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1. 发明授权

US07261746B2 Intermediate product manufacturing apparatus, and manufacturing method 有权
标题翻译：中间产品制造装置及制造方法
公开(公告)号：US07261746B2
公开(公告)日：2007-08-28
申请号：US10814654
申请日：2004-03-31
申请人： Shuji Tanaka , Yoshitake Kobayashi , Hisashi Fujimura
发明人： Shuji Tanaka , Yoshitake Kobayashi , Hisashi Fujimura
IPC分类号： H01L21/00 , H01L21/64
CPC分类号： H01L21/67276 , Y10T29/41
摘要： A manufacturing apparatus is provided comprising: inter-process carrying means for carrying a container between the process modules in a container unit, the container being capable of storing a plurality of intermediate products therein; intra-process carrying means for removing the intermediate products from the container and carrying the intermediate products within each process module in a single product state; and a plurality of processing means for performing the plurality of processes, respectively, within each process module, wherein the plurality of processing means are arranged substantially in the carrying direction of the intermediate products in accordance with the order of processes to be performed on the intermediate products, without arranging a plurality of processing means for performing the same kinds of processes on the intermediate products in a group.
摘要翻译：一种制造装置，其特征在于包括：用于在容器单元中的处理模块之间承载容器的处理间承载装置，所述容器能够在其中存储多个中间产品; 用于从容器中移出中间产品并在单个产品状态下在每个处理模块内承载中间产品的工艺内承载装置; 以及多个处理装置，用于分别在每个处理模块内执行多个处理，其中多个处理装置基本上按照要对中间产品执行的处理的顺序排列在中间产品的传送方向上产品，而不设置用于对组中的中间产品执行相同种类的处理的多个处理装置。

2. 发明授权

US07222721B2 Transferring apparatus, carrying apparatus, and transferring method 有权
标题翻译：转运装置，运送装置和转运方法
公开(公告)号：US07222721B2
公开(公告)日：2007-05-29
申请号：US11368061
申请日：2006-03-03
申请人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
发明人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
IPC分类号： B65G43/10
CPC分类号： H01L21/67736 , B65G37/02 , H01L21/67766
摘要： A transferring apparatus is provided between a plurality of carrying apparatuses, each carrying apparatus comprising support means for supporting carried products Wf, guide means for controlling the moving direction of the support means, the guide means being provided along processing apparatuses for processing the carried products Wf, and moving means for moving the support means along the guide means. The transferring apparatus includes synchronization control means for synchronizing the moving means of the one carrying apparatus with the moving means of the other carrying apparatus; and at least one hand-over means for receiving the carried products Wf from the support means of the one carrying apparatus and handing over the carried products Wf to the support means of the other carrying apparatus.
摘要翻译：传送装置设置在多个搬运装置之间，每个搬运装置包括用于支撑被携带物品Wf的支撑装置，用于控制支撑装置的移动方向的引导装置，沿着处理装置设置的引导装置，用于处理被承载物品Wf 以及用于沿着引导装置移动支撑装置的移动装置。传送装置包括同步控制装置，用于使一个传送装置的移动装置与另一个传送装置的移动装置同步; 以及至少一个切换装置，用于从所述一个运送装置的支撑装置接收所携带的产品Wf，并将所携带的产品Wf移交到另一个运送装置的支撑装置。

