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    • 1. 发明授权
    • Apparatus for emitting a beam to a sample used for manufacturing a semiconducor device
    • 用于向用于制造半导体器件的样品发射光束的装置
    • US06239443B1
    • 2001-05-29
    • US09040286
    • 1998-03-18
    • Toru TojoRyoichi HiranoSusumu SaitoHitoshi SuzukiKazuo AbeShinya Watanabe
    • Toru TojoRyoichi HiranoSusumu SaitoHitoshi SuzukiKazuo AbeShinya Watanabe
    • G01N2186
    • G03F9/7049
    • An apparatus for emitting a beam to a sample used for manufacturing a semiconductor device in order to process the sample, includes a chamber having an opening, a moving mechanism provided in the chamber, for moving the sample in X-, Y- and Z-axis directions, and a beam emitting system associated with the opening of the chamber, for emitting a beam to the sample in the chamber. The apparatus further includes an optical position detector for guiding a coherent light beam into the chamber and detecting a light beam output from the chamber. The optical position detector has light beam generating unit for generating a coherent light beam to be emitted to the sample, light-receiving unit for receiving a light beam from a surface of the sample, and converting unit for converting a signal output from the light-receiving unit into signals in the X-, Y- and Z-axis directions.
    • 用于向用于制造半导体器件的样品发射光束以便处理样品的装置包括具有开口的腔室,设置在腔室中的移动机构,用于将样品移动到X,Y和Z轴中, 以及与室的开口相关联的光束发射系统,用于将光束发射到室中的样品。 该装置还包括光学位置检测器,用于将相干光束引导到腔室中并检测从腔室输出的光束。 光学位置检测器具有用于产生要发射到样品的相干光束的光束产生单元,用于接收来自样品表面的光束的光接收单元,以及用于转换从发光元件输出的信号的转换单元, 接收单元进入X,Y和Z轴方向的信号。
    • 2. 发明授权
    • Position measuring apparatus
    • 位置测量仪
    • US6080990A
    • 2000-06-27
    • US40391
    • 1998-03-18
    • Shinya WatanabeHitoshi SuzukiKazuo AbeSusumu SaitoToru TojoRyoichi Hirano
    • Shinya WatanabeHitoshi SuzukiKazuo AbeSusumu SaitoToru TojoRyoichi Hirano
    • G01D5/38G01B11/00G01B11/03G03F9/00H01L21/027G01B11/14
    • G03F9/7026G03F9/7049G03F9/7065G03F9/7088
    • A position measuring apparatus includes a light source 1, an illumination optical system 100, a light-reception optical system 400 and a light-receiving unit 500. Illuminating beam emitted from the light source 1 is diffracted by a two-dimensional pattern on an object 10, and then enters the light-reception optical system 400. The light-receiving unit 500 receives diffracted lights consisting of a combination of a higher-order diffracted light appearing on the object side for the zero-order diffracted light in the receive diffracted lights with a zero-order diffracted light different in frequency from the higher-order diffracted light and another combination of higher-order diffracted lights different in frequency from one another and appearing on the object side for the zero-order diffracted light, thereby forming a position measuring interference measurement signal within the plane including the object. A signal processing unit is adapted to measure the position of the object 10 based on the phase of the position measuring interference measurement signal.
