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1. 发明授权

US06291145B1 Image formation method with photosensitive material 失效
标题翻译：图像形成方法与感光材料
公开(公告)号：US06291145B1
公开(公告)日：2001-09-18
申请号：US09038683
申请日：1998-03-09
申请人： Tadayosi Kokubo , Kazuya Okamoto , Hiroshi Ooki , Masato Shibuya , Soichi Owa
发明人： Tadayosi Kokubo , Kazuya Okamoto , Hiroshi Ooki , Masato Shibuya , Soichi Owa
IPC分类号： G03F524
CPC分类号： G03F7/70466 , G03F7/033 , G03F7/038 , G03F7/2022
摘要： Image-formation methods and photosensitive materials used in such methods are disclosed that form very high-resolution patterns. The photosensitive materials comprise an ingredient that is triggered by a radical to undergo a latent-image-forming reaction. The radicals are produced by photons from an illumination light. Alternatively, the ingredient is triggered by a reactive-intermediate compound that is activated by the exposure-produced radical. The photosensitive materials possess a non-linear sensitivity characteristic in which the latent-image reaction density increases according to the mth power (m>1) of the incident light intensity. The photosensitive material can be applied to a sensitive substrate for exposure. Multiple exposures of the sensitive substrate are performed using a projected mask pattern in the presence of a radical deactivator. The multiple exposures can be performed while: (a) changing the exposure intensity distribution on the photosensitive material, or (b) shifting the projected mask pattern and the sensitive substrate relative to each other by a specified amount, or (c) using a different projected mask pattern for each exposure.
摘要翻译：公开了在这种方法中使用的图像形成方法和感光材料，其形成非常高分辨率的图案。感光材料包括由自由基触发以进行潜像形成反应的成分。自由基由照明光的光子产生。或者，成分由被暴露产生的自由基活化的反应性中间体化合物触发。感光材料具有根据入射光强度的第m次幂（m> 1）潜影反应密度增加的非线性灵敏度特性。可以将感光材料施加到敏感基板上以进行曝光。在存在自由基失活剂的情况下，使用投影的掩模图案来进行敏感基材的多次曝光。可以执行多次曝光，同时：（a）改变感光材料上的曝光强度分布，或（b）将投影的掩模图案和敏感基板相对于彼此移动指定量，或（c）使用不同的每次曝光的投影面具图案。

2. 发明授权

US5847812A Projection exposure system and method 失效
标题翻译：投影曝光系统和方法
公开(公告)号：US5847812A
公开(公告)日：1998-12-08
申请号：US874687
申请日：1997-06-13
申请人： Hiroshi Ooki , Masato Shibuya , Kazuya Okamoto , Soichi Owa
发明人： Hiroshi Ooki , Masato Shibuya , Kazuya Okamoto , Soichi Owa
IPC分类号： G03F7/20 , G03B27/42 , G03B27/72
CPC分类号： G03F7/70075 , G03F7/2022 , G03F7/2053 , G03F7/70358 , G03F7/70475
摘要： Projection exposure systems and methods are disclosed that achieve higher light intensities and reduce the time required for each exposure in multiple exposures of non-linear resists such as a two-photon-absorption resist. Using spatial redistribution of laser light, an illumination optical system forms an illumination region that illuminates only a portion of the pattern on a mask with spatially coherent light from a light source. The system forms the entire mask pattern on a substrate by repeating a non-linear exposure while moving the illumination region and the mask pattern relative to one another. To exploit temporal redistribution of laser light, an illumination optical system employs a pulsed-oscillation-type laser light source to form a mask pattern while varying the light intensity profile on a mask.
摘要翻译：公开了投射曝光系统和方法，其实现更高的光强度并减少在多次曝光非线性抗蚀剂（例如双光子吸收抗蚀剂）中每次曝光所需的时间。使用激光的空间重新分配，照明光学系统形成照明区域，其仅使用来自光源的空间相干光照射掩模上的图案的一部分。该系统通过在相对于彼此移动照明区域和掩模图案的同时重复非线性曝光来在基板上形成整个掩模图案。为了利用激光的时间再分配，照明光学系统采用脉冲振荡型激光光源来形成掩模图案，同时改变掩模上的光强度分布。

