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    • 4. 发明申请
    • PROCESS MODULE FOR INCREASING THE RESPONSE OF BACKSIDE ILLUMINATED PHOTOSENSITIVE IMAGERS AND ASSOCIATED METHODS
    • 用于增加背光照明感光图像和相关方法的响应过程模块
    • US20170025467A1
    • 2017-01-26
    • US15287430
    • 2016-10-06
    • SiOnyx, LLC
    • Homayoon HaddadJeffrey McKeeJutao JiangDrake MillerChintamani PalsuleLeonard Forbes
    • H01L27/146
    • H01L27/14685H01L27/1462H01L27/14629H01L27/1464H01L27/14689H01L27/14692H01L31/0232H01L31/18
    • Backside illuminated photosensitive devices and associated methods are provided. In one aspect, for example, a backside-illuminated photosensitive imager device can include a semiconductor substrate having multiple doped regions forming a least one junction, a textured region coupled to the semiconductor substrate and positioned to interact with electromagnetic radiation where the textured region includes surface features sized and positioned to facilitate tuning to a preselected wavelength of light, and a dielectric region positioned between the textured region and the at least one junction. The dielectric region is positioned to isolate the at least one junction from the textured region, and the semiconductor substrate and the textured region are positioned such that incoming electromagnetic radiation passes through the semiconductor substrate before contacting the textured region. Additionally, the device includes an electrical transfer element coupled to the semiconductor substrate to transfer an electrical signal from the at least one junction.
    • 提供背面照明感光装置及相关方法。 在一个方面,例如,背面照射的光敏成像器件可以包括具有形成至少一个结的多个掺杂区域的半导体衬底,耦合到半导体衬底并被定位成与电磁辐射相互作用的纹理区域,其中纹理区域包括表面 特征尺寸和位置便于调谐到预选的波长的光,以及位于纹理化区域和至少一个结之间的电介质区域。 电介质区域被定位成将至少一个结与纹理化区域隔离,并且半导体衬底和纹理化区域被定位成使得输入的电磁辐射在接触纹理区域之前穿过半导体衬底。 另外,该装置包括耦合到半导体衬底以从至少一个结转移电信号的电转移元件。