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1. 发明授权

US5741580A Crystalline thin film and producing method thereof, and acoustooptic deflection element 失效
标题翻译：结晶薄膜及其制造方法以及声光偏转元件
公开(公告)号：US5741580A
公开(公告)日：1998-04-21
申请号：US696149
申请日：1996-08-13
申请人： Shunichi Hayamizu , Tomoji Kawai , Hitoshi Tabata
发明人： Shunichi Hayamizu , Tomoji Kawai , Hitoshi Tabata
IPC分类号： C03C17/245 , C03C17/34 , C04B41/00 , C04B41/52 , C23C14/08 , C23C14/28 , B32B7/00 , B32B7/02
CPC分类号： C04B41/0036 , C03C17/245 , C03C17/3417 , C03C17/3447 , C04B41/52 , C23C14/086 , C23C14/28 , C03C2217/216 , C03C2218/15 , C03C2218/154 , Y10T428/24174 , Y10T428/249921
摘要： A thin film having a good orientation and crystallinity. A method of producing the thin film on a substrate, wherein materials of a thin film are deposited and/or crystallized on a substrate. When a laser ablation method is adopted, the temperature of the glass substrate is set in the range between 200.degree. C. and 700.degree. C., and the pressure of O.sub.2 gas in a film forming chamber is set in the range between 7.times.10.sup.-5 Torr and 1.times.10.sup.-2 Torr. A laser beam irradiates a ZnO target. The target radiates materials of a thin film, such as neutral ions, molecules and ions, and the radiated materials are deposited and/or crystallized on the glass substrate to turn into a ZnO thin film.
摘要翻译：具有良好取向和结晶度的薄膜。一种在衬底上制造薄膜的方法，其中在衬底上沉积和/或结晶薄膜的材料。当采用激光烧蚀方法时，将玻璃基板的温度设定在200〜700℃的范围内，成膜室内的O 2气体的压力设定在7×10 -5 乇和1×10-2乇。激光束照射ZnO靶。目标辐射薄膜的材料，例如中性离子，分子和离子，辐射材料在玻璃基底上沉积和/或结晶化成ZnO薄膜。

2. 发明申请

US20110021381A1 Method for immobilizing self-organizing material or fine particle on substrate, and substrate manufactured by using such method 有权
标题翻译：将自组织材料或细颗粒固定在基材上的方法，以及使用这种方法制造的基材
公开(公告)号：US20110021381A1
公开(公告)日：2011-01-27
申请号：US12923470
申请日：2010-09-23
申请人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
发明人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
IPC分类号： C40B50/18 , C40B40/00 , C40B40/10 , C40B40/06 , C40B40/12 , C40B40/04
CPC分类号： B01J19/0046 , B01J2219/00648 , B01J2219/00659 , B01J2219/00722 , B01J2219/00725 , B82Y30/00 , Y10T428/31678
摘要： A method for immobilizing a self-organizing material or fine particles on a substrate, and a substrate whereupon the self-organizing material or the fine particles are immobilized. More specifically, the method for immobilizing the fine particles including a nucleic acid (for instance, DNA or RNA) or a metal oxide on the substrate, and the substrate whereupon the nucleic acid (for example, DNA or RNA) or the metal oxide is immobilized.
摘要翻译：将自组织材料或细颗粒固定在基材上的方法，以及固定有自组织材料或微粒的基材。更具体地说，将含有核酸（例如DNA或RNA）或金属氧化物的微粒子固定在基板上的基板，以及核酸（例如DNA或RNA）或金属氧化物等的底物为固定化

3. 发明授权

US07829546B2 Method for immobilizing self-organizing material or fine particle on substrate, and substrate manufactured by using such method 有权
标题翻译：将自组织材料或细颗粒固定在基材上的方法，以及使用这种方法制造的基材
公开(公告)号：US07829546B2
公开(公告)日：2010-11-09
申请号：US11819222
申请日：2007-06-26
申请人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
发明人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
IPC分类号： A61K31/70 , G01N33/53 , C12N5/00 , B32B15/04 , C21B15/04
CPC分类号： B01J19/0046 , B01J2219/00648 , B01J2219/00659 , B01J2219/00722 , B01J2219/00725 , B82Y30/00 , Y10T428/31678
摘要： A method for immobilizing a self-organizing material or fine particles on a substrate, and a substrate whereupon the self-organizing material or the fine particles are immobilized. More specifically, the method for immobilizing the fine particles including a nucleic acid (for instance, DNA or RNA) or a metal oxide on the substrate, and the substrate whereupon the nucleic acid (for example, DNA or RNA) or the metal oxide is immobilized.
摘要翻译：将自组织材料或细颗粒固定在基材上的方法，以及固定有自组织材料或微粒的基材。更具体地说，将含有核酸（例如DNA或RNA）或金属氧化物的微粒子固定在基板上的基板，以及核酸（例如DNA或RNA）或金属氧化物等的底物为固定化

