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1. 发明申请

US20090301917A1 RETICLE POD 有权
公开(公告)号：US20090301917A1
公开(公告)日：2009-12-10
申请号：US12088120
申请日：2006-09-27
申请人： Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
发明人： Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
摘要翻译：提供支撑结构和环境控制装置的容器包括例如与其中包含的晶片或掩模版的最小接触，其与晶片或掩模版配合以提供扩散屏障，以抵抗沉淀在晶片或掩模版的表面上的颗粒。该容器包括具有平坦抛光表面的底座，该表面具有突起，晶片或标线贴在其上。这些突起具有几何形状，例如球体，其赋予与晶片或掩模版的最小接触，并且将晶片或掩模版悬挂在基座上，从而在其间提供间隙。间隙将晶片或掩模版与基底的平坦抛光表面隔离，但其尺寸设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。扩散过滤器提供压力平衡，无需过滤介质。顶盖上的可移动的分划板针可提供掩模版限制。双重安全壳实施例提供进一步的隔离和保护。

2. 发明授权

US08613359B2 Reticle pod 有权
标题翻译：标线荚
公开(公告)号：US08613359B2
公开(公告)日：2013-12-24
申请号：US13562087
申请日：2012-07-30
申请人： Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
发明人： Steven Kolbow , Kevin McMullen , Anthony M. Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.
摘要翻译：一个双重安全壳，具有一个外舱和一个提供支撑结构和环境控制装置的内舱。内部容器包括具有平坦的抛光表面的基部，该表面具有突出部，所述掩模版位于所述底部上并且在所述掩模版和抛光表面之间提供间隙。该间隙将掩模版与基底的平坦抛光表面分开，并且其尺寸被设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。内部容器的顶盖位于靠近基座周边的抛光表面上。内部容器的顶盖上的可移动的标线接合销与外部容器的顶盖接合，当内部容器组装在外部容器内部时，提供掩模版限制。

3. 发明授权

US08231005B2 Reticle pod 有权
标题翻译：标线荚
公开(公告)号：US08231005B2
公开(公告)日：2012-07-31
申请号：US12088120
申请日：2006-09-27
申请人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
发明人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.
摘要翻译：提供支撑结构和环境控制装置的容器包括例如与其中包含的晶片或掩模版的最小接触，其与晶片或掩模版配合以提供扩散屏障，以抵抗沉淀在晶片或掩模版的表面上的颗粒。该容器包括具有平坦抛光表面的底座，该表面具有突起，晶片或标线贴在其上。这些突起具有几何形状，例如球体，其赋予与晶片或掩模版的最小接触，并且将晶片或掩模版悬挂在基座上，从而在其间提供间隙。间隙将晶片或掩模版与基底的平坦抛光表面隔离，但其尺寸设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。扩散过滤器提供压力平衡，无需过滤介质。顶盖上的可移动的分划板针可提供掩模版限制。双重安全壳实施例提供进一步的隔离和保护。

4. 发明申请

US20130020220A1 RETICLE POD 有权
公开(公告)号：US20130020220A1
公开(公告)日：2013-01-24
申请号：US13562087
申请日：2012-07-30
申请人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
发明人： Steven P. Kolbow , Kevin McMullen , Anthony Mathius Tieben , Matthew Kusz , Christian Andersen , Huaping Wang , Michael Cisewski , Michael L. Johnson , David L. Halbmaier , John Lystad
IPC分类号： B65D85/48
CPC分类号： B65D85/48 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67383 , H01L21/67386
摘要： A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.
摘要翻译：一个双重安全壳，具有一个外舱和一个内舱，提供支撑结构和环境控制装置。内部容器包括具有平坦的抛光表面的基部，该表面具有突出部，所述掩模版位于所述底部上并且在所述掩模版和抛光表面之间提供间隙。该间隙将掩模版与基底的平坦抛光表面分开，并且其尺寸被设计成抑制颗粒迁移到间隙中，从而防止晶片或掩模版的敏感表面的污染。内部容器的顶盖位于靠近基座周边的抛光表面上。内部容器的顶盖上的可移动的标线接合销与外部容器的顶盖接合，当内部容器组装在外部容器内部时，提供掩模版限制。