3. 发明授权

US5902716A Exposure method and apparatus 失效
标题翻译：曝光方法和装置
公开(公告)号：US5902716A
公开(公告)日：1999-05-11
申请号：US708580
申请日：1996-09-05
申请人： Soichi Owa , Kazuya Okamoto , Hiroshi Ooki , Masato Shibuya
发明人： Soichi Owa , Kazuya Okamoto , Hiroshi Ooki , Masato Shibuya
IPC分类号： G03F7/09 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70425 , G03F7/091 , G03F7/2022 , H01L21/0275
摘要： After a photoresist is applied onto a wafer, a contrast enhancement material (CEM) layer is applied onto this photoresist. A pattern is projected through this CEM layer onto the photoresist. Next, this CEM layer is removed from the photoresist and thereafter a new CEM layer is again applied onto the photoresist. Another pattern is projected through this new CEM layer onto the photoresist, whereby the photoresist is exposed in accordance with a composite pattern of the two patterns. This composite pattern can surpass the resolution limit of projection optical system.
摘要翻译：在将光致抗蚀剂施加到晶片上之后，将对比度增强材料（CEM）层施加到该光致抗蚀剂上。通过该CEM层将图案投射到光致抗蚀剂上。接下来，将该CEM层从光致抗蚀剂中除去，然后将新的CEM层再次施加到光致抗蚀剂上。通过这个新的CEM层将另一种图案投影到光致抗蚀剂上，由此根据两种图案的复合图案曝光光致抗蚀剂。该复合图案可以超过投影光学系统的分辨率极限。

4. 发明授权

US5851707A Microlithography projection-exposure masks, and methods and apparatus employing same 失效
标题翻译：微光投影曝光掩模，以及使用其的方法和装置
公开(公告)号：US5851707A
公开(公告)日：1998-12-22
申请号：US899909
申请日：1997-07-24
申请人： Masato Shibuya , Hiroshi Ooki , Kazuya Okamoto , Soichi Owa
发明人： Masato Shibuya , Hiroshi Ooki , Kazuya Okamoto , Soichi Owa
IPC分类号： G03F7/20 , H01L21/027 , G03F9/00
CPC分类号： G03F7/70433 , G03F1/50 , G03F7/2022 , G03F7/70466
摘要： Methods and apparatus are disclosed for microlithographically exposing a photosensitive substrate comprising single-exposure areas and multiple-exposure areas. After exposing the substrate, line widths in the single-exposure areas are substantially the same as line widths in the multiple-exposure areas. Also disclosed are masks comprising a first mask pattern used to expose the single-exposure areas once and a plurality of other mask patterns for exposing the multiple-exposure areas a predetermined number of times. Each of the other mask patterns allows a lower intensity of illumination light flux to be distributed to the multiple-exposure areas per exposure of the substrate than allowed by the first mask pattern. Consequently, the average intensity of illumination-light flux distributed to the single-exposure area after one exposure is substantially equal to the average intensity of illumination-light flux distributed to the multiple-exposure areas after a predetermined number of exposures of such areas.
摘要翻译：公开了用于微光刻曝光包括单一曝光区域和多曝光区域的感光衬底的方法和装置。在曝光衬底之后，单个曝光区域中的线宽度与多个曝光区域中的线宽基本上相同。还公开了包括用于暴露单次曝光区域一次的第一掩模图案和用于将多个曝光区域暴露预定次数的多个其它掩模图案的掩模。每个其它掩模图案允许每个曝光的衬底比第一掩模图案允许的更低强度的照明光通量分布到多个曝光区域。因此，在一次曝光之后分配到单一曝光区域的照明光通量的平均强度基本上等于在这些区域的预定曝光次数之后分配给多个曝光区域的照明光通量的平均强度。

5. 发明授权

US5739898A Exposure method and apparatus 失效
标题翻译：曝光方法和装置
公开(公告)号：US5739898A
公开(公告)日：1998-04-14
申请号：US312241
申请日：1994-09-26
申请人： Toshihiko Ozawa , Masaya Komatsu , Masato Shibuya , Hiroshi Ooki , Masaomi Kameyama , Yoshifumi Tokoyoda
发明人： Toshihiko Ozawa , Masaya Komatsu , Masato Shibuya , Hiroshi Ooki , Masaomi Kameyama , Yoshifumi Tokoyoda
IPC分类号： G03F7/20 , G03B27/32 , G03B27/42
CPC分类号： G03F7/70566 , G03F7/70125 , G03F7/70475 , G03F7/70583
摘要： The present invention relates to a projection exposure method and an exposure apparatus for projecting a pattern on a photo-mask through a projection optical system onto a predetermined photosensitive material. The photosensitive material is a nonlinear photosensitive material in which the effective light intensity distribution is nonlinear to the intensity of incident exposure light. Further, multiple exposure is made with plural patterns having a certain lateral shift therebetween, or multiple exposure is made with shifting the position of an identical pattern, whereby multiple exposure is effected with patterns different in intensity distribution on the photosensitive material. A high-resolution pattern can be formed over the resolution limit of projection optical system by the above arrangement.
摘要翻译：本发明涉及一种用于通过投影光学系统将光掩模上的图案投影到预定感光材料上的投影曝光方法和曝光装置。感光材料是非线性感光材料，其中有效光强度分布对入射曝光光的强度是非线性的。此外，通过在其间具有一定的横向偏移的多个图案进行多次曝光，或者通过移位相同图案的位置进行多次曝光，由此通过感光材料上的强度分布不同的图案来实现多次曝光。通过上述布置，可以在投影光学系统的分辨率极限上形成高分辨率图案。

