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1. 发明授权

US5057966A Apparatus for removing static electricity from charged articles existing in clean space 失效
标题翻译：从清洁空间中收取的物品中移除静电电位的装置
公开(公告)号：US5057966A
公开(公告)日：1991-10-15
申请号：US427686
申请日：1989-10-13
申请人： Soichiro Sakata , Takanori Yoshida , Takao Okada
发明人： Soichiro Sakata , Takanori Yoshida , Takao Okada
IPC分类号： H01T23/00 , H02M9/06 , H05F3/04
CPC分类号： H01T23/00 , H05F3/04
摘要： An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor articles, includes a AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positioned apart from the discharge end of each emitter by a predetermined distance. Each opposite conductor is grounded. Emitters of some of the discharge pairs are connected to a high voltage AC source having added thereto negative voltage bias to thereby form pseudo negative pole emitters, and emitters of the other discharge pairs are connected to a high voltage AC source having added thereto a more positive voltage bias relative to the negative voltage bias to thereby form pseudo positive pole emitters.

2. 发明授权

US5047892A Apparatus for removing static electricity from charged articles existing in clean space 失效
标题翻译：用于清洁存在于洁净空间的带电物品的静电的设备
公开(公告)号：US5047892A
公开(公告)日：1991-09-10
申请号：US427682
申请日：1989-10-13
申请人： Soichiro Sakata , Takanori Yoshida , Takao Okada
发明人： Soichiro Sakata , Takanori Yoshida , Takao Okada
IPC分类号： H01T23/00 , H05F3/04
CPC分类号： H01T23/00 , H05F3/04
摘要： An apparatus for removing static electricity from charged articles existing in a clean space, particularly in a clean room for the production of semiconductor devices, includes an AC ionizer having a plurality of needle-like emitters disposed in a flow of clean air. A discharge end of each emitter is coated with a dielectric ceramic material. Opposite conductors are also included which are respectively positiond apart from each emitter by a predetermined distance. A DC voltage (or voltages) is applied to the opposite conductors. By adjusting the DC voltage (or voltages), the positive and negative ion concentration generated by each emitter is controlled. Further, a bias voltage may be added to the DC to increase the ion concentration.

3. 发明授权

US6120584A Air cleaning apparatus, air filter and method for manufacturing the same 失效
标题翻译：空气净化装置，空气过滤器及其制造方法
公开(公告)号：US6120584A
公开(公告)日：2000-09-19
申请号：US155493
申请日：1998-09-28
申请人： Soichiro Sakata , Katsumi Sato , Hideto Takahashi , Takao Okada
发明人： Soichiro Sakata , Katsumi Sato , Hideto Takahashi , Takao Okada
IPC分类号： B01D53/04
CPC分类号： B01D53/02 , B01D53/0446 , B01D2253/108 , B01D2253/3425 , B01D2259/4508 , Y10S55/05
摘要： An air cleaning apparatus such as a clean room or the like having an air circulation mechanism which circulates the humidity controlled air through a predetermined air circulation path, wherein the air circulation path is provided with a filter which has a hydrophobic zeolite layer formed on its base filter media surface and another filter which is disposed downstream from the filter having a hydrophobic zeolite layer and is used for removing particulate impurities contained in the circulating air. According to this air cleaning apparatus, gaseous organic impurities and particulate impurities contained in the air circulating in the air cleaning apparatus can be removed without lowering the humidity of the circulating air. Furthermore, since this air cleaning apparatus includes no activated charcoal which is inflammable, the apparatus is excellent from the standpoint of disaster prevention. Accordingly, the filters according to the invention and particle filters can be installed with safety in the ceiling portion of the air cleaning apparatus.
摘要翻译： PCT No.PCT / JP98 / 00383 Sec。 371日期：1998年9月28日 102（e）1998年9月28日PCT PCT 1998年1月30日PCT公布。第WO98 / 33575号公报日本1998年8月6日具有空气循环机构的洁净室等的空气净化装置，该空气循环机构使湿度调节空气通过预定的空气循环路径，其中空气循环路径设置有具有疏水性沸石在其基底过滤介质表面上形成的层和另一个过滤器，其设置在具有疏水性沸石层的过滤器的下游，并用于除去循环空气中所含的微粒杂质。根据该空气净化装置，能够除去在空气净化装置中循环的空气中含有的气态有机杂质和微粒杂质，而不降低循环空气的湿度。此外，由于这种空气净化装置不包括易燃的活性炭，所以从防灾的观点出发，该装置是优异的。因此，根据本发明的过滤器和颗粒过滤器可以安全地安装在空气净化装置的顶部。