5. 发明授权

US08292077B2 Shock absorbing substrate container 有权
标题翻译：减震基材容器
公开(公告)号：US08292077B2
公开(公告)日：2012-10-23
申请号：US12278255
申请日：2007-02-05
申请人： Christian Andersen
发明人： Christian Andersen
IPC分类号： B65D85/30
CPC分类号： H01L21/67369 , G03F1/66 , H01L21/67386 , Y10T29/49826
摘要： A substrate container is generally comprised of a cover, a base, a latching mechanism, and a substrate retention system. Substrate container has corners with flanges disposed at the corners. Each flange has a hole there through to enhance shock absorption capability by the container, and thus provide greater protection to the substrate.
摘要翻译：基板容器通常由盖，基座，闩锁机构和基板保持系统构成。基底容器具有设置在拐角处的凸缘的拐角。每个凸缘上都有一个孔，以增强容器的冲击吸收能力，从而为基材提供更大的保护。

6. 发明申请

US20130283722A1 Transition Structure Between Adjacent Tower Structures 审中-公开
标题翻译：相邻塔结构之间的过渡结构
公开(公告)号：US20130283722A1
公开(公告)日：2013-10-31
申请号：US13459636
申请日：2012-04-30
申请人： Vishal Kyatham , Nestor A. Agbayani , Christian Andersen
发明人： Vishal Kyatham , Nestor A. Agbayani , Christian Andersen
IPC分类号： E04H12/00 , E04B1/38
CPC分类号： E02B17/027 , E02B17/0004 , E02B2017/006 , E02B2017/0091 , E04H2012/006 , F03D13/20 , F05B2240/912 , Y02B10/30 , Y02E10/728
摘要： A transition structure for transitioning between two adjacent tower structures of a wind turbine is disclosed. The transition structure may include a plurality of vertical legs spaced apart from one another, a stub section positioned between an upper tower portion and a lower tower portion, a plurality of connecting members, each of the plurality of connecting members connecting one of the plurality of vertical legs to the stub section, and at least one torsion plate positioned between the plurality of vertical legs and the stub section.
摘要翻译：公开了一种用于在风力涡轮机的两个相邻的塔架结构之间进行过渡的过渡结构。过渡结构可以包括彼此间隔开的多个垂直腿，位于上塔架部分和下塔架部分之间的短截段，多个连接构件，多个连接构件中的每一个连接多个并且至少一个扭转板位于所述多个垂直支腿和所述短截段之间。

7. 发明授权

US07563295B2 Filter having inlet portion with diffuser elements 有权
标题翻译：过滤器具有带扩散器元件的入口部分
公开(公告)号：US07563295B2
公开(公告)日：2009-07-21
申请号：US10545167
申请日：2004-02-05
申请人： Christian Andersen
发明人： Christian Andersen
IPC分类号： B01D46/00
CPC分类号： B01D46/002 , B01D46/0043 , B01D46/02 , B01D50/002
摘要： A filter including a filter housing with an essentially horizontal partition wall that divides the filter housing into a clean-air chamber and a dust chamber. The partition wall is provided with a number of apertures in which a number of filter bags are provided that are secured to the partition wall and extend down into the dust chamber. The filter is provided with an inlet portion in open communication with the dust chamber in a level that is above a lowermost end of the filter bags, wherein the inlet portion is configured for introducing a dust-containing flow of air into the dust chamber, from there it can be sucked through the filter bags and up into the clean-air chamber, from where the filtered air is discharged through a clean air outlet. A number of diffuser elements are arranged in the inlet portion outside the filter housing.
摘要翻译：一种过滤器，包括具有基本上水平的分隔壁的过滤器壳体，其将过滤器壳体分成洁净空气室和灰尘室。分隔壁设置有多个孔，其中设置有多个过滤袋，其固定到分隔壁并向下延伸到灰尘室中。过滤器设置有入口部分，该入口部分与灰尘室敞开连通，处于过滤袋的最下端的水平面上，其中入口部分构造成将灰尘的空气流引入灰尘室在那里，它可以通过过滤袋吸入并进入清洁空气室，从那里过滤的空气通过清洁的空气出口排出。多个扩散器元件布置在过滤器壳体外部的入口部分中。

