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1. 发明授权

US07265962B2 Electrostatic chuck and production method therefor 失效
标题翻译：静电吸盘及其制作方法
公开(公告)号：US07265962B2
公开(公告)日：2007-09-04
申请号：US10814304
申请日：2004-04-01
申请人： Shinya Miyaji , Xinwei Chen , Shinji Saito
发明人： Shinya Miyaji , Xinwei Chen , Shinji Saito
IPC分类号： H01T23/00
CPC分类号： H01L21/6831
摘要： The present invention provides an electrostatic chuck comprising a substrate, a dielectric layer formed by thermal spraying on an upper face of the substrate, an internal electrode embedded in the dielectric layer, a feeder terminal portion extending from a lower face of the substrate to the internal electrode, and an electrode provided in the feeder terminal portion, wherein the feeder terminal portion and the substrate are fixed to each other by mechanical joining.
摘要翻译：本发明提供一种静电卡盘，其包括基板，通过在基板的上表面上的热喷涂形成的电介质层，嵌入在电介质层中的内部电极，从基板的下表面延伸到内部的馈电端子部电极和设置在馈电端子部分中的电极，其中馈电端子部分和基板通过机械接合彼此固定。

2. 发明授权

US08806969B2 Ceramic member, probe holder, and method of manufacturing ceramic member 有权
标题翻译：陶瓷构件，探针架，以及陶瓷构件的制造方法
公开(公告)号：US08806969B2
公开(公告)日：2014-08-19
申请号：US12309537
申请日：2007-07-23
申请人： Shinya Miyaji , Shinji Saito
发明人： Shinya Miyaji , Shinji Saito
IPC分类号： C03C10/00 , G01D21/00
CPC分类号： G01R3/00 , C04B35/20 , C04B35/645 , C04B2235/3418 , C04B2235/3427 , C04B2235/652 , C04B2235/656 , C04B2235/658 , C04B2235/6581 , C04B2235/787 , C04B2235/9607 , G01R1/07314 , G01R1/07371 , G01R1/44
摘要： To provide a ceramic member having a thermal expansion coefficient close to that of silicon and has satisfactory workability, a probe holder formed by using this ceramic member, and a method of manufacturing the ceramic member. For this purpose, at least mica and silicon dioxide are mixed and an external force oriented in one direction is caused to act on this mixed mixture to sinter the mixture. It is more preferable that, in the mixture, a volume content of the mica is 70 to 90 volume % and a volume content of the silicon dioxide is 10 to 30 volume %.
摘要翻译：为了提供具有接近于硅的热膨胀系数的陶瓷构件，并且具有令人满意的可加工性，通过使用该陶瓷构件形成的探针保持架以及陶瓷构件的制造方法。为此目的，至少将云母和二氧化硅混合，并使在一个方向上取向的外力作用于该混合混合物以烧结混合物。更优选的是，在混合物中，云母的体积含量为70〜90体积％，二氧化硅的体积含量为10〜30体积％。

3. 发明申请

US20130115416A1 CERAMIC MEMBER, PROBE HOLDER, AND MANUFACTURING METHOD OF CERAMIC MEMBER 有权
标题翻译：陶瓷会员，探头架，以及陶瓷会员的制造方法
公开(公告)号：US20130115416A1
公开(公告)日：2013-05-09
申请号：US13809290
申请日：2011-07-13
申请人： Akira Nakamura , Kohei Suzuki , Shinya Miyaji , Shinji Saito
发明人： Akira Nakamura , Kohei Suzuki , Shinya Miyaji , Shinji Saito
IPC分类号： C04B35/583 , C04B35/645
CPC分类号： C04B35/583 , C04B35/20 , C04B35/645 , C04B35/6455 , C04B2235/3206 , C04B2235/3217 , C04B2235/3225 , C04B2235/3418 , C04B2235/3445 , C04B2235/386 , C04B2235/5292 , C04B2235/656 , C04B2235/767 , C04B2235/77 , C04B2235/787 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , G01R1/06722 , G01R3/00 , Y10T428/24273
摘要： There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member.
摘要翻译：提供了一种陶瓷构件，该陶瓷构件是含有顽火和氮化硼作为组成的烧结体，其中氮化硼沿单一方向取向，使用该陶瓷构件形成的探针夹持器和陶瓷构件的制造方法。在陶瓷构件中，取向度的指标不小于0.8。在这样做时，可以提供一种具有自由加工性能，热膨胀系数接近于硅的陶瓷构件和高强度的陶瓷构件，以及使用该陶瓷构件形成的探针保持器，陶瓷构件的制造方法。

