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    • 6. 发明授权
    • Microminiature optical waveguide structure and method for fabrication
    • 微型光波导结构及其制造方法
    • US5846694A
    • 1998-12-08
    • US600571
    • 1996-02-13
    • Oliver T. StrandRobert J. DeriMichael D. Pocha
    • Oliver T. StrandRobert J. DeriMichael D. Pocha
    • G02B6/12G02B6/122G02B6/124G02B6/132G03C5/00
    • G02B6/132G02B6/122G02B6/1228G02B6/1245G02B2006/12102G02B2006/12173G02B2006/12195
    • A method for manufacturing low-cost, nearly circular cross section waveguides comprises starting with a substrate material that a molten waveguide material can not wet or coat. A thin layer is deposited of an opposite material that the molten waveguide material will wet and is patterned to describe the desired surface-contact path pedestals for a waveguide. A waveguide material, e.g., polymer or doped silica, is deposited. A resist material is deposited and unwanted excess is removed to form pattern masks. The waveguide material is etched away to form waveguide precursors and the masks are removed. Heat is applied to reflow the waveguide precursors into near-circular cross-section waveguides that sit atop the pedestals. The waveguide material naturally forms nearly circular cross sections due to the surface tension effects. After cooling, the waveguides will maintain the round shape. If the width and length are the same, then spherical ball lenses are formed. Alternatively, the pedestals can be patterned to taper along their lengths on the surface of the substrate. This will cause the waveguides to assume a conical taper after reflowing by heat.
    • 用于制造低成本,近圆形横截面波导的方法包括从熔融波导材料不能润湿或涂覆的基底材料开始。 沉积相对材料的薄层,熔融波导材料将被润湿并被图案化以描述用于波导的期望的表面 - 接触路径基座。 沉积波导材料,例如聚合物或掺杂二氧化硅。 沉积抗蚀剂材料并除去不想要的多余物以形成图案掩模。 将波导材料蚀刻掉以形成波导前体,并除去掩模。 施加热量以将波导前体重新流入位于基座顶部的近圆形横截面波导。 由于表面张力效应,波导材料自然形成近似圆形的横截面。 在冷却之后,波导将保持圆形。 如果宽度和长度相同,则形成球形球透镜。 或者,可以将基座图案化为沿其基板的表面上的长度逐渐变细。 这将导致波导在通过热回流之后呈现锥形锥形。
    • 9. 发明授权
    • Semiconductor switch geometry with electric field shaping
    • 半导体开关几何与电场成形
    • US5341017A
    • 1994-08-23
    • US072310
    • 1993-06-09
    • Rex BoothMichael D. Pocha
    • Rex BoothMichael D. Pocha
    • H01L31/0352H01L31/09H03K17/78H01L23/48
    • H03K17/78H01L31/03529H01L31/09Y02E10/50
    • An optoelectric switch is disclosed that utilizes a cylindrically shaped and contoured GaAs medium or other optically active semiconductor medium to couple two cylindrically shaped metal conductors with flat and flared termination points each having an ovoid prominence centrally extending there from. Coupling the truncated ovoid prominence of each conductor with the cylindrically shaped optically active semiconductor causes the semiconductor to cylindrically taper to a triple junction circular line at the base of each prominence where the metal conductor conjoins with the semiconductor and a third medium such as epoxy or air. Tapering the semiconductor at the triple junction inhibits carrier formation and injection at the triple junction and thereby enables greater current carrying capacity through and greater sensitivity of the bulk area of the optically active medium.
    • 公开了一种光电开关,其利用圆柱形和成形的GaAs介质或其它光学活性半导体介质来将两个圆柱形金属导体与扁平和扩张的端接点相耦合,每个端子具有从其中心延伸的卵形凸起。 将每个导体的截短的卵形凸起与圆柱形光学有源半导体耦合使得半导体在金属导体与半导体结合的每个突出部的底部处圆柱形地锥形到三重连接圆形线,并且第三介质如环氧树脂或空气 。 在三重连接处锥形半导体抑制载流子形成和注入在三重结,从而通过光学活性介质的主体区域和更高的灵敏度实现更大的载流能力。