4. 发明授权

US5236895A Production of oxide superconducting films by laser sputtering using N.sub.2 .sub.2 失效
标题翻译：使用N2O或NO2通过激光溅射生产氧化物超导膜
公开(公告)号：US5236895A
公开(公告)日：1993-08-17
申请号：US735175
申请日：1991-07-23
申请人： Yukio Nishiyama , Shichio Kawai , Tomoji Kawai , Hitoshi Tabata , Osamu Murata , Junzo Fujioka
发明人： Yukio Nishiyama , Shichio Kawai , Tomoji Kawai , Hitoshi Tabata , Osamu Murata , Junzo Fujioka
IPC分类号： C23C14/00 , C23C14/08 , H01L39/24
CPC分类号： C23C14/087 , C23C14/0021 , H01L39/2448 , Y10S505/73 , Y10S505/732
摘要： There is provided in a process for depositing a metal oxide superconducting film on a substrate by laser sputtering, the improvement which comprises carrying out the deposition of the metal oxide superconducting film in the presence of a gas having higher oxidation potential than oxygen.
摘要翻译：在通过激光溅射在基板上沉积金属氧化物超导膜的方法中提供了改进，其包括在具有比氧更高的氧化电势的气体的存在下进行金属氧化物超导膜的沉积。

5. 发明申请

US20080020214A1 Method for immobilizing self-organizing material or fine particle on substrate, and substrate manufactured by using such method 有权
标题翻译：将自组织材料或细颗粒固定在基材上的方法，以及使用这种方法制造的基材
公开(公告)号：US20080020214A1
公开(公告)日：2008-01-24
申请号：US11819222
申请日：2007-06-26
申请人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
发明人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
IPC分类号： B32B15/04 , B05D3/00 , B05D3/10
CPC分类号： B01J19/0046 , B01J2219/00648 , B01J2219/00659 , B01J2219/00722 , B01J2219/00725 , B82Y30/00 , Y10T428/31678
摘要： A method for immobilizing a self-organizing material or fine particles on a substrate, and a substrate whereupon the self-organizing material or the fine particles are immobilized. More specifically, the method for immobilizing the fine particles including a nucleic acid (for instance, DNA or RNA) or a metal oxide on the substrate, and the substrate whereupon the nucleic acid (for example, DNA or RNA) or the metal oxide is immobilized.
摘要翻译：将自组织材料或细颗粒固定在基材上的方法，以及固定有自组织材料或微粒的基材。更具体地说，将含有核酸（例如DNA或RNA）或金属氧化物的微粒子固定在基板上的基板，以及核酸（例如DNA或RNA）或金属氧化物等的底物为固定化

6. 发明授权

US06488908B1 Spinel ferrite thin film and method of manufacturing the same 有权
标题翻译：尖晶石型铁氧体薄膜及其制造方法
公开(公告)号：US06488908B1
公开(公告)日：2002-12-03
申请号：US09652011
申请日：2000-08-31
申请人： Tomoji Kawai , Hitoshi Tabata , Yuji Muraoka
发明人： Tomoji Kawai , Hitoshi Tabata , Yuji Muraoka
IPC分类号： C01G4900
CPC分类号： H01F41/205 , C23C14/08 , C30B23/002 , C30B23/02 , C30B29/26 , G11B7/00
摘要： A substrate and a target are disposed within a vacuum chamber, and an oxygen partial pressure within the vacuum chamber is set to 1×10−5 or less. Under this condition, a spinel ferrite thin film selected from the group consisting of compounds represented by the formula AE1+tFe2−2tTMtO4, where AE represents an alkaline earth metal or an alkali metal, TM represents a transition metal and t falls within a range of between 0.2 and 0.6, and compounds represented by the formula Zn1−xCoxFe2O4, where x falls within a range of between 0.2 and 0.7, is deposited on the substrate by laser beam deposition. The particular method makes it possible to provide a spinel ferrite thin film realizing a spin glass state under temperatures around or higher than room temperature and capable of controlling the spin state by light.
摘要翻译：将基板和靶设置在真空室内，真空室内的氧分压设定为1×10 -5以下。在这种条件下，选自由式AE1 + tFe2-2tTMtO4表示的化合物组成的组的尖晶石铁氧体薄膜，其中AE表示碱土金属或碱金属，TM表示过渡金属，t落在在0.2和0.6之间，通过激光束沉积在衬底上沉积由式Zn1-xCoxFe2O4表示的化合物，其中x落在0.2和0.7之间的范围内。具体的方法使得可以提供在大约或高于室温的温度下实现旋转玻璃态的尖晶石铁氧体薄膜，并且能够通过光控制自旋状态。

