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    • 2. 发明授权
    • Optical scanner and laser machining apparatus
    • 光学扫描仪和激光加工设备
    • US07023598B2
    • 2006-04-04
    • US10758287
    • 2004-01-16
    • Souichi ToyamaAtsushi SakamotoHaruaki OtsukiYaichi Okubo
    • Souichi ToyamaAtsushi SakamotoHaruaki OtsukiYaichi Okubo
    • G02B26/08
    • G02B26/105
    • An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, sine wave response is performed at a specific frequency on feedback control for each axis so that the gain characteristic and the phase characteristic of the feedback control are estimated. This arithmetic operation processing is performed by a microprocessor prior to machining, and the results of estimation of the two axes are stored as data for each frequency. In the stage of machining, the results of estimation in terms of the gain characteristic and the phase characteristic are used for correcting the amplitude and phase of a sine wave of a target trajectory in order to cancel each characteristic.
    • 一种可以高速,高准确地实现目标轨迹跟踪加工的光学扫描仪。 在控制用于定位反射镜的X轴扫描仪的操作的伺服控制电路以及用于定位另一镜的Y轴扫描器的操作中,在每个轴的反馈控制上以特定频率执行正弦波响应,使得 估计反馈控制的增益特性和相位特性。 这种算术运算处理在加工之前由微处理器执行,并且两轴的估计结果作为每个频率的数据被存储。 在加工阶段,根据增益特性和相位特性的估计结果,用于校正目标轨迹的正弦波的振幅和相位,以消除每个特性。
    • 3. 发明申请
    • Scanner system
    • 扫描仪系统
    • US20050128553A1
    • 2005-06-16
    • US10927082
    • 2004-08-27
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • B23K26/08G02B26/10H05K3/00B23K26/06
    • G02B26/105B23K26/08B23K26/082H05K3/0026
    • A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.
    • 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度,并且通过积分补偿器将检测值相对于指令值的误差积分,使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置,以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器,跟踪误差比例补偿器,检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此,可以快速地定位镜子,从而可以提高加工速度。
    • 4. 发明授权
    • Scanner system
    • 扫描仪系统
    • US07432681B2
    • 2008-10-07
    • US10927082
    • 2004-08-27
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • Souichi ToyamaHaruaki OtsukiAtsushi SakamotoKenta SekiYaichi Okubo
    • G05B11/42
    • G02B26/105B23K26/08B23K26/082H05K3/0026
    • A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.
    • 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度,并且通过积分补偿器将检测值相对于指令值的误差积分,使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置,以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器,跟踪误差比例补偿器,检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此,可以快速地定位镜子,从而可以提高加工速度。