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    • 2. 发明申请
    • SEMICONDUCTOR DISPLAY DEVICE
    • 半导体显示设备
    • US20110049522A1
    • 2011-03-03
    • US12711611
    • 2010-02-24
    • Shunpei YAMAZAKISatoshi MURAKAMIMasahiko HAYAKAWAKiyoshi KATOMitsuaki OSAME
    • Shunpei YAMAZAKISatoshi MURAKAMIMasahiko HAYAKAWAKiyoshi KATOMitsuaki OSAME
    • H01L33/00
    • H01L27/1248G02F1/136227H01L27/12H01L27/1214H01L27/124H01L27/1244H01L27/1255H01L27/13H01L27/3246H01L27/3276H01L33/52H01L51/5237H01L51/5253
    • It is an object of the present invention to provide a semiconductor display device having an interlayer insulating film which can obtain planarity of a surface while controlling film formation time, can control treatment time of heating treatment with an object of removing moisture, and can prevent moisture in the interlayer insulating film from being discharged to a film or an electrode adjacent to the interlayer insulating film. An inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover a TFT. Next, an organic resin film containing photosensitive acrylic resin is applied to the organic insulting film, and the organic resin film is partially exposed to light to be opened. Thereafter, an inorganic insulting film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover the opened organic resin film. Then, in the opening part of the organic resin film, a gate insulating film and the two layer inorganic insulating film containing nitrogen are opened partially is by etching to expose an active layer of the TFT.
    • 本发明的目的是提供一种具有层间绝缘膜的半导体显示装置,其可以在控制成膜时间的同时获得表面的平面性,并且可以控制用于除去水分的加热处理的处理时间,并且可以防止水分 在层间绝缘膜中不被放电到与层间绝缘膜相邻的膜或电极。 形成与有机树脂相比不容易透过水分的含氮的无机绝缘膜,以覆盖TFT。 接着,在有机绝缘膜上涂布含有感光性丙烯酸树脂的有机树脂膜,将有机树脂膜部分地曝光以打开。 然后,形成与有机树脂相比不容易透过水分的含有氮的无机绝缘膜,以覆盖打开的有机树脂膜。 然后,在有机树脂膜的开口部分,通过蚀刻部分地开启含有氮的栅极绝缘膜和双层无机绝缘膜,以暴露TFT的有源层。
    • 5. 发明申请
    • SEMICONDUCTOR DISPLAY DEVICE
    • 半导体显示设备
    • US20110309364A1
    • 2011-12-22
    • US13217322
    • 2011-08-25
    • Shunpei YAMAZAKISatoshi MURAKAMIMasahiko HAYAKAWAKiyoshi KATOMitsuaki OSAME
    • Shunpei YAMAZAKISatoshi MURAKAMIMasahiko HAYAKAWAKiyoshi KATOMitsuaki OSAME
    • H01L29/786
    • H01L27/1248G02F1/136227H01L27/12H01L27/1214H01L27/124H01L27/1244H01L27/1255H01L27/13H01L27/3246H01L27/3276H01L33/52H01L51/5237H01L51/5253
    • It is an object of the present invention to provide a semiconductor display device having an interlayer insulating film which can obtain planarity of a surface while controlling film formation time, can control treatment time of heating treatment with an object of removing moisture, and can prevent moisture in the interlayer insulating film from being discharged to a film or an electrode adjacent to the interlayer insulating film. An inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover a TFT. Next, an organic resin film containing photosensitive acrylic resin is applied to the organic insulating film, and the organic resin film is partially exposed to light to be opened. Thereafter, an inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover the opened organic resin film. Then, in the opening part of the organic resin film, a gate insulating film and the two layer inorganic insulating film containing nitrogen are opened partially by etching to expose an active layer of the TFT.
    • 本发明的目的是提供一种具有层间绝缘膜的半导体显示装置,其可以在控制成膜时间的同时获得表面的平面性,并且可以控制用于除去水分的加热处理的处理时间,并且可以防止水分 在层间绝缘膜中不被放电到与层间绝缘膜相邻的膜或电极。 形成与有机树脂相比不容易透过水分的含氮的无机绝缘膜,以覆盖TFT。 接着,在有机绝缘膜上涂布含有感光性丙烯酸树脂的有机树脂膜,将有机树脂膜部分地曝光以打开。 此后,形成与有机树脂相比不容易透过水分的含有氮的无机绝缘膜,以覆盖打开的有机树脂膜。 然后,在有机树脂膜的开口部分中,通过蚀刻部分地打开栅极绝缘膜和含氮的两层无机绝缘膜,以暴露TFT的有源层。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20110101334A1
    • 2011-05-05
    • US12912190
    • 2010-10-26
    • Shunpei YAMAZAKIJun KOYAMAKiyoshi KATO
    • Shunpei YAMAZAKIJun KOYAMAKiyoshi KATO
    • H01L27/108
    • H01L27/088G11C11/404G11C11/405G11C16/02H01L27/0207H01L27/1052H01L27/115H01L27/11517H01L27/1156H01L27/1225
    • It is an object to provide a semiconductor having a novel structure. In the semiconductor device, a plurality of memory elements are connected in series and each of the plurality of memory elements includes first to third transistors thus forming a memory circuit. A source or a drain of a first transistor which includes an oxide semiconductor layer is in electrical contact with a gate of one of a second and a third transistor. The extremely low off current of a first transistor containing the oxide semiconductor layer allows storing, for long periods of time, electrical charges in the gate electrode of one of the second and the third transistor, whereby a substantially permanent memory effect can be obtained. The second and the third transistors which do not contain an oxide semiconductor layer allow high-speed operations when using the memory circuit.
    • 本发明的目的是提供具有新颖结构的半导体。 在半导体器件中,多个存储器元件串联连接,并且多个存储元件中的每一个包括第一至第三晶体管,从而形成存储器电路。 包括氧化物半导体层的第一晶体管的源极或漏极与第二和第三晶体管之一的栅极电接触。 含有氧化物半导体层的第一晶体管的极低的截止电流允许长时间地在第二和第三晶体管之一的栅电极中存储电荷,由此可以获得基本上永久的记忆效应。 不含氧化物半导体层的第二和第三晶体管在使用存储电路时允许高速操作。