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    • 2. 发明授权
    • Microcantilever sensor with bimorph actuation and piezoresistive read-out
    • 具有双压电晶片驱动和压阻读取的微型悬臂传感器
    • US09551702B2
    • 2017-01-24
    • US14119874
    • 2012-05-25
    • Vladislav DjakovRichard Dunn
    • Vladislav DjakovRichard Dunn
    • G01N33/53G01N33/543G01N29/02G01N27/12
    • G01N33/5304G01N27/128G01N29/022G01N33/54373G01N33/5438
    • There is provided a method of monitoring one or more specified reactions in a fluid medium sample using a thermal signature, comprising providing at least one micro-cantilever sensor, said micro-cantilever sensor comprising at least two materials having different coefficients of thermal expansion, and having a heater and piezo-resistive sensor integrated therein, calibrating the at least one micro-cantilever response to thermal changes to form a calibrated micro-cantilever response characteristic, starting the specified reaction in the fluid medium sample, pulsing the heater with one or more electrical pulses to induce heat generation in the micro-cantilever, sampling the output of the integrated piezo-resistive sensor to characterize a response of the micro-cantilever during the specified reaction in the fluid medium, and subtracting the calibrated micro-cantilever response characteristic from the sampled output to determine a characteristic of the one or more specified reactions in the fluid medium sample. There is also provided a method for measuring at least one thermal property of a fluid medium sample, and a fluid medium sample reaction detection apparatus.
    • 提供了一种使用热特征来监测流体介质样品中的一个或多个指定反应的方法,包括提供至少一个微悬臂传感器,所述微悬臂传感器包括具有不同热膨胀系数的至少两种材料,以及 具有集成在其中的加热器和压阻传感器,校准至少一个微悬臂响应于热变化以形成校准的微悬臂梁响应特性,启动流体介质样品中的指定反应,用一个或多个 电脉冲以在微悬臂中引起发热,对集成的压阻传感器的输出进行采样,以在流体介质中指定的反应期间表征微悬臂梁的响应,并从校准的微悬臂梁响应特性中减去 采样输出以确定t中的一个或多个指定反应的特性 他流体介质样品。 还提供了一种用于测量流体介质样品的至少一种热性质和流体介质样品反应检测装置的方法。