4. 发明授权

US06352578B1 Air cleaning filter, process for preparing the same, and high-level cleaner 失效
标题翻译：空气净化过滤器，其制备方法和高级清洁剂
公开(公告)号：US06352578B1
公开(公告)日：2002-03-05
申请号：US09463556
申请日：2000-01-24
申请人： Soichiro Sakata , Katsumi Sato , Hideto Takahashi , Takao Okada
发明人： Soichiro Sakata , Katsumi Sato , Hideto Takahashi , Takao Okada
IPC分类号： B01D5304
CPC分类号： B01D53/02 , B01D53/0407 , B01D2253/104 , B01D2253/106 , B01D2253/108 , B01D2253/11 , B01D2253/308 , B01D2253/3425 , B01D2258/0216 , B01D2259/4146 , B01J20/10 , B01J20/28014 , B01J20/28023 , B01J20/28026 , B01J20/2803 , B01J20/28033 , B01J20/28045 , B01J20/28078 , Y10S55/05
摘要： The present invention relates to an air filter having an inorganic material layer in which the following adsorbent is fixed on the surface of the supporter using powder of an inorganic substance as a binder. That is, the adsorbent is prepared by impregnating a salt of an inorganic acid to powder of an inorganic substance consisting of at least one of diatom earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, activated clay, activated bentonite, or synthetic zeolite. The air filter according to the present invention can adsorb and remove both of gaseous basic impurities and gaseous organic impurities, thus making a very effective filter for manufacturing semiconductor and LCD.
摘要翻译：本发明涉及具有无机材料层的空气过滤器，其中使用无机物质的粉末作为粘合剂将下列吸附剂固定在支撑体的表面上。也就是说，通过将无机酸的盐浸渍到由硅藻土，二氧化硅，氧化铝，二氧化硅和氧化铝的混合物，硅酸铝，活性氧化铝，多孔玻璃中的至少一种组成的无机物质的粉末中来制备吸附剂，活性粘土，活化膨润土或合成沸石。根据本发明的空气过滤器可以吸附和去除气态碱性杂质和气体有机杂质，从而制造用于制造半导体和LCD的非常有效的过滤器。

5. 发明授权

US5798455A Storehouse for use in storage of clean materials 失效
标题翻译：仓库用于清洁材料的储存
公开(公告)号：US5798455A
公开(公告)日：1998-08-25
申请号：US660458
申请日：1996-06-07
申请人： Soichiro Sakata , Hideto Takahashi , Katsumi Sato
发明人： Soichiro Sakata , Hideto Takahashi , Katsumi Sato
IPC分类号： G01N27/04 , F24F3/16 , F24F7/06 , G01N13/00 , F24F7/00 , G01B11/00 , G01R27/00
CPC分类号： F24F3/161 , F24F2003/1625 , F24F2003/1628
摘要： A storehouse is constituted including a clean room 12 and a storage space 10 for storing clean materials, which is isolated from the clean room. The clean air for storage is generated by a storage air generator 36 and is supplied to the storage space 10 through air supply systems 32, 46. The clean air for storage is purified to such a cleanliness level that it contains hydrocarbon group including methane of less than 10 ppb by using the method of combustion with a catalyst, or purified to such a cleanliness level extent that the contact angle of a pure water droplet or the surface resistivity to the clean material surface can be kept at substantially the same level as that which is indicated immediately after cleaning the material, by using a catalytic reaction tower, an activated charcoal filter, or a fluid bed type adsorbing tower, all of which are made by using materials generating no gaseous impurities. Accordingly, it is possible to effectively prevent the substrate surface from contamination caused by the organic substance. No inert gas is employed, thus ensuring safety operation with an inexpensive running cost.
摘要翻译：构成了一个仓库，其中包括一个洁净室12和一个用于存放与洁净室隔离的清洁材料的储存空间10。用于储存的清洁空气由储存空气发生器36产生，并通过空气供应系统32,46供应到储存空间10.用于储存的清洁空气被净化到这样的清洁水平，使得其含有包含较少甲烷的烃基通过使用用催化剂燃烧的方法，或者纯化到这样的清洁度水平程度，使得纯水滴的接触角或与清洁材料表面的表面电阻率可以保持在基本相同的水平，通过使用催化反应塔，活性炭过滤器或流化床型吸附塔清洁材料后立即表示，所有这些都是通过使用不产生气态杂质的材料制成的。因此，可以有效地防止由有机物引起的基板表面污染。不使用惰性气体，从而以廉价的运行成本确保安全运行。

