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1. 发明授权

US08659335B2 Method and system for controlling radio frequency power 有权
公开(公告)号：US08659335B2
公开(公告)日：2014-02-25
申请号：US12491538
申请日：2009-06-25
申请人： Siddharth Nagarkatti , Feng Tian , David Lam , Abdul Rashid , Souheil Benzerrouk , Ilya Bystryak , David Menzer , Jack J. Schuss , Jesse E. Ambrosina
发明人： Siddharth Nagarkatti , Feng Tian , David Lam , Abdul Rashid , Souheil Benzerrouk , Ilya Bystryak , David Menzer , Jack J. Schuss , Jesse E. Ambrosina
IPC分类号： H03K3/00
CPC分类号： H03K5/01 , H03F3/189 , H03F3/217 , H03F2200/105 , H03F2200/375 , H03F2200/387 , H03G3/3047
摘要： A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.

2. 发明申请

US20100327927A1 METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER 有权
标题翻译：用于控制无线电频率的方法和系统
公开(公告)号：US20100327927A1
公开(公告)日：2010-12-30
申请号：US12491538
申请日：2009-06-25
申请人： Siddharth Nagarkatti , Feng Tian , David Lam , Abdul Rashid , Souheil Benzerrouk , Ilya Bystryak , David Menzer , Jack J. Schuss , Jesse E. Ambrosina
发明人： Siddharth Nagarkatti , Feng Tian , David Lam , Abdul Rashid , Souheil Benzerrouk , Ilya Bystryak , David Menzer , Jack J. Schuss , Jesse E. Ambrosina
IPC分类号： H03K3/84
CPC分类号： H03K5/01 , H03F3/189 , H03F3/217 , H03F2200/105 , H03F2200/375 , H03F2200/387 , H03G3/3047
摘要： A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
摘要翻译：一种用于控制脉冲功率的方法，包括从功率放大器测量第一功率脉冲以获得数据。该方法还包括产生第一信号以调整输出功率的第二脉冲，第一信号与数据相关，以最小化功率设定点与第二脉冲的基本稳定部分之间的功率差。该方法还包括产生第二信号以调整传递功率的第二脉冲，第二信号与数据相关，以最小化第二脉冲的峰值与第二脉冲的基本上稳定的部分之间的幅度差异。

3. 发明申请

US20050223979A1 Pulsed mass flow delivery system and method 有权
标题翻译：脉冲质量流量输送系统及方法
公开(公告)号：US20050223979A1
公开(公告)日：2005-10-13
申请号：US10822358
申请日：2004-04-12
申请人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
IPC分类号： C23C16/44 , C23C16/452 , C23C16/455 , C23C16/52 , B05C11/00 , B01D59/44 , C23C16/00 , H01J49/00
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.
摘要翻译：一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置以及连接到阀门，压力传感器和输入装置的控制器。控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。然后将控制器编程为等待预定的等待时间段以允许室内的气体接近平衡状态，然后在时间= 0℃下打开出口阀，并在时间关闭出口阀当排出的气体质量等于所需质量时，= t *。

4. 发明申请

US20060169327A1 Pressure regulation in remote zones 有权
标题翻译：偏远地区的压力调节
公开(公告)号：US20060169327A1
公开(公告)日：2006-08-03
申请号：US11333142
申请日：2006-01-17
申请人： Ali Shajii , Siddharth Nagarkatti , Gordon Hill
发明人： Ali Shajii , Siddharth Nagarkatti , Gordon Hill
IPC分类号： G05D7/06
CPC分类号： G05D16/206 , H01L21/30625 , Y10T137/7761 , Y10T137/7838 , Y10T137/87209 , Y10T137/8733 , Y10T137/8741 , Y10T137/87507 , Y10T137/87772
摘要： A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.
摘要翻译：压力控制系统通过控制流入每个外壳的流动来远程控制一个或多个远程区域内的压力，每个远程区域分别通过导管连接到外壳。在每个外壳内测量流体的压力。根据外壳中测量的压力和导管和区域的已知特性，计算每个区域内的估计压力。对于每个区域，操作每个外壳的入口比例阀和出口比例阀，以便控制流体进入相应外壳的流体的输入流量和流出外壳的输出流量作为压力设定点和估计压力，从而根据压力设定点调节区域内的压力。

