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    • 5. 发明授权
    • Embedded planar source/drain stressors for a finFET including a plurality of fins
    • 用于包括多个翅片的finFET的嵌入式平面源极/漏极应力源
    • US09024355B2
    • 2015-05-05
    • US13483200
    • 2012-05-30
    • Josephine B. ChangPaul ChangMichael A. GuillornJeffrey W. Sleight
    • Josephine B. ChangPaul ChangMichael A. GuillornJeffrey W. Sleight
    • H01L21/02H01L29/66H01L29/78
    • H01L29/66484H01L21/845H01L27/1211H01L29/66795H01L29/7831H01L29/7848H01L29/785
    • Fin-defining mask structures are formed over a semiconductor material layer having a first semiconductor material and a disposable gate structure is formed thereupon. A gate spacer is formed around the disposable gate structure and physically exposed portions of the fin-defining mask structures are subsequently removed. The semiconductor material layer is recessed employing the disposable gate structure and the gate spacer as an etch mask to form recessed semiconductor material portions. Embedded planar source/drain stressors are formed on the recessed semiconductor material portions by selective deposition of a second semiconductor material having a different lattice constant than the first semiconductor material. After formation of a planarization dielectric layer, the disposable gate structure is removed. A plurality of semiconductor fins are formed employing the fin-defining mask structures as an etch mask. A replacement gate structure is formed on the plurality of semiconductor fins.
    • 翅片限定掩模结构形成在具有第一半导体材料的半导体材料层上,并且在其上形成一次性栅极结构。 在一次性栅极结构周围形成栅极间隔物,随后去除鳍状物限定掩模结构的物理暴露部分。 使用一次性栅极结构和栅极间隔物作为蚀刻掩模来凹入半导体材料层以形成凹入的半导体材料部分。 通过选择性沉积具有与第一半导体材料不同的晶格常数的第二半导体材料,在凹入的半导体材料部分上形成嵌入式平面源极/漏极应力。 在形成平坦化介电层之后,去除一次性栅极结构。 使用鳍状限定掩模结构作为蚀刻掩模形成多个半导体鳍。 在多个半导体鳍片上形成替换栅极结构。
    • 8. 发明申请
    • EMBEDDED PLANAR SOURCE/DRAIN STRESSORS FOR A FINFET INCLUDING A PLURALITY OF FINS
    • 嵌入式平面电源/漏极应力器,包括多个FINS
    • US20130320399A1
    • 2013-12-05
    • US13483200
    • 2012-05-30
    • Josephine B. ChangPaul ChangMichael A. GuillornJeffrey W. Sleight
    • Josephine B. ChangPaul ChangMichael A. GuillornJeffrey W. Sleight
    • H01L29/78H01L21/336
    • H01L29/66484H01L21/845H01L27/1211H01L29/66795H01L29/7831H01L29/7848H01L29/785
    • Fin-defining mask structures are formed over a semiconductor material layer having a first semiconductor material and a disposable gate structure is formed thereupon. A gate spacer is formed around the disposable gate structure and physically exposed portions of the fin-defining mask structures are subsequently removed. The semiconductor material layer is recessed employing the disposable gate structure and the gate spacer as an etch mask to form recessed semiconductor material portions. Embedded planar source/drain stressors are formed on the recessed semiconductor material portions by selective deposition of a second semiconductor material having a different lattice constant than the first semiconductor material. After formation of a planarization dielectric layer, the disposable gate structure is removed. A plurality of semiconductor fins are formed employing the fin-defining mask structures as an etch mask. A replacement gate structure is formed on the plurality of semiconductor fins.
    • 翅片限定掩模结构形成在具有第一半导体材料的半导体材料层上,并且在其上形成一次性栅极结构。 在一次性栅极结构周围形成栅极间隔物,随后去除鳍状物限定掩模结构的物理暴露部分。 使用一次性栅极结构和栅极间隔物作为蚀刻掩模来凹入半导体材料层以形成凹入的半导体材料部分。 通过选择性沉积具有与第一半导体材料不同的晶格常数的第二半导体材料,在凹入的半导体材料部分上形成嵌入式平面源极/漏极应力。 在形成平坦化介电层之后,去除一次性栅极结构。 使用鳍状限定掩模结构作为蚀刻掩模形成多个半导体鳍。 在多个半导体鳍片上形成替换栅极结构。
    • 9. 发明申请
    • NON-PLANAR MOSFET STRUCTURES WITH ASYMMETRIC RECESSED SOURCE DRAINS AND METHODS FOR MAKING THE SAME
    • 具有不对称吸收源排水的非平面MOSFET结构及其制造方法
    • US20130214357A1
    • 2013-08-22
    • US13398339
    • 2012-02-16
    • Josephine B. ChangPaul ChangMichael A. GuillornChung-hsun LinJeffrey W. Sleight
    • Josephine B. ChangPaul ChangMichael A. GuillornChung-hsun LinJeffrey W. Sleight
    • H01L29/786H01L21/336
    • H01L29/66545H01L29/0657H01L29/66795
    • Non-planar Metal Oxide Field Effect Transistors (MOSFETs) and methods for making non-planar MOSFETs with asymmetric, recessed source and drains having improved extrinsic resistance and fringing capacitance. The methods include a fin-last, replacement gate process to form the non-planar MOSFETs and employ a retrograde metal lift-off process to form the asymmetric source/drain recesses. The lift-off process creates one recess which is off-set from a gate structure while a second recess is aligned with the structure. Thus, source/drain asymmetry is achieved by the physical structure of the source/drains, and not merely by ion implantation. The resulting non-planar device has a first channel of a fin contacting a substantially undoped area on the drain side and a doped area on the source side, thus the first channel is asymmetric. A channel on atop surface of a fin is symmetric because it contacts doped areas on both the drain and source sides.
    • 非平面金属氧化物场效应晶体管(MOSFET)和用于制造具有改进的外在电阻和边缘电容的具有不对称,凹陷源极和漏极的非平面MOSFET的方法。 这些方法包括最后一个替代栅极工艺,以形成非平面MOSFET并且采用逆向金属剥离工艺来形成不对称的源极/漏极凹槽。 剥离过程产生一个从门结构偏离的凹槽,而第二凹槽与结构对准。 因此,源/漏不对称性通过源极/漏极的物理结构实现,而不仅仅是通过离子注入来实现。 所得到的非平面器件具有接触漏极侧的基本上未掺杂的区域和源极侧的掺杂区域的翅片的第一通道,因此第一通道是不对称的。 鳍的顶表面上的通道是对称的,因为它接触漏极和源极侧上的掺杂区域。