6. 发明授权

US6146451A Air-cleaning filter, method of producing the same, and high-level cleaning device 失效
标题翻译：空气净化过滤器，其制造方法以及高级清洁装置
公开(公告)号：US6146451A
公开(公告)日：2000-11-14
申请号：US242867
申请日：1999-05-12
申请人： Soichiro Sakata , Hideto Takahashi , Katsumi Sato
发明人： Soichiro Sakata , Hideto Takahashi , Katsumi Sato
IPC分类号： B01D39/20 , B01D53/04 , B01J20/16
CPC分类号： B01D53/02 , B01D39/2034 , B01J20/16 , B01D2253/11 , B01D2253/112 , B01D2253/308 , B01D2253/3425 , B01D2258/0216 , B01D2259/4143 , B01D2259/4146 , B01D53/0431 , Y10S55/05
摘要： An air filter, a method for manufacturing the same, and also a high efficiency air cleaning apparatus employing the same are disclosed. The air filter includes a supporter and an inorganic material layer that is formed by fixing the powder of the fraipontite mineral to the surface of the supporter, using the powder of an inorganic substance as a binder. The method for manufacturing the filter includes the steps of immersing a supporter in a suspension in which the powder of the fraipontite mineral and the powder of an inorganic substance as a binder are dispersed as the suspensoid, and drying the supporter impregnated with the suspensoid, thereby forming an inorganic material layer fixed to the surface of the supporter. The fraipontite mineral adsorbs and removes gaseous acid or basic impurities in the air while the inorganic substance as a component of the inorganic material layer works as an adsorbent against gaseous organic impurities contained in the space of the air cleaning apparatus.
摘要翻译： PCT No.PCT / JP98 / 02999 Sec。 371日期1999年5月12日 102（e）日期1999年5月12日PCT提交1998年7月3日PCT公布。 WO99 / 01201BC出版物日期1999年1月14日公开了一种空气过滤器及其制造方法，以及采用该空气过滤器的高效空气净化装置。空气过滤器包括通过使用无机物质的粉末作为粘合剂将丝锌铝石矿物的粉末固定在支撑体的表面上形成的支撑体和无机材料层。过滤器的制造方法包括以下步骤：将支撑体浸渍在悬浮液中，其中丝状连接物矿物的粉末和作为粘合剂的无机物质的粉末作为悬浮体分散，并且干燥浸渍有悬浮体的载体，由此形成固定在支撑体表面的无机材料层。丝锌铝石矿物吸附并去除空气中的气态酸或碱性杂质，而作为无机材料层的组分的无机物质作为吸附剂起到空气净化装置的空间中所含的气态有机杂质的作用。

7. 发明授权

US5882938A Apparatus and method for evaluating contamination caused by organic substances deposited on substrate surface 失效
标题翻译：用于评估沉积在基材表面上的有机物质引起的污染的装置和方法
公开(公告)号：US5882938A
公开(公告)日：1999-03-16
申请号：US658247
申请日：1996-06-04
申请人： Hideto Takahashi , Soichiro Sakata , Katsumi Sato
发明人： Hideto Takahashi , Soichiro Sakata , Katsumi Sato
IPC分类号： G01B11/00 , F24F7/00 , G01N13/00 , G01N13/02 , G01N27/04 , G01R27/02 , H01L21/66 , G01N27/12
CPC分类号： G01N13/02 , G01N27/041 , G01N2013/0241
摘要： Apparatus and a method for evaluating the contamination over the surface of a substrate for use in manufacturing semiconductor devices, liquid crystal devices and so on, said contamination being caused by contaminants, for instance airborne organic substances or the equivalent in the clean room atmosphere. For evaluation, there is measured with passage of time in the atmosphere having a substantially constant relative humidity the surface resistivity (R) of the substrate 104 by bringing electrodes 106 into close contact with an insulating film as formed on said substrate surface, or a contact angle (.alpha.) of a liquid-drop 207 dropped on the substrate 206. From this measurement, the degree of said contamination is judged by comparing the value of the surface resistivity or contact angle as measured immediately after rinsing the substrate, with the values of the same as measured after exposing the substrate to the objective atmosphere to be evaluated.
摘要翻译：用于评估用于制造半导体器件，液晶器件等的衬底表面上的污染的装置和方法，所述污染是由污染物引起的，例如空气传播的有机物质或洁净室气氛中的等同物。为了评价，通过使电极106与形成在所述基板表面上的绝缘膜紧密接触的大气中，具有基本上恒定的相对湿度的基板104的表面电阻率（R），或者接触滴落在基板206上的液滴207的角度（α）。从该测量中，通过比较在冲洗基板之后立即测量的表面电阻率或接触角的值来判断所述污染的程度，与将基板暴露于待评估的目标气氛之后测量的相同。

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