5. 发明申请

US20050217346A1 Flow measurement calibration 审中-公开
标题翻译：流量测量校准
公开(公告)号：US20050217346A1
公开(公告)日：2005-10-06
申请号：US10819639
申请日：2004-04-06
申请人： Siddharth Nagarkatti , William Clark , Ali Shajii
发明人： Siddharth Nagarkatti , William Clark , Ali Shajii
IPC分类号： G01F25/00 , G01P21/00
CPC分类号： G01F25/0053 , G01F25/0015
摘要： A flow measurement calibration system and method is presented that actively regulates the pressure of the fluid being tested. A piston is slidably mounted to an inner wall of a chamber, which has a fluid inlet port for receiving an inflow of fluid into the interior of the chamber. The piston moves through the length of the chamber in response to fluid pressure exerted by the fluid flowing into the chamber. A piston actuator imparts motion to the piston, in response to command signals from a controller. The controller is responsive to the output of a pressure sensor, which senses the fluid pressure, and a position/velocity sensor, which senses the position and velocity of the piston. The controller commands the piston actuator to dynamically adjust the position and velocity of the piston so that the fluid pressure remains substantially constant at a desired setpoint.
摘要翻译：提出了一种流量测量校准系统和方法，其主动地调节被测流体的压力。活塞可滑动地安装到腔室的内壁上，所述腔体的内壁具有用于接收流体进入腔室内部的流体入口。活塞响应于流入室内的流体施加的流体压力而移动通过室的长度。响应于来自控制器的命令信号，活塞致动器向活塞施加运动。控制器响应于感测流体压力的压力传感器的输出，以及感测活塞的位置和速度的位置/速度传感器。控制器命令活塞致动器动态地调节活塞的位置和速度，使得流体压力基本保持恒定在所需的设定点。

6. 发明申请

US20050199342A1 Semiconductor manufacturing gas flow divider system and method 有权
标题翻译：半导体制造气体分流器系统及方法
公开(公告)号：US20050199342A1
公开(公告)日：2005-09-15
申请号：US10796693
申请日：2004-03-09
申请人： Ali Shajii , Siddharth Nagarkatti
发明人： Ali Shajii , Siddharth Nagarkatti
IPC分类号： C23F1/00 , F17D3/00
CPC分类号： G05D7/0664 , C23C16/45561 , C23C16/52 , Y10T137/0363 , Y10T137/2524
摘要： A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow, at least one in-situ process monitor providing measurements of products produced by each of the flows lines, and a controller connected to the input device and the in-situ process monitor. The controller is programmed to receive the desired ratio of flow through the input device, receive the product measurements from the in-situ process monitor, and calculate a corrected ratio of flow based upon the desired ratio of flow and the product measurements. If the product measurements are not equal, then the corrected ratio of flow will be different than the desired ratio of flow.
摘要翻译：一种用于将单个流分成两个或更多个期望比例的二次流的系统，包括适于接收单个流的入口，连接到入口的至少两个二次流线，适于接收至少一个期望比例的输入装置至少一个原位过程监视器，其提供由每个流水线产生的产品的测量值，以及连接到输入设备和原位过程监控器的控制器。控制器被编程为接收通过输入设备的期望流量比，从原位过程监控器接收产品测量值，并且基于所需的流量比和产品测量值来计算校正的流量比。如果产品测量值不相等，则校正后的流量比将不同于所需的流量比。

7. 发明申请

US20070042508A1 Pulsed mass flow delivery system and method 有权
公开(公告)号：US20070042508A1
公开(公告)日：2007-02-22
申请号：US11586782
申请日：2006-10-26
申请人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
IPC分类号： H01L21/00 , H01L21/306 , C23C16/00
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

8. 发明申请

US20070039550A1 Pulsed mass flow delivery system and method 审中-公开
标题翻译：脉冲质量流量输送系统及方法
公开(公告)号：US20070039550A1
公开(公告)日：2007-02-22
申请号：US11588085
申请日：2006-10-26
申请人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth Nagarkatti , Matthew Besen , William Clark , Daniel Smith , Bora Akgerman
IPC分类号： H01L21/306 , C23C16/00
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.
摘要翻译：一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置以及连接到阀门，压力传感器和输入装置的控制器。控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。然后将控制器编程为等待预定的等待时间段以允许室内的气体接近平衡状态，然后在时间= 0℃下打开出口阀，并在时间关闭出口阀当排出的气体质量等于所需质量时，= t *。

9. 发明申请

US20070139122A1 Radio Frequency Power Delivery System 有权
标题翻译：射频供电系统
公开(公告)号：US20070139122A1
公开(公告)日：2007-06-21
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
发明人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
IPC分类号： H03F3/191
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

10. 发明申请

US20070039549A1 Pulsed mass flow delivery system and method 有权
公开(公告)号：US20070039549A1
公开(公告)日：2007-02-22
申请号：US11588042
申请日：2006-10-26
申请人： Ali Shajii , Siddharth Nagarkatti , Matthew Mark Besen , William Clark , Daniel Alexander Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth Nagarkatti , Matthew Mark Besen , William Clark , Daniel Alexander Smith , Bora Akgerman
IPC分类号： H01L21/306 , C23C16/00
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

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