3. 发明授权

US07051863B2 Transferring apparatus, carrying apparatus, and transferring method 有权
标题翻译：转运装置，运送装置和转运方法
公开(公告)号：US07051863B2
公开(公告)日：2006-05-30
申请号：US10798975
申请日：2004-03-11
申请人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
发明人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
IPC分类号： B65G43/10
CPC分类号： H01L21/67736 , B65G37/02 , H01L21/67766
摘要： A transferring apparatus is provided between a plurality of carrying apparatuses, each carrying apparatus comprising support means for supporting carried products Wf, guide means for controlling the moving direction of the support means, the guide means being provided along processing apparatuses for processing the carried products Wf, and moving means for moving the support means along the guide means. The transferring apparatus includes synchronization control means for synchronizing the moving means of the one carrying apparatus with the moving means of the other carrying apparatus; and at least one hand-over means for receiving the carried products Wf from the support means of the one carrying apparatus and handing over the carried products Wf to the support means of the other carrying apparatus.
摘要翻译：传送装置设置在多个搬运装置之间，每个搬运装置包括用于支撑被携带物品Wf的支撑装置，用于控制支撑装置的移动方向的引导装置，沿着处理装置设置的引导装置，用于处理被承载物品Wf 以及用于沿着引导装置移动支撑装置的移动装置。传送装置包括同步控制装置，用于使一个传送装置的移动装置与另一个传送装置的移动装置同步; 以及至少一个切换装置，用于从所述一个运送装置的支撑装置接收所携带的产品Wf，并将所携带的产品Wf移交到另一个运送装置的支撑装置。

4. 发明授权

US07182201B2 Wafer carrying apparatus and wafer carrying method 有权
标题翻译：晶圆承载装置和晶片承载方式
公开(公告)号：US07182201B2
公开(公告)日：2007-02-27
申请号：US10792665
申请日：2004-03-03
申请人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
发明人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
IPC分类号： B65G49/06
CPC分类号： H01L21/67742 , H01L21/67712 , H01L21/67718 , Y10S414/135
摘要： A wafer carrying apparatus 20 for carrying intermediate products comprises: a conveyer 40 for carrying the intermediate products in the carrying direction; and a plurality of platforms 41 arranged in the conveyer 40 along the carrying direction of the intermediate products on the conveyer 40, each platform 41 being capable of mounting at least one intermediate product at a position in a direction crossing the carrying direction of the intermediate products on the conveyer 40.
摘要翻译：用于承载中间产品的晶片承载装置20包括：用于在运送方向上运送中间产品的输送机40; 以及沿输送机40上的中间产品的运送方向布置在输送机40中的多个平台41，每个平台41能够在与中间产品的运送方向交叉的方向上的位置处安装至少一个中间产品在输送机40上。

5. 发明授权

US07108121B2 Intermediate product transferring apparatus and carrying system having the intermediate product transferring apparatus 有权
标题翻译：具有中间产品传送装置的中间产品传送装置和承载系统
公开(公告)号：US07108121B2
公开(公告)日：2006-09-19
申请号：US10793648
申请日：2004-03-04
申请人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi
发明人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi
IPC分类号： B65G37/00 , H01L21/68
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67778 , H01L21/68707
摘要： An intermediate product transferring apparatus is provided for transferring an intermediate product W between a single-wafer carrying line for carrying the intermediate product W in a single-wafer manner and a manufacturing apparatus for manufacturing the intermediate product W includes a transferring robot for transferring the intermediate product W between the single-wafer carrying line and the manufacturing apparatus; and a buffer for temporarily storing the intermediate product W which is transferred from the single-wafer carrying line by the transferring robot or the intermediate product W which is processed by the manufacturing apparatus.
摘要翻译：提供了一种中间产品转印装置，用于在单晶片方式的用于承载中间产品W的单晶片承载线之间转移中间产品W和用于制造中间产品的制造装置W包括用于转移中间产品W的中间产品W 单晶片承载线与制造装置之间的产品W; 以及缓冲器，用于临时存储由传送机器人或由制造设备处理的中间产品W从单晶片承载线传送的中间产品W.

6. 发明申请

US20060163037A1 Transferring apparatus, carrying apparatus, and transferring method 有权
公开(公告)号：US20060163037A1
公开(公告)日：2006-07-27
申请号：US11368061
申请日：2006-03-03
申请人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
发明人： Hisashi Fujimura , Shuji Tanaka , Yoshitake Kobayashi , Yasutsugu Aoki
IPC分类号： B65G43/10
CPC分类号： H01L21/67736 , B65G37/02 , H01L21/67766
摘要： A transferring apparatus is provided between a plurality of carrying apparatuses, each carrying apparatus comprising support means for supporting carried products Wf, guide means for controlling the moving direction of the support means, the guide means being provided along processing apparatuses for processing the carried products Wf, and moving means for moving the support means along the guide means. The transferring apparatus includes synchronization control means for synchronizing the moving means of the one carrying apparatus with the moving means of the other carrying apparatus; and at least one hand-over means for receiving the carried products Wf from the support means of the one carrying apparatus and handing over the carried products Wf to the support means of the other carrying apparatus.