4. 发明申请

US20100000347A1 Ceramic Member, Probe Holder, and Method of Manufacturing Ceramic Member 有权
标题翻译：陶瓷构件，探头支架和陶瓷构件的制造方法
公开(公告)号：US20100000347A1
公开(公告)日：2010-01-07
申请号：US12309537
申请日：2007-07-23
申请人： Shinya Miyaji , Shinji Saito
发明人： Shinya Miyaji , Shinji Saito
IPC分类号： G01D21/00 , C03C10/00
CPC分类号： G01R3/00 , C04B35/20 , C04B35/645 , C04B2235/3418 , C04B2235/3427 , C04B2235/652 , C04B2235/656 , C04B2235/658 , C04B2235/6581 , C04B2235/787 , C04B2235/9607 , G01R1/07314 , G01R1/07371 , G01R1/44
摘要： To provide a ceramic member having a thermal expansion coefficient close to that of silicon and has satisfactory workability, a probe holder formed by using this ceramic member, and a method of manufacturing the ceramic member. For this purpose, at least mica and silicon dioxide are mixed and an external force oriented in one direction is caused to act on this mixed mixture to sinter the mixture. It is more preferable that, in the mixture, a volume content of the mica is 70 to 90 volume % and a volume content of the silicon dioxide is 10 to 30 volume %.
摘要翻译：为了提供具有接近于硅的热膨胀系数的陶瓷构件，并且具有令人满意的可加工性，通过使用该陶瓷构件形成的探针保持架以及陶瓷构件的制造方法。为此目的，至少将云母和二氧化硅混合，并使在一个方向上取向的外力作用于该混合混合物以烧结混合物。更优选的是，在混合物中，云母的体积含量为70〜90体积％，二氧化硅的体积含量为10〜30体积％。

5. 发明授权

US08410009B2 Ceramic member, probe holder, and method for manufacturing ceramic member 有权
标题翻译：陶瓷构件，探针架，以及陶瓷构件的制造方法
公开(公告)号：US08410009B2
公开(公告)日：2013-04-02
申请号：US13322177
申请日：2010-04-27
申请人： Kohei Suzuki , Shinya Miyaji , Shinji Saito , Noriyoshi Kaneda
发明人： Kohei Suzuki , Shinya Miyaji , Shinji Saito , Noriyoshi Kaneda
IPC分类号： C04B35/583
CPC分类号： G01R3/00 , C04B35/583 , C04B35/587 , C04B35/645 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3445 , C04B2235/3852 , C04B2235/3873 , C04B2235/3878 , C04B2235/3882 , C04B2235/5292 , C04B2235/787 , C04B2235/80 , G01R1/06722 , G01R1/06755 , Y10T428/252
摘要： Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300° C. in a direction parallel to the direction of orientation is (3 to 5)×10−6/° C., or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.
摘要翻译：提供一种陶瓷构件，其是至少包含镁橄榄石和氮化硼作为主要成分并且其中氮化硼沿一个方向取向的烧结体，通过使用该陶瓷构件形成的探针支架，以及陶瓷构件的制造方法。在陶瓷构件中，取向偏好指数等于或低于0.07，并且在与取向方向平行的方向上，在20〜300℃的热膨胀系数为（3〜5）×10 -6 或者基于JIS R 1601的三点弯曲强度等于或高于250MPa。

