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1. 发明授权

US06692219B2 Reduced edge contact wafer handling system and method of retrofitting and using same 有权
标题翻译：减少边缘接触晶片处理系统及其改装和使用方法
公开(公告)号：US06692219B2
公开(公告)日：2004-02-17
申请号：US09725823
申请日：2000-11-29
申请人： Stephen D. Coomer , Stanislaw Kopacz , Glyn Reynolds , Michael James Lombardi , Todd Michael Visconti
发明人： Stephen D. Coomer , Stanislaw Kopacz , Glyn Reynolds , Michael James Lombardi , Todd Michael Visconti
IPC分类号： B25J1506
CPC分类号： H01L21/68728 , H01L21/68707 , Y10S414/135 , Y10S414/139 , Y10S414/14
摘要： A wafer handling system and a method of retrofitting the system to an existing wafer handling apparatus are provided that make possible a method of handling wafers by contacting only a narrow area of not more than two millimeters wide adjacent the edge of the wafer, which is particularly useful for backside deposition where device side contact defines an area of exclusion that renders the wafer unusable in that area. The system provides a chuck on a wafer transfer arm that holds a wafer by gravity on a segmented, upwardly facing annular surface. A compatible annular surface is provided on an aligning station chuck so that wafers can be transferred by contact only with the exclusion area of the wafer surface. A load arm has two similarly compatible chucks further provided with pneumatically actuated grippers to allow the wafer to be loaded into a vertical processing apparatus. The wafer chucks are retrofitted into a processing apparatus in place of vacuum chucks and the vacuum lines that were provided to activate them are used for wafer detection. The electrical signals that were provided for vacuum chuck commands are utilized to actuate the grippers on the transfer arm so that no control software and little hardware need be altered for the retrofit.
摘要翻译：提供了将晶片处理系统和将系统改装到现有的晶片处理装置的方法，其使得可以通过仅接触晶片边缘不超过两毫米宽的窄区域来处理晶片的方法，这尤其是用于背面沉积，其中器件侧接触限定使晶片在该区域中不可用的排除区域。该系统在晶片传送臂上提供卡盘，其通过重力将晶片保持在分段的面向上的环形表面上。在对准站卡盘上提供相容的环形表面，使得晶片可以仅通过与晶片表面的排除区域接触而被传送。负载臂具有两个类似地兼容的卡盘，其进一步设置有气动致动的夹持器，以允许将晶片装载到垂直处理装置中。将晶片卡盘改装成处理装置代替真空吸盘，并将用于激活它们的真空管线用于晶片检测。用于真空吸盘指令的电信号用于致动传送臂上的夹持器，从而不需要改变控制软件和小硬件。

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