6. 发明申请

US20090248447A1 REPORT GENERATION SUPPORT SYSTEM 审中-公开
标题翻译：报告生成支持系统
公开(公告)号：US20090248447A1
公开(公告)日：2009-10-01
申请号：US12409945
申请日：2009-03-24
申请人： Kenichi NIWA , Hiroshizu Morishima , Masato Shibuya
发明人： Kenichi NIWA , Hiroshizu Morishima , Masato Shibuya
IPC分类号： G06Q50/00 , G06F17/30 , G06F3/048
CPC分类号： G06Q50/24 , G06F19/321 , G16H15/00
摘要： A report generation support system has a storage that previously stores body-area information identifying various areas of a human body, and a display that displays a report generation screen, a medical image, and the body-area information. This report generation support system records a string into a radiology report in response to an operation of inputting the string and, in response to an operation of designating at least one medical image and the body-area information that are displayed, links the designated medical image and body-area information to the radiology report. Consequently, search of previous radiology reports connected to various areas of a human body is facilitated.
摘要翻译：报告生成支持系统具有预先存储识别人体各个区域的身体区域信息的存储器以及显示报告生成屏幕，医疗图像和身体区域信息的显示器。该报告生成支持系统响应于输入字符串的操作而将字符串记录到放射学报告中，并且响应于指定至少一个医学图像的操作和显示的身体区域信息，链接指定的医学图像和放射学报告的身体区域信息。因此，有助于搜索连接到人体各个领域的以前的放射学报告。

7. 发明申请

US20090132499A1 REPORT SEARCHING APPARATUS AND A METHOD FOR SEARCHING A REPORT 有权
标题翻译：报告搜索设备和搜索报告的方法
公开(公告)号：US20090132499A1
公开(公告)日：2009-05-21
申请号：US12274782
申请日：2008-11-20
申请人： Hiromasa YAMAGISHI , Hikaru Futami , Masato Shibuya
发明人： Hiromasa YAMAGISHI , Hikaru Futami , Masato Shibuya
IPC分类号： G06F17/30
CPC分类号： G16H50/70 , G06F19/00 , G06F19/321 , G16H15/00
摘要： Specified types of words are extracted from a plurality of radiology reports archived in an archive configured to archive a plurality of radiology reports. The words extracted from a single radiology report are stored in combination. In response to an input operation using an operating part of inputting the specified types of words, combinations including the specified types of words as one part are searched. A list of the specified types of words included as the other part in the searched combinations is generated. In response to an input operation using the operating part of selecting any word from the word list, a list of radiology reports including the inputted word and the selected word is generated. In response to an input operation using the operating part of selecting any report from the radiology report list, the selected radiology report is outputted from the archive to a display.
摘要翻译：从存档在归档多个放射学报告的归档中的多个放射学报告中提取指定类型的单词。从单个放射学报告中提取的单词组合存储。响应于使用输入指定类型的单词的操作部分的输入操作，搜索包括指定类型的单词作为一个部分的组合。生成包含在搜索组合中作为其他部分的指定类型的单词的列表。响应于使用操作部分选择来自单词列表的任何单词的输入操作，生成包括所输入的单词和所选择的单词的放射学报告的列表。响应于使用从放射学报告列表选择任何报告的操作部分的输入操作，所选择的放射学报告从存档输出到显示器。