7. 发明授权

US07032739B2 Intermediate product carrying apparatus, and intermediate product carrying method 失效
标题翻译：中间产品运输装置和中间产品运输方式
公开(公告)号：US07032739B2
公开(公告)日：2006-04-25
申请号：US10813569
申请日：2004-03-30
申请人： Shuji Tanaka , Yoshitake Kobayashi , Hisashi Fujimura , Yasutsugu Aoki
发明人： Shuji Tanaka , Yoshitake Kobayashi , Hisashi Fujimura , Yasutsugu Aoki
IPC分类号： B65G29/00
CPC分类号： H01L21/67727 , H01L21/67736 , H01L21/67766 , Y10S414/135 , Y10S414/137
摘要： An intermediate product carrying apparatus is provided for loading a carrier, which is carried between a plurality of process systems and stores a plurality of intermediate products, into the corresponding process system, and then transferring the plurality of intermediate products of the carrier to a single wafer carrying conveyer, which carries the intermediate products in a single wafer state to an intermediate product manufacturing apparatus provided in the process system. The intermediate product carrying apparatus comprising: an intermediate product transfer means provided in the process system, for loading the carrier, which is carried between process systems and which stores the plurality of intermediate products, into the corresponding process system, and transferring the intermediate products.
摘要翻译：提供了一种中间产品运送装置，用于将承载在多个处理系统之间并将多个中间产品储存在相应的处理系统中的载体，然后将载体的多个中间产物转移到单个晶片将单个晶片状态的中间产品运送到设置在处理系统中的中间产品制造装置。所述中间产品运送装置包括：中间产品传送装置，设置在所述处理系统中，用于将承载在处理系统之间并将多个中间产品存储在其中的载体装载到相应的处理系统中并传送中间产品。

8. 发明授权

US07308757B2 Intermediate product manufacturing apparatus, and intermediate product manufacturing method 有权
标题翻译：中间产品制造装置和中间产品制造方法
公开(公告)号：US07308757B2
公开(公告)日：2007-12-18
申请号：US10794778
申请日：2004-03-05
申请人： Keiji Fukuhara , Yasutsugu Aoki , Yoshitake Kobayashi , Hisashi Fujimura
发明人： Keiji Fukuhara , Yasutsugu Aoki , Yoshitake Kobayashi , Hisashi Fujimura
IPC分类号： H01L21/673 , H01L21/677
CPC分类号： H01L21/67727 , H01L21/67736 , H01L21/67766 , Y10T29/5313 , Y10T29/53178 , Y10T29/53187 , Y10T29/53261
摘要： An intermediate product manufacturing apparatus for carrying intermediate products and processing the intermediate products with a plurality of processing apparatuses is provided, the apparatus comprising: a plurality of carrying means for carrying the intermediate products to the processing apparatuses; a common processing apparatus provided between the plurality of carrying means, for carrying out a common process on the intermediate products carried by the carrying means; and intermediate product transfer sections provided between the plurality of carrying means, for transferring the intermediate products between the common processing apparatus and the carrying means.
摘要翻译：提供一种用于承载中间产品并用多个处理装置处理中间产品的中间产品制造装置，该装置包括：多个承载装置，用于将中间产品运送到处理装置; 一种通常的处理装置，设置在多个承载装置之间，用于对由承载装置承载的中间产品执行共同的处理; 以及设置在所述多个运送装置之间的用于在所述公共处理装置和所述运送装置之间传送所述中间产品的中间产品转运部。

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