面移动，并使密封头的头部径向旋转并接触密封接合结构。位移动作还肯定地将密封头的脚部与门的密封面接触。

9. 发明申请

US20110131800A1 FRONT OPENING WAFER CONTANER WITH PATH TO GROUND EFFECTUATED BY DOOR 有权
标题翻译：门开启地面的前开式波浪管
公开(公告)号：US20110131800A1
公开(公告)日：2011-06-09
申请号：US13024817
申请日：2011-02-10
申请人： Gregory Bores , Suraj Kalia , Anthony Mathius Tieben
发明人： Gregory Bores , Suraj Kalia , Anthony Mathius Tieben
IPC分类号： H01R43/00
CPC分类号： H01L21/67373 , H01L21/67396 , Y10T29/49117
摘要： A front opening wafer carrier formed principally of plastic and comprising an enclosure portion and door has a path to ground with respect to the wafers, the path to ground effectuated by the door. The base “ground” may be provided at the machine interface upon which the carrier sits, or through the robotic arm that grasps, operates and moves the door.
摘要翻译：主要由塑料形成并且包括外壳部分和门的前开口晶片载体具有相对于晶片接地的路径，通过门实现的接地路径。基座“地面”可以设置在承载架所在的机器接口处，或者通过抓握，操作和移动门的机器人臂来提供。

10. 发明授权

US08276759B2 Front opening wafer carrier with path to ground effectuated by door 有权
标题翻译：前开口晶片载体具有通过门的路径
公开(公告)号：US08276759B2
公开(公告)日：2012-10-02
申请号：US13024817
申请日：2011-02-10
申请人： Gregory Bores , Suraj Kalia , Anthony Mathius Tieben
发明人： Gregory Bores , Suraj Kalia , Anthony Mathius Tieben
IPC分类号： B65D85/00
CPC分类号： H01L21/67373 , H01L21/67396 , Y10T29/49117
摘要： A front opening wafer carrier formed principally of plastic and comprising an enclosure portion and door has a path to ground with respect to the wafers, the path to ground effectuated by the door. The base “ground” may be provided at the machine interface upon which the carrier sits, or through the robotic arm that grasps, operates and moves the door.
摘要翻译：主要由塑料形成并且包括外壳部分和门的前开口晶片载体具有相对于晶片接地的路径，通过门实现的接地路径。基座可以设置在承载器所在的机器接口处，或者通过抓握，操作和移动门的机器人臂来设置。

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