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1. 发明授权

US06465888B2 Composite silicon-metal nitride barrier to prevent formation of metal fluorides in copper damascene 有权
标题翻译：复合硅 - 金属氮化物屏障，以防铜铜镶嵌中金属氟化物的形成
公开(公告)号：US06465888B2
公开(公告)日：2002-10-15
申请号：US10043604
申请日：2002-01-14
申请人： Simon Chooi , Subhash Gupta , Mei Sheng Zhou , Sang Ki Hong
发明人： Simon Chooi , Subhash Gupta , Mei Sheng Zhou , Sang Ki Hong
IPC分类号： H01L2352
CPC分类号： H01L21/76844 , H01L21/76807 , H01L21/76831 , H01L21/76855
摘要： A method of forming amorphous silicon spacers followed by the forming of metal nitride over the spacers in a copper damascene structure—single, dual, or multi-structure—is disclosed in order to prevent the formation of fluorides in copper. In a first embodiment, the interconnection between the copper damascene and an underlying copper metal layer is made by forming an opening from the dual damascene structure to the underlying copper layer after the formation of the metal nitride layer over the amorphous silicon spacers formed on the inside walls of the dual damascene structure. In the second embodiment, the interconnection between the dual damascene structure and the underlying copper line is made from the dual damascene structure by etching into the underlying copper layer after the forming of the amorphous silicon spacers and before the forming of the metal nitride layer. In the third embodiment, the ternary metal silicon nitride spacer is formed by etching after having first formed the amorphous silicon layer and the nitride layer, in that order, and then etching the passivation/barrier layer at the bottom of the damascene structure into the underlying copper layer. In all three embodiments, metal nitride reacts with amorphous silicon to form a ternary metal silicon nitride having an excellent property of adhering to copper while at the same time for forming an excellent barrier to diffusion of copper.
摘要翻译：公开了一种形成非晶硅间隔物的方法，随后在铜镶嵌结构 - 单，双或多结构中在间隔物上形成金属氮化物，以防止铜中氟化物的形成。在第一实施例中，通过在形成在内部的非晶硅间隔物上形成金属氮化物层之后，通过从双镶嵌结构形成开口到下面的铜层来形成铜镶嵌层和下面的铜金属层之间的互连双镶嵌结构的墙壁。在第二实施例中，通过在形成非晶硅间隔物之后并且在形成金属氮化物层之前通过蚀刻到下面的铜层中，由双镶嵌结构制造双镶嵌结构和下面的铜线之间的互连。在第三实施例中，三元金属氮化硅间隔物依次先形成非晶硅层和氮化物层后，通过蚀刻形成，然后在镶嵌结构底部蚀刻钝化/阻挡层，形成底层铜层。在所有三个实施例中，金属氮化物与非晶硅反应形成具有优异的粘附铜特性的三元金属氮化硅，同时形成对铜的扩散的优异屏障。

2. 发明授权

US06689701B1 Method of forming a spin on glass film of a semiconductor device 失效
标题翻译：在半导体器件的玻璃膜上形成自旋的方法
公开(公告)号：US06689701B1
公开(公告)日：2004-02-10
申请号：US08997911
申请日：1997-12-24
申请人： Sang Ki Hong , Sang Ho Jeon , Hyug Jin Kwon
发明人： Sang Ki Hong , Sang Ho Jeon , Hyug Jin Kwon
IPC分类号： H01L2131
CPC分类号： H01L21/3105
摘要： The present invention discloses a method of forming a spin on glass film which can prevent a shift of the threshold voltage of a device by curing the spin on glass film with an electron beam of energy of 6-7 kV.
摘要翻译：本发明公开了一种在玻璃膜上形成自旋的方法，其可以通过用6-7kV的能量的电子束固化玻璃膜上的自旋来防止器件的阈值电压的偏移。

