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1. 发明授权

US07088107B2 Circuit pattern inspection instrument and pattern inspection method 失效
标题翻译：电路图形检测仪和图案检验方法
公开(公告)号：US07088107B2
公开(公告)日：2006-08-08
申请号：US10536996
申请日：2003-11-28
申请人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
发明人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
IPC分类号： G01R31/02
CPC分类号： G01R31/2808
摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns (15a, 15b) each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns (15a, 15b) are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus having first and second detection means (20, 30) each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot (80) operable to move each of the first and second detection means (20, 30) across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions.
摘要翻译：公开了一种电路图案检查装置，用于检查电路板的导电图案，其包括第一和第二梳状导电图案（15a，15b），每个梳状导电图案具有彼此大致平行的多个端子部分，将所述端子部的各个锚定端部连接在一起，其中，所述第一梳状导电图案的端子部分相对于所述第二梳状导电图案的端子部分交替布置，并且所述第一第二梳状导电图案 15a，15b）分别适于提供交流检测信号并接地。电路图案检查装置具有第一和第二检测装置（20,30），每个检测装置具有用于检测来自第一和第二梳状导电图案的信号的检测电极，以及标量机器人（80），其可操作以使第一和第二梳状导电图案中的每一个移动和第二检测装置（20,30），同时允许它们与端子部分电容耦合。

2. 发明申请

US20060055413A1 Circuit pattern inspection instrument and pattern inspection method 失效
标题翻译：电路图形检测仪和图案检验方法
公开(公告)号：US20060055413A1
公开(公告)日：2006-03-16
申请号：US10536996
申请日：2003-11-28
申请人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
发明人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
IPC分类号： G01R31/28
CPC分类号： G01R31/2808
摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns 15a, 15b each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns 15a, 15b are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus comprises first and second detection means 20, 30 each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot 80 operable to move each of the first and second detection means 20, 30 across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions. The first and second detection means 20, 30 generates detection signals allowing the presence of a defect in each of the terminal portions to be determined based thereon. The inspection apparatus of the present invention can inspect a defect in a circuit pattern reliably and readily.
摘要翻译：公开了一种电路图案检查装置，用于检查电路板的导电图案，该电路图案包括具有彼此大致平行布置的多个端子部分的第一和第二梳状导电图案15a，15b以及连接各自的基部所述端子部分的锚定端部在一起，其中所述第一梳状导电图案的端子部分相对于所述第二梳状导电图案的端子部分交替布置，并且所述第一第二梳状导电图案15a， 15b分别适应于被提供有交流检测信号并接地。电路图案检查装置包括第一和第二检测装置20,30，每个检测装置具有用于检测来自第一和第二梳状导电图案的信号的检测电极，以及标量机器人80，其可操作以使第一和第二检测装置 20,30跨过公共端子部分，同时允许它们与端子部分电容耦合。第一和第二检测装置20,30产生允许基于每个端子部分存在缺陷的检测信号。本发明的检查装置可以可靠且容易地检查电路图案中的缺陷。

3. 发明申请

US20060043153A1 Circuit pattern inspection device and circuit pattern inspection method 审中-公开
标题翻译：电路图形检测装置及电路图案检验方法
公开(公告)号：US20060043153A1
公开(公告)日：2006-03-02
申请号：US10536997
申请日：2003-11-28
申请人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
发明人： Shuji Yamaoka , Hiroshi Hamori , Shogo Ishioka
IPC分类号： B23Q15/00
CPC分类号： G01R31/2805
摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a plurality of target patterns 15 arrange in lines at least at first and second opposite ends thereof. The inspection apparatus comprises a supply electrode 35 for supplying an inspection signal and a sensor electrode 25 for detecting a detection signal. Each of the supply and sensor electrodes 35, 25 are adapted to be moved across each of the target patterns with a given gap relative to each of the target patterns 15 in such a manner as to allow the inspection signal supplied from the supply electrode 35 to each of the target patterns 15 through a capacitive coupling, to be detected by the sensor electrode capacitively coupled with each of the target patterns 15, so that the presence of disconnection in the target pattern is determined when the detection signal has a value less than a given lower limit, and the presence of short circuit in the target pattern is determined when the detection signal has a value greater than a given upper limit. According to the inspection apparatus of the present invention, the presence of defect in a circuit board can be inspected reliably and readily.
摘要翻译：公开了一种电路图案检查装置，用于至少在其第一和第二相对端检查排成行的多个目标图案15。检查装置包括用于提供检查信号的供给电极35和用于检测检测信号的传感器电极25。供电传感器电极35和传感器电极25中的每一个适于以相对于每个目标图案15的给定间隙移动到每个目标图案上，以允许从供电电极35提供的检查信号每个目标图案15通过电容耦合，由与每个目标图案15电容耦合的传感器电极检测，使得当检测信号的值小于一个时，确定目标图案中的断开的存在给定下限，并且当检测信号具有大于给定上限的值时，确定目标图案中的短路的存在。根据本发明的检查装置，可以可靠且容易地检查电路板中的缺陷的存在。

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