7. 发明授权

US08372785B2 Method for immobilizing self-organizing material or fine particle on substrate, and substrate manufactured by using such method 有权
标题翻译：将自组织材料或细颗粒固定在基材上的方法，以及使用这种方法制造的基材
公开(公告)号：US08372785B2
公开(公告)日：2013-02-12
申请号：US12923470
申请日：2010-09-23
申请人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
发明人： Tomoji Kawai , Hitoshi Tabata , Yoichi Otsuka , Fumihiko Yamada , Takuya Matsumoto
IPC分类号： C04B40/00 , C04B40/04 , C04B40/06 , C04B50/18 , B05D3/12
CPC分类号： B01J19/0046 , B01J2219/00648 , B01J2219/00659 , B01J2219/00722 , B01J2219/00725 , B82Y30/00 , Y10T428/31678
摘要： A method for immobilizing a self-organizing material or fine particles on a substrate, and a substrate whereupon the self-organizing material or the fine particles are immobilized. More specifically, the method for immobilizing the fine particles including a nucleic acid (for instance, DNA or RNA) or a metal oxide on the substrate, and the substrate whereupon the nucleic acid (for example, DNA or RNA) or the metal oxide is immobilized.
摘要翻译：将自组织材料或细颗粒固定在基材上的方法，以及固定有自组织材料或微粒的基材。更具体地说，将含有核酸（例如DNA或RNA）或金属氧化物的微粒子固定在基板上的基板，以及核酸（例如DNA或RNA）或金属氧化物等的底物为固定化

8. 发明申请

US20080050659A1 Method of Patterning Self-Organizing Material, Patterned Substrate of Self-Organizing Material and Method of Producing the Same, and Photomask Using Patterned Substrate of Self-Organizing Material 审中-公开
标题翻译：自组织材料的图案化方法，自组织材料的图案化基材及其制造方法以及使用自组织材料的图案化基材的光掩模
公开(公告)号：US20080050659A1
公开(公告)日：2008-02-28
申请号：US11663826
申请日：2005-09-29
申请人： Toshihito Ohtake , Ken-ichiro Nakamatsu , Shinji Matsui , Hitoshi Tabata , Tomoji Kawai
发明人： Toshihito Ohtake , Ken-ichiro Nakamatsu , Shinji Matsui , Hitoshi Tabata , Tomoji Kawai
IPC分类号： B29C49/00 , G03F1/00
CPC分类号： G03F7/20 , B82Y10/00 , B82Y40/00 , G01N21/553 , G01N21/554 , G03F7/0002 , H01L51/0022 , H01L2251/105 , Y10T428/24802
摘要： It is intended to provide a method of patterning a self-organizing material whereby a self-organizing material having a self-organization ability such as a nucleic acid can be aligned and immobilized in a desired manner on a substrate by using the imprint process, a patterned substrate of a self-organizing material and a method of producing the same, and a photomask. An immobilization layer containing a binder capable of binding to a self-organizing material is formed on a substrate. Then this immobilization layer is patterned by transferring an uneven pattern formed in a mold thereto by the imprint process. The self-organizing material is supplied onto the face having the uneven pattern of the immobilization layer transferred thereto. Thus, the self-organizing material is immobilized following the uneven pattern of the immobilization layer owing to the self-organization ability of the material per se and the binding ability of the binder contained in the immobilization layer.
摘要翻译：旨在提供一种图案化自组织材料的方法，由此具有自组织能力的自组织材料如核酸可以通过使用压印方法以所需的方式在基板上对准和固定，自组织材料的图案化衬底及其制造方法，以及光掩模。在基材上形成含有能够结合自组织材料的粘合剂的固定层。然后通过压印工艺将形成在模具中的不均匀图案转印到该固定层上。将自组织材料供给到转印有固定层的不均匀图案的面上。因此，由于材料本身的自组织能力和固定化层中所含的粘合剂的结合能力，自组织材料被固定在固定层的不均匀图案之后。