    • 位置测量装置包括光源1,照明光学系统100,光接收光学系统400和光接收单元500.从光源1发射的照明光束被物体上的二维图案衍射 光接收单元500接收由接收衍射光中的零级衍射光在物体侧出现的高阶衍射光的组合构成的衍射光 具有与高次衍射光不同的零级衍射光和频率彼此不同的高阶衍射光的另一组合,并且在物体侧出现零级衍射光,从而形成位置 在包括物体的平面内测量干涉测量信号。 信号处理单元适于基于位置测量干涉测量信号的相位来测量对象10的位置。
    • 4. 发明申请
    • PLANAR LIGHTWAVE CIRCUIT AND OPTICAL RECEIVER
    • 平面灯电路和光接收器
    • US20140212137A1
    • 2014-07-31
    • US14348301
    • 2012-09-13
    • Shinya Watanabe
    • Shinya Watanabe
    • H04B10/69H04J14/06
    • H04B10/697G02B6/2773G02B6/4215H04B10/615H04J14/06
    • A planar lightwave circuit and an optical receiver which reduce degradation in signal quality is provided.A planar lightwave circuit includes: a substrate with a straight groove formed therein; a signal light input port which is formed in the substrate and receives signal light; a first planar filter part which is fitted into the groove and separates the signal light into a signal light component including a first polarization state and that including a second polarization state; a second planar filter part which is fitted into the groove and separates the local oscillator light into a local oscillator light component including the first polarization state and that including the second polarization state; a first interference part formed in the substrate; a second interference part which is formed on a side of the substrate opposite to the side of the first interference part across the groove; a first waveguide which is connected to the signal light input port and also to a reflection surface of the first planar filter part; a second and a third waveguide; a fourth waveguide which is connected to the local oscillator light input port and also to a reflection surface of the second planar filter part; and a fifth and a sixth waveguide.
    • 提供了降低信号质量降低的平面光波电路和光接收器。 平面光波电路包括:形成有直槽的基板; 信号光输入端口,其形成在所述基板中并接收信号光; 第一平面过滤器部件,其装配到所述槽中,并将所述信号光分离成包括第一偏振状态并且包括第二偏振状态的信号光分量; 第二平面过滤器部件,其装配到所述凹槽中,并将所述本地振荡器光分离成包括所述第一偏振状态并且包括所述第二偏振状态的本地振荡器光分量; 形成在所述基板中的第一干涉部; 第二干涉部,其形成在与所述第一干涉部的与所述凹槽的侧面相反的一侧上; 第一波导,其连接到信号光输入端口,并且还连接到第一平面滤波器部分的反射表面; 第二和第三波导; 第四波导,其连接到本地振荡器光输入端口,并且还连接到第二平面滤波器部分的反射表面; 以及第五和第六波导。
    • 5. 发明授权
    • Image formation device, image formation method and non-transitory storage medium storing image formation program
    • 图像形成装置,图像形成方法和存储图像形成程序的非暂时性存储介质
    • US08639138B2
    • 2014-01-28
    • US13112703
    • 2011-05-20
    • Tetsuya SonodaShinya WatanabeHirotaka Udagawa
    • Tetsuya SonodaShinya WatanabeHirotaka Udagawa
    • G03G15/00G03G15/20
    • G03G15/6529G03G15/6594G03G2215/00514G03G2215/00751G03G2215/00945G03G2215/00949
    • An image formation device includes a receiving section, a formation section, a fixing section, a switching section, and a controller. The receiving section receives image formation data including image data, and sheet data which includes designations of a sheet and a corresponding fixing pressure. The formation section forms a toner image on the sheet. The fixing section fixes the toner image on the sheet. The switching section switches the fixing pressure between a first or second fixing pressure. When the fixing pressure is switched to the second fixing pressure and the fixing pressure designated by the sheet data is the first fixing pressure, the controller performs a mandatory image formation that includes a low-speed control that conveys the sheet at a speed lower than that for the first fixing pressure, and/or a toner suppression control that performs image formation with a smaller amount of toner than in normal.
    • 图像形成装置包括接收部分,形成部分,固定部分,切换部分和控制器。 接收部分接收包括图像数据的图像形成数据和包括纸张的指定和相应的定影压力的纸张数据。 形成部分在片材上形成调色剂图像。 固定部分将调色剂图像固定在片材上。 切换部分在第一或第二固定压力之间切换固定压力。 当定影压力切换到第二定影压力并且由片材数据指定的定影压力是第一定影压力时,控制器执行强制性图像形成,其包括以低于该速度的速度传送纸张的低速控制的低速控制 用于第一定影压力和/或调色剂抑制控制,其以比正常情况更少量的调色剂进行图像形成。
    • 6. 发明申请
    • OPTICAL WAVEGUIDE DEVICE AND METHOD OF MANUFACTURING THEREOF
    • 光波导装置及其制造方法
    • US20120002931A1
    • 2012-01-05
    • US13256168
    • 2010-03-15
    • Shinya Watanabe
    • Shinya Watanabe
    • G02B6/02G02B6/136
    • G02B6/423
    • In an optical waveguide device of the present invention, optical element mount (17) includes first base block (19a) for supporting first optical element (18a) and second base block (19b) for supporting second optical element (18b) that has an active layer depth smaller than that of first optical element (18a). Second base block (19b) is formed from stacks of upper clad layers whose number of stacks is larger than that of first base block (19a). Difference (h1) in height between the first and second base blocks is equal to difference (d1−d2) in active layer depth between the first and second optical elements.
