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    • 4. 发明申请
    • LOGIC CIRCUIT AND SEMICONDUCTOR DEVICE
    • 逻辑电路和半导体器件
    • US20110089975A1
    • 2011-04-21
    • US12901057
    • 2010-10-08
    • Shunpei YAMAZAKIJun KOYAMAMasashi TSUBUKUKosei NODA
    • Shunpei YAMAZAKIJun KOYAMAMasashi TSUBUKUKosei NODA
    • H03K19/08H01L29/12
    • H01L29/7869H01L22/34H01L27/0207H01L27/1225H01L29/78696H01L2924/0002H01L2924/00
    • A logic circuit includes a thin film transistor having a channel formation region formed using an oxide semiconductor, and a capacitor having terminals one of which is brought into a floating state by turning off the thin film transistor. The oxide semiconductor has a hydrogen concentration of 5×1019 (atoms/cm3) or less and thus substantially serves as an insulator in a state where an electric field is not generated. Therefore, off-state current of a thin film transistor can be reduced, leading to suppressing the leakage of electric charge stored in a capacitor, through the thin film transistor. Accordingly, a malfunction of the logic circuit can be prevented. Further, the excessive amount of current which flows in the logic circuit can be reduced through the reduction of off-state current of the thin film transistor, resulting in low power consumption of the logic circuit.
    • 逻辑电路包括具有使用氧化物半导体形成的沟道形成区域的薄膜晶体管,以及通过关闭薄膜晶体管而使端子中的一个成为浮置状态的电容器。 氧化物半导体的氢浓度为5×1019(原子/ cm3)以下,因此在不产生电场的状态下基本上用作绝缘体。 因此,可以减小薄膜晶体管的截止电流,从而通过薄膜晶体管抑制存储在电容器中的电荷的泄漏。 因此,可以防止逻辑电路的故障。 此外,可以通过减小薄膜晶体管的截止电流来降低在逻辑电路中流动的过量的电流,导致逻辑电路的低功耗。
    • 5. 发明申请
    • TRANSISTOR AND DISPLAY DEVICE USING THE SAME
    • 使用相同的晶体管和显示器件
    • US20110204368A1
    • 2011-08-25
    • US13026511
    • 2011-02-14
    • Masashi TSUBUKUKosei NODA
    • Masashi TSUBUKUKosei NODA
    • H01L29/786
    • H01L29/7869H01L27/1225H01L27/156
    • The band tail state and defects in the band gap are reduced as much as possible, whereby optical absorption of energy which is in the vicinity of the band gap or less than or equal to the band gap is reduced. In that case, not by merely optimizing conditions of manufacturing an oxide semiconductor film, but by making an oxide semiconductor to be a substantially intrinsic semiconductor or extremely close to an intrinsic semiconductor, defects on which irradiation light acts are reduced and the effect of light irradiation is reduced essentially. That is, even in the case where light with a wavelength of 350 nm is delivered at 1×1013 photons/cm2·sec, a channel region of a transistor is formed using an oxide semiconductor, in which the absolute value of the amount of the variation in the threshold voltage is less than or equal to 0.65 V.
    • 频带尾部状态和带隙中的缺陷尽可能地减小,由此减小了在带隙附近或小于或等于带隙的能量的光吸收。 在这种情况下,不是仅通过优化氧化物半导体膜的制造条件,而是通过使氧化物半导体成为本质上的本征半导体,或者非常接近本征半导体,减少照射光的作用的缺陷和光照射 基本上减少了。 也就是说,即使在以1×1013个光子/ cm 2·sec传递波长为350nm的光的情况下,也可以使用氧化物半导体形成晶体管的沟道区域,其中, 阈值电压的变化小于或等于0.65 V.