3. 发明授权

US07505278B2 Display module and apparatus for mobile communication having the same 有权
标题翻译：用于移动通信的显示模块和装置具有相同的功能
公开(公告)号：US07505278B2
公开(公告)日：2009-03-17
申请号：US11649755
申请日：2007-01-05
申请人： Byung Sung Choi , Hyoung Seok Kim , Sang Ki Hong
发明人： Byung Sung Choi , Hyoung Seok Kim , Sang Ki Hong
IPC分类号： H05K1/00
CPC分类号： H05K1/147 , G02F1/13452 , H05K1/0213 , H05K1/0215 , H05K3/0061 , H05K3/28 , H05K3/321 , H05K2201/09472 , H05K2201/10128 , H05K2201/1028
摘要： A display assembly having a display module to receive a display signal containing prescribed information, a main circuitry supporting substrate including a ground, a flexible circuitry supporting substrate module connected to the circuitry supporting substrate to process or transfer data for prescribed information from the circuit board to the display module, the flexible circuitry supporting substrate module having recessed conductive portions, and a conductive member connected to the flexible circuitry supporting substrate module to ground the flexible circuitry supporting substrate and the display module, the conductive member including conductive tape applied to the flexible circuitry supporting substrate module and conductive paste to connect recessed conductive portions of the flexible circuitry supporting substrate module to the conductive tape. The display assembly may be formed in a mobile terminal.
摘要翻译：一种显示器组件，具有用于接收包含规定信息的显示信号的显示模块，包括地面的主电路支撑衬底，连接到所述电路支撑衬底的柔性电路支撑衬底模块，以处理或将数据从所述电路板传送到规定信息，所述显示模块，所述柔性电路支撑衬底模块具有凹入的导电部分，以及连接到所述柔性电路支撑衬底模块以将所述柔性电路支撑衬底和所述显示模块接地的导电构件，所述导电构件包括施加到所述柔性电路支撑衬底模块和导电膏以将柔性电路支撑衬底模块的凹进的导电部分连接到导电带上。显示组件可以形成在移动终端中。

4. 发明申请

US20080062661A1 Display module and apparatus for mobile communication having the same 有权
标题翻译：用于移动通信的显示模块和装置具有相同的功能
公开(公告)号：US20080062661A1
公开(公告)日：2008-03-13
申请号：US11649755
申请日：2007-01-05
申请人： Byung Sung Choi , Hyoung Seok Kim , Sang Ki Hong
发明人： Byung Sung Choi , Hyoung Seok Kim , Sang Ki Hong
IPC分类号： H05K5/00
CPC分类号： H05K1/147 , G02F1/13452 , H05K1/0213 , H05K1/0215 , H05K3/0061 , H05K3/28 , H05K3/321 , H05K2201/09472 , H05K2201/10128 , H05K2201/1028
摘要： A display assembly having a display module to receive a display signal containing prescribed information, a main circuitry supporting substrate including a ground, a flexible circuitry supporting substrate module connected to the circuitry supporting substrate to process or transfer data for prescribed information from the circuit board to the display module, the flexible circuitry supporting substrate module having recessed conductive portions, and a conductive member connected to the flexible circuitry supporting substrate module to ground the flexible circuitry supporting substrate and the display module, the conductive member including conductive tape applied to the flexible circuitry supporting substrate module and conductive paste to connect recessed conductive portions of the flexible circuitry supporting substrate module to the conductive tape. The display assembly may be formed in a mobile terminal.
摘要翻译：一种显示器组件，具有用于接收包含规定信息的显示信号的显示模块，包括地面的主电路支撑衬底，连接到所述电路支撑衬底的柔性电路支撑衬底模块，以处理或将数据从所述电路板传送到规定信息，所述显示模块，所述柔性电路支撑衬底模块具有凹入的导电部分，以及连接到所述柔性电路支撑衬底模块以将所述柔性电路支撑衬底和所述显示模块接地的导电构件，所述导电构件包括施加到所述柔性电路支撑衬底模块和导电膏以将柔性电路支撑衬底模块的凹进的导电部分连接到导电带上。显示组件可以形成在移动终端中。

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