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    • 3. 发明授权
    • Method for manufacturing a semiconductor device
    • 半导体器件的制造方法
    • US08035077B2
    • 2011-10-11
    • US12836142
    • 2010-07-14
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • H01L31/18
    • H01L27/14665H01L27/1214H01L27/1266H01L27/14603H03F3/08
    • A semiconductor device is manufactured through steps in which a photoelectric conversion element and an amplifier circuit are formed over a first substrate with a release layer interposed therebetween, and the photoelectric conversion element and the amplifier circuit are separated from the first substrate. Output characteristics of the amplifier circuit are improved and the semiconductor device with high reliability is obtained. A manufacturing method of such semiconductor device includes steps of forming a metal layer having an opening portion over a substrate, forming an insulating layer over the entire surface of the substrate including the opening portion and the metal layer, forming a photoelectric conversion layer in a region which overlaps with the metal layer and is a layer over the insulating layer, forming an amplifier circuit, which amplifies an output current of the photoelectric conversion element by using a thin film transistor, in the opening portion in the metal layer, forming a protective layer over the photoelectric conversion element and the amplifier circuit, and separating the photoelectric conversion element and the amplifier circuit, together with the insulating layer, from the substrate through laser irradiation to the metal layer.
    • 通过在第一基板上形成有光电转换元件和放大电路的步骤制造半导体器件,并且将光电转换元件和放大电路与第一基板分离。 改善放大电路的输出特性,获得高可靠性的半导体器件。 这种半导体器件的制造方法包括以下步骤:在衬底上形成具有开口部分的金属层,在包括开口部分和金属层的衬底的整个表面上形成绝缘层,在区域中形成光电转换层 其与金属层重叠并且是绝缘层上的层,形成放大器电路,其在金属层的开口部分中使用薄膜晶体管放大光电转换元件的输出电流,形成保护层 通过光电转换元件和放大器电路,并且通过激光照射将光电转换元件和放大器电路与绝缘层一起从基板分离到金属层。
    • 6. 发明授权
    • Method for manufacturing a semiconductor device
    • 半导体器件的制造方法
    • US07759629B2
    • 2010-07-20
    • US12043640
    • 2008-03-06
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • H01L31/18
    • H01L27/14665H01L27/1214H01L27/1266H01L27/14603H03F3/08
    • A semiconductor device is manufactured through steps in which a photoelectric conversion element and an amplifier circuit are formed over a first substrate with a release layer interposed therebetween, and the photoelectric conversion element and the amplifier circuit are separated from the first substrate. Output characteristics of the amplifier circuit are improved and the semiconductor device with high reliability is obtained. A manufacturing method of such semiconductor device includes steps of forming a metal layer having an opening portion over a substrate, forming an insulating layer over the entire surface of the substrate including the opening portion and the metal layer, forming a photoelectric conversion layer in a region which overlaps with the metal layer and is a layer over the insulating layer, forming an amplifier circuit, which amplifies an output current of the photoelectric conversion element by using a thin film transistor, in the opening portion in the metal layer, forming a protective layer over the photoelectric conversion element and the amplifier circuit, and separating the photoelectric conversion element and the amplifier circuit, together with the insulating layer, from the substrate through laser irradiation to the metal layer.
    • 通过在第一基板上形成有光电转换元件和放大电路的步骤制造半导体器件,并且将光电转换元件和放大电路与第一基板分离。 改善放大电路的输出特性,获得高可靠性的半导体器件。 这种半导体器件的制造方法包括以下步骤:在衬底上形成具有开口部分的金属层,在包括开口部分和金属层的衬底的整个表面上形成绝缘层,在区域中形成光电转换层 其与金属层重叠并且是绝缘层上的层,形成放大器电路,其在金属层的开口部分中使用薄膜晶体管放大光电转换元件的输出电流,形成保护层 通过光电转换元件和放大器电路,并且通过激光照射将光电转换元件和放大器电路与绝缘层一起从基板分离到金属层。
    • 7. 发明申请
    • METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20080230682A1
    • 2008-09-25
    • US12043640
    • 2008-03-06
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • H03F3/08H01L31/18
    • H01L27/14665H01L27/1214H01L27/1266H01L27/14603H03F3/08
    • A semiconductor device is manufactured through steps in which a photoelectric conversion element and an amplifier circuit are formed over a first substrate with a release layer interposed therebetween, and the photoelectric conversion element and the amplifier circuit are separated from the first substrate. Output characteristics of the amplifier circuit are improved and the semiconductor device with high reliability is obtained. A manufacturing method of such semiconductor device includes steps of forming a metal layer having an opening portion over a substrate, forming an insulating layer over the entire surface of the substrate including the opening portion and the metal layer, forming a photoelectric conversion layer in a region which overlaps with the metal layer and is a layer over the insulating layer, forming an amplifier circuit, which amplifies an output current of the photoelectric conversion element by using a thin film transistor, in the opening portion in the metal layer, forming a protective layer over the photoelectric conversion element and the amplifier circuit, and separating the photoelectric conversion element and the amplifier circuit, together with the insulating layer, from the substrate through laser irradiation to the metal layer.