8. 发明授权

US08244684B2 Report searching apparatus and a method for searching a report 有权
标题翻译：报告搜索装置和搜索报告的方法
公开(公告)号：US08244684B2
公开(公告)日：2012-08-14
申请号：US12274782
申请日：2008-11-20
申请人： Yutaka Ando , Osamu Kawaguchi , Nobuhiro Tsukamoto , Tomotaka Kasamatsu , Hirofumi Fujii , Hiromasa Yamagishi , Hikaru Futami , Masato Shibuya
发明人： Yutaka Ando , Osamu Kawaguchi , Nobuhiro Tsukamoto , Tomotaka Kasamatsu , Hirofumi Fujii , Hiromasa Yamagishi , Hikaru Futami , Masato Shibuya
IPC分类号： G06F17/00
CPC分类号： G16H50/70 , G06F19/00 , G06F19/321 , G16H15/00
摘要： Specified types of words are extracted from a plurality of radiology reports archived in an archive configured to archive a plurality of radiology reports. The words extracted from a single radiology report are stored in combination. In response to an input operation using an operating part of inputting the specified types of words, combinations including the specified types of words as one part are searched. A list of the specified types of words included as the other part in the searched combinations is generated. In response to an input operation using the operating part of selecting any word from the word list, a list of radiology reports including the inputted word and the selected word is generated. In response to an input operation using the operating part of selecting any report from the radiology report list, the selected radiology report is outputted from the archive to a display.
摘要翻译：从存档在归档多个放射学报告的归档中的多个放射学报告中提取指定类型的单词。从单个放射学报告中提取的单词组合存储。响应于使用输入指定类型的单词的操作部分的输入操作，搜索包括指定类型的单词作为一个部分的组合。生成包含在搜索组合中作为其他部分的指定类型的单词的列表。响应于使用操作部分选择来自单词列表的任何单词的输入操作，生成包括所输入的单词和所选择的单词的放射学报告的列表。响应于使用从放射学报告列表选择任何报告的操作部分的输入操作，所选择的放射学报告从存档输出到显示器。

9. 发明授权

US08090170B2 Medical image storage device 有权
标题翻译：医用图像存储装置
公开(公告)号：US08090170B2
公开(公告)日：2012-01-03
申请号：US12039237
申请日：2008-02-28
申请人： Masato Shibuya , Kenichi Niwa , Hirobumi Nonaka
发明人： Masato Shibuya , Kenichi Niwa , Hirobumi Nonaka
IPC分类号： G06K9/00
CPC分类号： G06F19/321 , G06F19/00
摘要： A medical image observation device relating to the present invention receives enhanced image data having a plurality of medical images, and splits the enhanced image data into a plurality of single image data each containing only one medical image, based on system information of the enhanced image data. According to the present invention, it is possible to make a medical image observation device accurately display an image without depending on system information of enhanced image data.
摘要翻译：本发明涉及的医疗用图像观察装置，接收具有多个医学图像的增强图像数据，根据增强图像数据的系统信息，将增强图像数据分割为仅包含一个医学图像的多个单个图像数据。根据本发明，可以使医疗图像观察装置精确地显示图像而不依赖于增强图像数据的系统信息。

10. 发明申请

US20050190505A1 Magnetic disk device 失效
标题翻译：磁盘装置
公开(公告)号：US20050190505A1
公开(公告)日：2005-09-01
申请号：US10901214
申请日：2004-07-29
申请人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
发明人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
IPC分类号： G11B21/02 , G11B5/54 , G11B5/55 , G11B21/22 , G11B21/08
CPC分类号： G11B5/5569 , G11B5/54
摘要： A magnetic disk device comprises a magnetic disk in which a data zone is formed. An actuator has a voice coil and a head slider carrying a magnetic head, the actuator being swung to move the magnetic head over the disk between an innermost position of the data zone and an outermost position of the data zone. A magnet has a magnetization center and is opposed to the voice coil so that a voice coil motor which swings the actuator is formed, the magnet having a north pole and a south pole confronting each other via the magnetization center. The magnetic disk device is provided so that a deviation of a center of the voice coil from the magnetization center when the magnetic head is in the innermost position of the data zone is substantially equal to a deviation of the center of the voice coil from the magnetization center when the magnetic head is in the outermost position of the data zone.
摘要翻译：磁盘装置包括形成数据区的磁盘。致动器具有音圈和携带磁头的磁头滑块，所述致动器摆动以使磁头在数据区的最内位置和数据区的最外位置之间的磁盘上移动。磁体具有磁化中心并且与音圈相对，从而形成摆动致动器的音圈电动机，磁体具有通过磁化中心彼此相对的北极和南极。提供磁盘装置，使得当磁头处于数据区的最内位置时，音圈的中心与磁化中心的偏差基本上等于音圈的中心与磁化的偏差当磁头位于数据区的最外侧位置时居中。

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