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    • 5. 发明申请
    • Flow measurement calibration
    • 流量测量校准
    • US20050217346A1
    • 2005-10-06
    • US10819639
    • 2004-04-06
    • Siddharth NagarkattiWilliam ClarkAli Shajii
    • Siddharth NagarkattiWilliam ClarkAli Shajii
    • G01F25/00G01P21/00
    • G01F25/0053G01F25/0015
    • A flow measurement calibration system and method is presented that actively regulates the pressure of the fluid being tested. A piston is slidably mounted to an inner wall of a chamber, which has a fluid inlet port for receiving an inflow of fluid into the interior of the chamber. The piston moves through the length of the chamber in response to fluid pressure exerted by the fluid flowing into the chamber. A piston actuator imparts motion to the piston, in response to command signals from a controller. The controller is responsive to the output of a pressure sensor, which senses the fluid pressure, and a position/velocity sensor, which senses the position and velocity of the piston. The controller commands the piston actuator to dynamically adjust the position and velocity of the piston so that the fluid pressure remains substantially constant at a desired setpoint.
    • 提出了一种流量测量校准系统和方法,其主动地调节被测流体的压力。 活塞可滑动地安装到腔室的内壁上,所述腔体的内壁具有用于接收流体进入腔室内部的流体入口。 活塞响应于流入室内的流体施加的流体压力而移动通过室的长度。 响应于来自控制器的命令信号,活塞致动器向活塞施加运动。 控制器响应于感测流体压力的压力传感器的输出,以及感测活塞的位置和速度的位置/速度传感器。 控制器命令活塞致动器动态地调节活塞的位置和速度,使得流体压力基本保持恒定在所需的设定点。
    • 6. 发明申请
    • Vaporizer and method of vaporizing a liquid for thin film delivery
    • 蒸发器和蒸发用于薄膜输送的液体的方法
    • US20060207503A1
    • 2006-09-21
    • US11083586
    • 2005-03-18
    • Paul MeneghiniAli ShajiiDaniel SmithWilliam Clark
    • Paul MeneghiniAli ShajiiDaniel SmithWilliam Clark
    • C23C16/00
    • C23C16/4485
    • A vaporizer including an inlet for liquid and an outlet for gas, a gas valve controlling gas flow to the outlet of the vaporizer, and means for heating liquid flowing between the liquid inlet and the gas valve. The vaporizer also includes means for increasing a heat transfer rate of the liquid flowing between the liquid inlet and the gas valve, and for causing a pressure drop in the liquid so that a pressure of the liquid drops below a vapor transition pressure of the liquid upon reaching the gas valve. The pressure drop occurs under isothermal conditions, and the liquid is vaporized on demand only when the valve is opened. The means for increasing a heat transfer rate and for causing a pressure drop can be a plug of porous media.
    • 一种蒸发器,包括用于液体的入口和用于气体的出口,气体阀控制气体流向蒸发器的出口,以及用于加热在液体入口和气体阀之间流动的液体的装置。 蒸发器还包括用于增加在液体入口和气体阀之间流动的液体的传热速率并且用于引起液体中的压降的装置,使得液体的压力下降到液体的蒸汽过渡压力以下 到达气阀。 在等温条件下发生压降,仅当阀门打开时液体才能根据需要蒸发。 用于增加传热速率和引起压降的方法可以是多孔介质的塞子。