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    • 1. 发明授权
    • Scanner system
    • 扫描仪系统
    • US07432681B2
    • 2008-10-07
    • US10927082
    • 2004-08-27
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • G05B11/42
    • G02B26/105B23K26/08B23K26/082H05K3/0026
    • A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.
    • 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度,并且通过积分补偿器将检测值相对于指令值的误差积分,使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置,以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器,跟踪误差比例补偿器,检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此,可以快速地定位镜子,从而可以提高加工速度。
    • 4. 发明授权
    • Optical scanner and laser machining apparatus
    • 光学扫描仪和激光加工设备
    • US07023598B2
    • 2006-04-04
    • US10758287
    • 2004-01-16
    • Souichi ToyamaAtsushi SakamotoHaruaki OtsukiYaichi Okubo
    • Souichi ToyamaAtsushi SakamotoHaruaki OtsukiYaichi Okubo
    • G02B26/08
    • G02B26/105
    • An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, sine wave response is performed at a specific frequency on feedback control for each axis so that the gain characteristic and the phase characteristic of the feedback control are estimated. This arithmetic operation processing is performed by a microprocessor prior to machining, and the results of estimation of the two axes are stored as data for each frequency. In the stage of machining, the results of estimation in terms of the gain characteristic and the phase characteristic are used for correcting the amplitude and phase of a sine wave of a target trajectory in order to cancel each characteristic.
    • 一种可以高速,高准确地实现目标轨迹跟踪加工的光学扫描仪。 在控制用于定位反射镜的X轴扫描仪的操作的伺服控制电路以及用于定位另一镜的Y轴扫描器的操作中,在每个轴的反馈控制上以特定频率执行正弦波响应,使得 估计反馈控制的增益特性和相位特性。 这种算术运算处理在加工之前由微处理器执行,并且两轴的估计结果作为每个频率的数据被存储。 在加工阶段,根据增益特性和相位特性的估计结果,用于校正目标轨迹的正弦波的振幅和相位,以消除每个特性。
    • 5. 发明申请
    • Scanner system
    • 扫描仪系统
    • US20050128553A1
    • 2005-06-16
    • US10927082
    • 2004-08-27
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • B23K26/08G02B26/10H05K3/00B23K26/06
    • G02B26/105B23K26/08B23K26/082H05K3/0026
    • A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.
    • 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度,并且通过积分补偿器将检测值相对于指令值的误差积分,使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置,以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器,跟踪误差比例补偿器,检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此,可以快速地定位镜子,从而可以提高加工速度。
    • 7. 发明授权
    • Optical scanner control method, optical scanner and laser machining apparatus
    • 光学扫描仪控制方法,光学扫描仪和激光加工设备
    • US07270270B2
    • 2007-09-18
    • US10929519
    • 2004-08-31
    • Haruaki OtsukiSouichi ToyamaKenta SekiYaichi OkuboDaisuke Kitamura
    • Haruaki OtsukiSouichi ToyamaKenta SekiYaichi OkuboDaisuke Kitamura
    • G06K7/10
    • G02B26/105G02B7/1821
    • A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.
    • 一种光学扫描仪控制方法和能够独立于摇摆角度高速定位反射镜的光学扫描仪,以及激光加工设备,用于通过使用光学扫描器用激光束照射印刷电路板,从而穿孔印刷 电路板。 为了操作基于当前位置与指令值的偏差来摇动反射镜的致动器,预先根据每个摇摆角度来测量致动器的增益的变化,并且校正致动器的操纵变量 取消收益变动。 因此,可以抑制根据摆动角度的转矩常数的变化的影响,使得在整个扫描区域上的响应特性变得均匀,并且可以提高定位速度。
    • 8. 发明授权
    • Magnetic head positioning and driving device including heaters and diodes
    • 磁头定位和驱动装置包括加热器和二极管
    • US08717714B2
    • 2014-05-06
    • US13983869
    • 2011-03-07
    • Haruaki Otsuki
    • Haruaki Otsuki
    • G11B5/60G11B21/24
    • G11B5/486G11B5/5552
    • In a positioning and driving system including a rotating magnetic disk, a magnetic head slider that floats above the surface of the magnetic disk and writes data to and reads data from a track provided on the magnetic disk, an actuator that positions the magnetic head slider in a radial direction of the magnetic disk, and an amplifier that supplies electrical power to the actuator in accordance with the input signal and performs a driving operation, provided is the configuration of an electrothermal actuator driving system that obtains continuous displacement over the entire required operating range with respect to changes in an input voltage by using only one amplifier and that is incorporated into a feedback control system and is suitable for high-speed and high-precision positioning.
    • 在包括旋转磁盘的定位和驱动系统中,磁头滑块浮动在磁盘表面上方,并将数据写入磁盘上提供的轨道并从其中读取数据;致动器,其将磁头滑块定位在 磁盘的径向方向和根据输入信号向致动器提供电力并执行驱动操作的放大器是提供在整个所需操作范围内获得连续位移的电热致动器驱动系统的配置 通过仅使用一个放大器并且被并入到反馈控制系统中并且适合于高速和高精度定位而关于输入电压的变化。
    • 10. 发明申请
    • MAGNETIC HEAD POSITIONING AND DRIVING DEVICE
    • 磁头定位与驱动装置
    • US20130314817A1
    • 2013-11-28
    • US13983869
    • 2011-03-07
    • Haruaki Otsuki
    • Haruaki Otsuki
    • G11B5/48
    • G11B5/486G11B5/5552
    • In a positioning and driving system including a rotating magnetic disk, a magnetic head slider that floats above the surface of the magnetic disk and writes data to and reads data from a track provided on the magnetic disk, an actuator that positions the magnetic head slider in a radial direction of the magnetic disk, and an amplifier that supplies electrical power to the actuator in accordance with the input signal and performs a driving operation, provided is the configuration of an electrothermal actuator driving system that obtains continuous displacement over the entire required operating range with respect to changes in an input voltage by using only one amplifier and that is incorporated into a feedback control system and is suitable for high-speed and high-precision positioning.
    • 在包括旋转磁盘的定位和驱动系统中,磁头滑块浮动在磁盘表面上方,并将数据写入磁盘上提供的轨道并从其中读取数据;致动器,其将磁头滑块定位在 磁盘的径向方向和根据输入信号向致动器提供电力并执行驱动操作的放大器是提供在整个所需操作范围内获得连续位移的电热致动器驱动系统的配置 通过仅使用一个放大器并且被并入到反馈控制系统中并且适合于高速和高精度定位而关于输入电压的变化。