9. 发明授权

US5354732A Pyroelectric IR sensor using an oxide superconductor upper electrode 失效
标题翻译：使用氧化物超导体上电极的热释电红外传感器
公开(公告)号：US5354732A
公开(公告)日：1994-10-11
申请号：US997187
申请日：1992-12-28
申请人： Hitoshi Tabata , Osamu Murata , Junzo Fujioka , Shunichi Minakata , Tomoji Kawai , Shichio Kawai
发明人： Hitoshi Tabata , Osamu Murata , Junzo Fujioka , Shunichi Minakata , Tomoji Kawai , Shichio Kawai
IPC分类号： G01J5/34 , H01L37/02 , H01L39/02 , H01L39/22 , H01L41/09 , G01J5/00 , H01L39/00
CPC分类号： H01L37/02 , G01J5/34 , Y10S505/701
摘要： An electrode in an electronic device using a functional thin film facilitates epitaxial growth during the functional material film-forming process and prevents the generation of cracks due to thermal stress. An oxide superconductor is using as an electrode material, thereby forming the crystal structure identical with the crystal structure of a functional thin film, and rendering their lattice constant and coefficient of thermal expansion close to the lattice constant and coefficient of thermal expansion functional thin film. According to the electrode material, high electric conductivity, low thermal conductivity and large thermal absorption coefficient characteristics can also be obtained.
摘要翻译：使用功能性薄膜的电子装置中的电极在功能性材料成膜过程中促进外延生长，并且防止由于热应力而产生裂纹。使用氧化物超导体作为电极材料，由此形成与功能性薄膜的晶体结构相同的晶体结构，使其晶格常数和热膨胀系数接近晶格常数和热膨胀功能薄膜的系数。根据电极材料，也可以获得高导电性，低导热性和大的热吸收系数特性。

10. 发明授权

US09429845B2 Method of patterning self-organizing material, patterned substrate of self-organizing material and method of producing the same, and photomask using patterned substrate of self-organizing material 有权
标题翻译：图案化自组织材料的方法，自组织材料的图案化衬底及其制造方法，以及使用自组织材料的图案衬底的光掩模
公开(公告)号：US09429845B2
公开(公告)日：2016-08-30
申请号：US13898105
申请日：2013-05-20
申请人： Toshihito Ohtake , Ken-ichiro Nakamatsu , Shinji Matsui , Hitoshi Tabata , Tomoji Kawai
发明人： Toshihito Ohtake , Ken-ichiro Nakamatsu , Shinji Matsui , Hitoshi Tabata , Tomoji Kawai
IPC分类号： B82Y40/00 , C12Q1/68 , G03F7/20 , B82Y10/00 , G03F7/00 , H01L51/00 , G01N21/552
CPC分类号： G03F7/20 , B82Y10/00 , B82Y40/00 , G01N21/553 , G01N21/554 , G03F7/0002 , H01L51/0022 , H01L2251/105 , Y10T428/24802
摘要： A method for performing micro fabrication includes using, as a photomask, a self-organizing material-patterned substrate which is soluble in an organic solvent. A method for emitting light includes emitting the light in a pattern of a nucleic acid which is a self-organizing material immobilized on a self-organizing material-patterned substrate. An immobilization layer containing a binding material capable of binding to a self-organizing material is formed on a substrate. Then this immobilization layer is patterned by transferring a protrusion and recess pattern formed in a mold thereto by the imprint process. The self-organizing material is supplied onto the side having the protrusion and recess pattern of the immobilization layer transferred thereto. Thus, the self-organizing material is immobilized according to the protrusion and recess pattern of the immobilization layer owning to the self-organizing ability of the material per se and the binding ability of the binding material contained in the immobilization layer.
摘要翻译：用于执行微制造的方法包括使用可溶于有机溶剂的自组织材料图案化衬底作为光掩模。用于发射光的方法包括以固定在自组织材料图案化衬底上的自组织材料的核酸图案发射光。在基板上形成含有能够结合自组织材料的粘结材料的固定层。然后通过压印处理将形成在模具中的突起和凹陷图案转印到该固定层上。将自组织材料供给到具有转移到其上的固定层的突起和凹部图案的一侧。因此，自组织材料根据固定层的突起和凹陷图案固定，具有材料本身的自组织能力和固定层中所含的粘合材料的结合能力。

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