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    • 4. 发明授权
    • Method of making distributed feedback laser having spatial variation of
grating coupling along laser cavity length
    • 制造具有激光腔长度的光栅耦合空间变化的分布反馈激光的方法
    • US5943554A
    • 1999-08-24
    • US898260
    • 1997-07-22
    • William Crossley Dautremont-SmithTodd Robert Hayes
    • William Crossley Dautremont-SmithTodd Robert Hayes
    • H01S5/12H01S5/20H01S5/227H01S3/19
    • H01S5/12H01S5/1225H01S5/2077H01S5/2272
    • A distributed feedback (DFB) laser is made with a spatially graded optical coupling (.kappa.) between its diffraction grating and its active layer by means of selective area epitaxial growth of the epitaxial layer from which the grating is formed. More specifically, the epitaxial layer is formed on a major surface of a semiconductor substrate on which a mask, such as a silicon dioxide mask, has been formed. The mask has a pair of segments spaced apart by a fixed distance, the segments having spatially variable widths. Advantageously the epitaxial layer has a refractive index that is different from that of the substrate at the operating wavelength of the laser. The epitaxial layer is then etched into stripes. In this way the heights of the resulting grating stripes will be spatially variable, and so will the coupling .kappa. between the grating and the active layer. In this way, the properties of the optical output of the laswer can be adjusted. Advantageously also, the spacer layer and the substrate have the same refractive indices at the operating wavelength of the laser, whereby accurate control over the depth of the etching is not required.
    • 通过从其形成光栅的外延层的选择性区域外延生长,在其衍射光栅及其有源层之间通过空间梯度光耦合(kappa)制成分布反馈(DFB)激光器。 更具体地,外延层形成在半导体衬底的主表面上,其上形成有诸如二氧化硅掩模的掩模。 该掩模具有间隔开固定距离的一对段,该段具有空间上可变的宽度。 有利地,外延层具有与激光器的工作波长处的衬底的折射率不同的折射率。 然后将外延层蚀刻成条纹。 以这种方式,所得到的光栅条纹的高度将在空间上是可变的,并且光栅和有源层之间的耦合kappa也是如此。 以这种方式,可以调节激光器的光学输出的特性。 有利的是,间隔层和衬底在激光器的工作波长处具有相同的折射率,从而不需要对蚀刻深度的精确控制。