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    • 6. 发明申请
    • Small thin film movable element, small thin film movable element array and method of driving small thin film movable element array
    • 小薄膜可移动元件,小薄膜可移动元件阵列及驱动小薄膜可移动元件阵列的方法
    • US20070024951A1
    • 2007-02-01
    • US11492757
    • 2006-07-26
    • Fumihiko MochizukiShinya OgikuboHirochika Nakamura
    • Fumihiko MochizukiShinya OgikuboHirochika Nakamura
    • G02B26/00
    • G02B26/0841
    • A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the voltage applied in displacing the movable portion falls in a range equal to or lower than a static pull-in voltage for bringing the movable portion into contact with a side of the fixed electrode against a resistance force generated in accordance with an amount of displacing the movable portion and equal to or higher than a minimum dynamic pull-in voltage for bringing the movable portion into contact with the side of the fixed electrode by being compounded with an inertia force generated in accordance with an operation of the movable portion.
    • 小薄膜可移动元件包括: 弹性变形地支撑的活动部分,在所述可动部的至少一部分具有可动电极; 以及与所述可动部相对设置的固定电极,其中,根据施加到所述可动电极和所述固定电极的电压,所述可动部由静电力移位,并且其中施加在所述可动部的移动中的电压落入 一个等于或小于静态引入电压的范围,用于使可移动部分抵抗固定电极的一侧与根据移动部分的移动量产生的阻力相等并等于或高于最小值 动态引入电压,用于通过与根据可动部分的操作产生的惯性力复合使可动部分与固定电极的侧面接触。
    • 7. 发明授权
    • Method of driving small electromechanical element and small electromechanical element array
    • 小型机电元件和小型机电元件阵列的驱动方法
    • US07414774B2
    • 2008-08-19
    • US11494511
    • 2006-07-28
    • Shinya OgikuboHirochika Nakamura
    • Shinya OgikuboHirochika Nakamura
    • G02B26/00
    • G02B26/0841G09G3/346G09G3/3473G09G2310/0251G09G2320/02G09G2330/021
    • A method of driving a small electromechanical element, which includes: an elastic portion accumulating an elastic energy by being deformed elastically; a movable portion supported by the elastic portion; and a drive source exerting a physical acting force to maintain the movable portion, is provided. The movable portion is displaced to one normal position, an elastic energy is accumulated to the elastic portion, thereafter, the movable portion is maintained at one normal position by a physical acting force. Further, by releasing the elastic energy by stopping the physical acting force, the movable portion is displaced to other normal position while accumulating again an elastic energy having a polarity reverse to that of the preceding elastic energy and is maintained at other normal position. Thereby, the movable portion is displaced only by the elastic energy accumulated to the elastic portion without depending on the physical acting force from outside.
    • 一种小型机电元件的驱动方法,其特征在于,包括:弹性部,其通过弹性变形而积聚弹性能; 由弹性部支承的活动部; 并且提供施加物理作用力来维持可动部分的驱动源。 可移动部分移动到一个正常位置,弹性能量被累积到弹性部分,此后,可动部分通过物理作用力保持在一个正常位置。 此外,通过停止物理作用力释放弹性能量,可移动部分移动到其他正常位置,同时再次累积具有与先前弹性能量的极性相反的极性的弹性能量并保持在其他正常位置。 由此,可移动部分仅仅通过积聚到弹性部分的弹性能量而不依赖于来自外部的物理作用力而移位。
    • 8. 发明申请
    • Microelectromechanical device array apparatus and method for driving same
    • 微机电装置阵列装置及其驱动方法
    • US20070002426A1
    • 2007-01-04
    • US11453863
    • 2006-06-16
    • Shinya OgikuboHirochika Nakamura
    • Shinya OgikuboHirochika Nakamura
    • G02B26/00
    • G02B26/0841
    • A microelectromechanical device array apparatus is provided and includes: an device array one-dimensionally or two-dimensionally arranged with devices including a movable portion having movable electrodes and fixed electrodes facing to the movable portion for displacing the movable portion to one of two different positions; and a drive circuit for inclining the movable portion by writing an device-displacing signal to the fixed electrodes and applying a control voltage to the movable electrodes when the device in a first state of controlling to displace the position of the movable portion from one to the other of the two different positions and the device in a second state of controlling to maintain the position of the movable portion at one position of the two different positions, there is brought about a state in which the device in the first state crosses over pull-out and the device in the second state does not cross over the pull-out.
    • 提供了一种微机电装置阵列装置,其特征在于,包括:一体或二维地配置的装置阵列,该装置包括具有可移动电极的可动部分和面向可动部分的固定电极,用于将可动部分移动到两个不同位置之一; 以及驱动电路,用于通过向所述固定电极写入器件移位信号并向所述可移动电极施加控制电压来使所述可移动部分倾斜,当所述器件处于第一控制状态以将所述可动部分的位置从一个位移移动到 两个不同位置中的另一个,并且在处于第二状态的第二状态下的装置将装置的位置保持在两个不同位置的一个位置时,产生了第一状态下的装置越过拉 - 并且处于第二状态的设备不会越过拉出。
    • 10. 发明授权
    • Microelectromechanical device array apparatus and method for driving same
    • 微机电装置阵列装置及其驱动方法
    • US07626752B2
    • 2009-12-01
    • US11453863
    • 2006-06-16
    • Shinya OgikuboHirochika Nakamura
    • Shinya OgikuboHirochika Nakamura
    • G02B26/00
    • G02B26/0841
    • A microelectromechanical device array apparatus is provided and includes: an device array one-dimensionally or two-dimensionally arranged with devices including a movable portion having movable electrodes and fixed electrodes facing to the movable portion for displacing the movable portion to one of two different positions; and a drive circuit for inclining the movable portion by writing an device-displacing signal to the fixed electrodes and applying a control voltage to the movable electrodes when the device in a first state of controlling to displace the position of the movable portion from one to the other of the two different positions and the device in a second state of controlling to maintain the position of the movable portion at one position of the two different positions, there is brought about a state in which the device in the first state crosses over pull-out and the device in the second state does not cross over the pull-out.
    • 提供了一种微机电装置阵列装置,其特征在于,包括:一体或二维地配置的装置阵列,该装置包括具有可移动电极的可动部分和面向可动部分的固定电极,用于将可动部分移动到两个不同位置之一; 以及驱动电路,用于通过向所述固定电极写入器件移位信号并向所述可移动电极施加控制电压来使所述可移动部分倾斜,当所述器件处于第一控制状态以将所述可动部分的位置从一个位移移动到 两个不同位置中的另一个,并且在处于第二状态的第二状态下的装置将装置的位置保持在两个不同位置的一个位置时,产生了第一状态下的装置越过拉 - 并且处于第二状态的设备不会越过拉出。