8. 发明申请

US20060201958A1 Mask container 审中-公开
标题翻译：面膜容器
公开(公告)号：US20060201958A1
公开(公告)日：2006-09-14
申请号：US11364812
申请日：2006-02-26
申请人： Anthony Tieben , Christian Andersen , Brian Wiseman
发明人： Anthony Tieben , Christian Andersen , Brian Wiseman
IPC分类号： B65D43/14 , B65D45/16 , B65D6/28
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373
摘要： A hinged mask-package container with a spring latch for use in the transportation and storage of substrates. The container has a base and lid secured by a slidable spring latch that accepts the container's lid by sliding along the rail when the lid is pressed down to meet the base and then secures the lid and base by sliding back into its original position. The container also employs a living hinge made by an overmolding process whereby the hinge is formed in a first mold and then the container lid and base are formed and joined to the hinge in a second mold.
摘要翻译：具有用于运输和储存基材的弹簧闩锁的铰接式面罩包装容器。容器具有通过可滑动的弹簧闩锁固定的底座和盖子，该盖子通过沿着导轨按压而沿着轨道滑动而接收容器的盖子，以便与基座相接触，然后通过滑回到其初始位置来固定盖子和底座。容器还采用通过包覆成型工艺制成的活动铰链，由此在第一模具中形成铰链，然后在第二模具中形成容器盖和基座并将其接合到铰链。

9. 发明申请

US20060112666A1 Filter having inlet portion with diffuser elements 有权
标题翻译：过滤器具有带扩散器元件的入口部分
公开(公告)号：US20060112666A1
公开(公告)日：2006-06-01
申请号：US10545167
申请日：2004-02-05
申请人： Christian Andersen
发明人： Christian Andersen
IPC分类号： B01D46/02
CPC分类号： B01D46/002 , B01D46/0043 , B01D46/02 , B01D50/002
摘要： A filter (1) comprising a filter housing (2) with an essentially horizontal partition wall (3) that divides 4 the filter housing (2) into a clean-air chamber (4) and a dust chamber (5). The partition wall (3) is provided with a number of apertures (6) in which a number of filter bags (7) are provided that are secured to the partition wall (3) and extend down into the dust chamber (5). The filter (1) is provided with an inlet portion (8) in open communication with the dust chamber (5) in a level that is above a lowermost end (9) of the filter bags (7), wherein the inlet portion (8) is configured for introducing a dust-containing flow of air into the dust chamber (5), form there it can be sucked through the filter bags and up into the clean-air chamber (4), from where the filtered air is discharged through a clean-air outlet (11). A number of diffuser elements are arranged in the inlet portion (8) outside the filter housing (2).
摘要翻译：一种过滤器（1），包括具有基本上水平的分隔壁（3）的过滤器壳体（2），其将过滤器壳体（2）分成4个清洁空气室（4）和灰尘室（5）。分隔壁（3）设置有多个孔（6），其中设置有多个过滤袋（7），其固定到分隔壁（3）并向下延伸到灰尘室（5）中。过滤器（1）设置有与过滤袋（7）的最下端（9）上方的水平面与灰尘室（5）开放连通的入口部分（8），其中入口部分）构造成将灰尘的空气流引入到灰尘室（5）中，形成在那里，其可以通过过滤袋被吸入并进入清洁空气室（4），从那里过滤的空气通过清洁空气出口（11）。多个扩散器元件布置在过滤器壳体（2）外部的入口部分（8）中。

10. 发明申请

US20090218254A1 SHOCK ABSORBING SUBSTRATE CONTAINER 有权
标题翻译：防震基座容器
公开(公告)号：US20090218254A1
公开(公告)日：2009-09-03
申请号：US12278255
申请日：2007-02-05
申请人： Christian Andersen
发明人： Christian Andersen
IPC分类号： B65D81/02 , B65D81/113 , B65D85/48 , B23P11/00
CPC分类号： H01L21/67369 , G03F1/66 , H01L21/67386 , Y10T29/49826
摘要： A substrate container is generally comprised of a cover, a base, a latching mechanism, and a substrate retention system. Substrate container has corners with flanges disposed at the corners. Each flange has a hole there through to enhance shock absorption capability by the container, and thus provide greater protection to the substrate.
摘要翻译：基板容器通常由盖，基座，闩锁机构和基板保持系统构成。基底容器具有设置在拐角处的凸缘的拐角。每个凸缘上都有一个孔，以增强容器的冲击吸收能力，从而为基材提供更大的保护。

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