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1. 发明申请

US20130300854A1 CHARGED PARTICLE MICROSCOPE AND MEASUREMENT IMAGE CORRECTION METHOD THEREOF 有权
标题翻译：充电颗粒显微镜及其测量图像校正方法
公开(公告)号：US20130300854A1
公开(公告)日：2013-11-14
申请号：US13981326
申请日：2011-11-02
申请人： Shuangqi Dong , Norio Sato , Susumu Koyama
发明人： Shuangqi Dong , Norio Sato , Susumu Koyama
IPC分类号： H04N5/217
CPC分类号： H04N5/217 , H01J37/222 , H01J37/26 , H01J2237/153
摘要： A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation image, making corrections by comparing the shape of the observation image with the shape of the correction reference image, and reducing distortion in the observation images. The reference image for distortion correction is measured at the same position and magnification as when acquiring images for observation. In order to reduce effects from drift, the reference image is at this time measured within a shorter time than the essential observation image. The shape of the observation image is corrected by comparing the shapes of the reference image and observation image, and correcting the shape of the observation image to match the reference image.
摘要翻译：带电粒子显微镜通过在比观察图像更短的时间内测量校正参考图像来校正由采样阶段的漂移效应引起的图像中的失真，通过将观察图像的形状与校正基准的形状进行比较来进行校正图像，减少观察图像的失真。与获取观察图像时相同的位置和倍率测量用于失真校正的参考图像。为了减少漂移的影响，此时在比基本观察图像更短的时间内测量参考图像。通过比较参考图像和观察图像的形状以及校正观察图像的形状以匹配参考图像来校正观察图像的形状。

2. 发明授权

US08957959B2 Charged particle microscope and measurement image correction method thereof 有权
标题翻译：带电粒子显微镜及其测量图像校正方法
公开(公告)号：US08957959B2
公开(公告)日：2015-02-17
申请号：US13981326
申请日：2011-11-02
申请人： Shuangqi Dong , Norio Sato , Susumu Koyama
发明人： Shuangqi Dong , Norio Sato , Susumu Koyama
IPC分类号： H01J37/26 , H04N5/217 , H01J37/22 , G21K7/00
CPC分类号： H04N5/217 , H01J37/222 , H01J37/26 , H01J2237/153
摘要： A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation image, making corrections by comparing the shape of the observation image with the shape of the correction reference image, and reducing distortion in the observation images. The reference image for distortion correction is measured at the same position and magnification as when acquiring images for observation. In order to reduce effects from drift, the reference image is at this time measured within a shorter time than the essential observation image. The shape of the observation image is corrected by comparing the shapes of the reference image and observation image, and correcting the shape of the observation image to match the reference image.
摘要翻译：带电粒子显微镜通过在比观察图像更短的时间内测量校正参考图像来校正由采样阶段的漂移效应引起的图像中的失真，通过将观察图像的形状与校正基准的形状进行比较来进行校正图像，减少观察图像的失真。与获取观察图像时相同的位置和倍率测量用于失真校正的参考图像。为了减少漂移的影响，此时在比基本观察图像更短的时间内测量参考图像。通过比较参考图像和观察图像的形状以及校正观察图像的形状以匹配参考图像来校正观察图像的形状。

3. 发明申请

US20120045115A1 DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD 审中-公开
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US20120045115A1
公开(公告)日：2012-02-23
申请号：US13266050
申请日：2010-04-13
申请人： Shuangqi Dong , Takashi Hiroi , Takeyuki Yoshida
发明人： Shuangqi Dong , Takashi Hiroi , Takeyuki Yoshida
IPC分类号： G06K9/00
CPC分类号： G01N21/95607 , G06T7/001 , G06T2207/10024 , G06T2207/10061 , G06T2207/30148
摘要： Although there is a method for optimizing a threshold for each of regions to be inspected of an acquired detected image, only a single threshold is applied to a single detected image. Thus, when being included in a single image, an insignificant defect is detected at the same sensitivity level as that for a significant defect. The invention proposes a mechanism in which multiple sensitivity regions are set in a single inspection region, and thereby a defect only in a region where a DOI (Defect of interesting) is present in the single inspection region can be detected while being discriminated from the other ones. Specifically, the multiple sensitivity regions are set based on features of an image in the inspection region, and set sensitivities for the respective sensitivity regions are applied to a detected image, a difference image or a determination threshold for a defect determination unit.
摘要翻译：虽然存在用于优化要被检查的所获取的检测图像的每个区域的阈值的方法，但是仅将单个阈值应用于单个检测到的图像。因此，当被包括在单个图像中时，在与显着缺陷相同的灵敏度水平下检测到不显着的缺陷。本发明提出了在单个检查区域中设置多个灵敏度区域的机制，从而可以检测在单个检查区域中存在DOI（有趣缺陷）的区域中的缺陷，同时与另一个区别那些。具体地，基于检查区域中的图像的特征来设置多个灵敏度区域，并且将针对各个灵敏度区域设置的灵敏度应用于检测图像，差分图像或缺陷确定单元的确定阈值。

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