    • 在本发明的光波导装置中,光学元件安装件(17)包括用于支撑第一光学元件(18a)的第一基座块(19a)和用于支撑第二光学元件(18b)的第二基座块(19b) 层深度小于第一光学元件(18a)的深度。 第二基块(19b)由堆叠的堆叠数量大于第一基块(19a)的堆叠构成。 第一和第二基本块之间的高度差(h1)等于第一和第二光学元件之间有效层深度的差(d1-d2)。
    • 7. 发明授权
    • Optical waveguide device and manufacturing method thereof
    • 光波导器件及其制造方法
    • US08036507B2
    • 2011-10-11
    • US12501066
    • 2009-07-10
    • Shinya Watanabe
    • Shinya Watanabe
    • G02B6/26
    • G02B6/12004G02B6/423
    • An optical waveguide device includes: a substrate; an optical element arranged on the substrate; and an optical circuit part having an optical waveguide formed on the substrate. The optical circuit part includes: a core whose optical axis is matched with the optical element; and a dummy core arranged on a same layer to the core and exposed on a side being not opposed to the optical element when the optical element is arranged on the substrate. The relative position between the optical waveguide and the optical element can be recognized by observing the dummy core. The planar shape of the optical circuit has a convex portion. The width of the convex portion and the width of the optical element are same in the opposing edge face where the optical element and the core is opposed to one another.
    • 光波导装置包括:基板; 布置在所述基板上的光学元件; 以及在该基板上形成有光波导的光电路部。 光电路部分包括:光轴与光学元件匹配的芯; 以及当光学元件布置在基板上时,与核心布置在同一层上并且在与光学元件不相对的一侧上露出的伪芯。 可以通过观察虚拟核心来识别光波导与光学元件之间的相对位置。 光电路的平面形状具有凸部。 在光学元件和芯彼此相对的相对边缘面中,凸部的宽度和光学元件的宽度相同。
    • 8. 发明授权
    • Method for preparing optically active compound
    • 光学活性化合物的制备方法
    • US07846701B2
    • 2010-12-07
    • US11667688
    • 2005-10-31
    • Shigeru TanakaShinya WatanabeKen-ichi YamamotoHiroyuki Matsuda
    • Shigeru TanakaShinya WatanabeKen-ichi YamamotoHiroyuki Matsuda
    • C12P7/26
    • C12P7/26C12P41/003
    • According to the present invention, there is provided a method for preparing an optically active compound, characterized in that said method comprises permitting a mixture of optical isomers relative to the carbon atom in the β-position in relation to the carbon atom bound to an esterified hydroxy group of an enol ester to hydrolyse either one optical isomer preferentially in the presence of an enzyme and allowing the carbonyl compound resulting from such hydrolysis to enrich the proportion of its isomer having either one configuration in the β-position in relation to the carbonyl group or allowing the enol ester left non-hydrolyzed to enrich the proportion of its isomer having either one configuration on the carbon atom in the β-position in relation to the carbon atom to which the esterified hydroxyl group bonds.
    • 根据本发明,提供了一种制备光学活性化合物的方法,其特征在于所述方法包括允许相对于与一个碳原子结合的碳原子相对于碳原子的光学异构体的混合物 烯醇酯的酯化羟基在酶的存在下优先水解任一种旋光异构体,并使得由这种水解产生的羰基化合物能够富集其相对于化合物中的任何一种构型的其异构体的比例 使烯醇酯残留未水解以富集其相对于与酯化羟基键合的碳原子相关的碳原子上具有一个构型的异构体的比例。