    • 通过在第一基板上形成有光电转换元件和放大电路的步骤制造半导体器件,并且将光电转换元件和放大电路与第一基板分离。 改善放大电路的输出特性,获得高可靠性的半导体器件。 这种半导体器件的制造方法包括以下步骤:在衬底上形成具有开口部分的金属层,在包括开口部分和金属层的衬底的整个表面上形成绝缘层,在区域中形成光电转换层 其与金属层重叠并且是绝缘层上的层,形成放大器电路,其在金属层的开口部分中使用薄膜晶体管放大光电转换元件的输出电流,形成保护层 通过光电转换元件和放大器电路,并且通过激光照射将光电转换元件和放大器电路与绝缘层一起从基板分离到金属层。
    • 8. 发明申请
    • METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20100282947A1
    • 2010-11-11
    • US12836142
    • 2010-07-14
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • Shunpei YamazakiAtsushi HiroseKoji OnoHotaka Maruyama
    • H03F3/08H01L31/18H01L31/101
    • H01L27/14665H01L27/1214H01L27/1266H01L27/14603H03F3/08
    • A semiconductor device is manufactured through steps in which a photoelectric conversion element and an amplifier circuit are formed over a first substrate with a release layer interposed therebetween, and the photoelectric conversion element and the amplifier circuit are separated from the first substrate. Output characteristics of the amplifier circuit are improved and the semiconductor device with high reliability is obtained. A manufacturing method of such semiconductor device includes steps of forming a metal layer having an opening portion over a substrate, forming an insulating layer over the entire surface of the substrate including the opening portion and the metal layer, forming a photoelectric conversion layer in a region which overlaps with the metal layer and is a layer over the insulating layer, forming an amplifier circuit, which amplifies an output current of the photoelectric conversion element by using a thin film transistor, in the opening portion in the metal layer, forming a protective layer over the photoelectric conversion element and the amplifier circuit, and separating the photoelectric conversion element and the amplifier circuit, together with the insulating layer, from the substrate through laser irradiation to the metal layer.
    • 通过在第一基板上形成有光电转换元件和放大电路的步骤制造半导体器件,并且将光电转换元件和放大电路与第一基板分离。 改善放大电路的输出特性,获得高可靠性的半导体器件。 这种半导体器件的制造方法包括以下步骤:在衬底上形成具有开口部分的金属层,在包括开口部分和金属层的衬底的整个表面上形成绝缘层,在区域中形成光电转换层 其与金属层重叠并且是绝缘层上的层,形成放大器电路,其在金属层的开口部分中使用薄膜晶体管放大光电转换元件的输出电流,形成保护层 通过光电转换元件和放大器电路,并且通过激光照射将光电转换元件和放大器电路与绝缘层一起从基板分离到金属层。
    • 9. 发明授权
    • Semiconductor device including a current mirror circuit
    • 包括电流镜电路的半导体器件
    • US09041112B2
    • 2015-05-26
    • US12707772
    • 2010-02-18
    • Atsushi Hirose
    • Atsushi Hirose
    • H01L21/84H03F1/08G05F3/26H01L27/12
    • H03F1/086G05F3/262H01L21/84H01L27/12H01L2224/16225H03F2200/513
    • In a semiconductor device, where, with respect to a parasitic resistor in a current mirror circuit, a compensation resistor for compensating the parasitic resistor is provided in the current mirror circuit, the current mirror circuit includes at least two thin film transistors. The thin film transistors each have an island-shaped semiconductor film having a channel formation region and source or drain regions, a gate insulating film, a gate electrode, and source or drain electrodes, and the compensation resistor compensates the parasitic resistor of any one of the gate electrode, the source electrode, and the drain electrode. In addition, each compensation resistor has a conductive layer containing the same material as the gate electrode, the source or drain electrodes, or the source or drain regions.
    • 在半导体器件中,电流镜电路中设置有用于补偿寄生电阻的补偿电阻器,相对于电流镜电路中的寄生电阻器,电流镜电路至少包括两个薄膜晶体管。 薄膜晶体管各自具有沟道形成区域和源极或漏极区域的岛状半导体膜,栅极绝缘膜,栅极电极和源极或漏极,并且补偿电阻器补偿任何一个的寄生电阻器 栅电极,源电极和漏电极。 此外,每个补偿电阻器具有包含与栅极电极,源极或漏极电极或源极或漏极区域相同的材料的导电层。