6. 发明申请

US20120067145A1 CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR MANUFACTURING CERAMIC MEMBER 有权
标题翻译：陶瓷会员，探头架，以及制造陶瓷会员的方法
公开(公告)号：US20120067145A1
公开(公告)日：2012-03-22
申请号：US13322177
申请日：2010-04-27
申请人： Kohei Suzuki , Shinya Miyaji , Shinji Saito , Noriyoshi Kaneda
发明人： Kohei Suzuki , Shinya Miyaji , Shinji Saito , Noriyoshi Kaneda
IPC分类号： G01D21/00 , C04B35/64 , B32B5/16 , B32B18/00
CPC分类号： G01R3/00 , C04B35/583 , C04B35/587 , C04B35/645 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/3445 , C04B2235/3852 , C04B2235/3873 , C04B2235/3878 , C04B2235/3882 , C04B2235/5292 , C04B2235/787 , C04B2235/80 , G01R1/06722 , G01R1/06755 , Y10T428/252
摘要： Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300° C. in a direction parallel to the direction of orientation is (3 to 5)×10−6/° C., or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.
摘要翻译：提供一种陶瓷构件，其是至少包含镁橄榄石和氮化硼作为主要成分并且其中氮化硼沿一个方向取向的烧结体，通过使用该陶瓷构件形成的探针支架，以及陶瓷构件的制造方法。在陶瓷构件中，取向偏好指数等于或低于0.07，并且在与取向方向平行的方向上，在20〜300℃的热膨胀系数为（3〜5）×10 -6 或者基于JIS R 1601的三点弯曲强度等于或高于250MPa。

7. 发明授权

US09238593B2 Ceramic member, probe holder, and manufacturing method of ceramic member 有权
标题翻译：陶瓷构件，探针架和陶瓷构件的制造方法
公开(公告)号：US09238593B2
公开(公告)日：2016-01-19
申请号：US13809290
申请日：2011-07-13
申请人： Akira Nakamura , Kohei Suzuki , Shinya Miyaji , Shinji Saito
发明人： Akira Nakamura , Kohei Suzuki , Shinya Miyaji , Shinji Saito
IPC分类号： B32B3/24 , C04B35/583 , C04B35/20 , C04B35/645 , G01R1/067 , G01R3/00
CPC分类号： C04B35/583 , C04B35/20 , C04B35/645 , C04B35/6455 , C04B2235/3206 , C04B2235/3217 , C04B2235/3225 , C04B2235/3418 , C04B2235/3445 , C04B2235/386 , C04B2235/5292 , C04B2235/656 , C04B2235/767 , C04B2235/77 , C04B2235/787 , C04B2235/80 , C04B2235/96 , C04B2235/9607 , G01R1/06722 , G01R3/00 , Y10T428/24273
摘要： There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member.
摘要翻译：提供了一种陶瓷构件，该陶瓷构件是含有顽火和氮化硼作为组成的烧结体，其中氮化硼沿单一方向取向，使用该陶瓷构件形成的探针保持架以及陶瓷构件的制造方法。在陶瓷构件中，取向度的指标不小于0.8。在这样做时，可以提供一种具有自由加工性能，热膨胀系数接近于硅的陶瓷构件和高强度的陶瓷构件，以及使用该陶瓷构件形成的探针保持器，以及陶瓷构件的制造方法。

8. 发明申请

US20130052451A1 INSULATION COATING METHOD FOR METAL BASE, INSULATION COATED METAL BASE, AND SEMICONDUCTOR MANUFACTURING APPARATUS USING THE SAME 审中-公开
标题翻译：金属基绝缘涂层方法，绝缘涂层金属基体及其半导体制造装置
公开(公告)号：US20130052451A1
公开(公告)日：2013-02-28
申请号：US13661390
申请日：2012-10-26
申请人： Takamichi Sano , Shinya Miyaji , Shinji Saito
发明人： Takamichi Sano , Shinya Miyaji , Shinji Saito
IPC分类号： C23C4/10 , B32B15/04 , C23C4/18
CPC分类号： C23C4/18 , C23C4/11 , C23C28/04 , Y10T428/24997
摘要： An insulation coating method for a metal base comprises a thermal spraying step, an impregnation step, and a beam irradiation step. In the thermal spraying step, a first insulation coating is formed by thermally spraying a first metal oxide to the surface of the metal base. In the impregnation step, pores formed in the surface of the first insulation coating are impregnated with a sol that contains, as a dispersoid, a metal oxide, a hydrate of a metal oxide, or a metal hydroxide. In the beam irradiation step, a second insulation coating that is composed of a second metal oxide is formed by irradiating the first insulation coating and the sol with a high energy beam after the impregnation step.
摘要翻译：用于金属基底的绝缘涂覆方法包括热喷涂步骤，浸渍步骤和束照射步骤。在热喷涂步骤中，通过将第一金属氧化物热喷涂到金属基底的表面上形成第一绝缘涂层。在浸渍步骤中，在第一绝缘涂层的表面形成的孔被含有作为分散质的金属氧化物，金属氧化物的水合物或金属氢氧化物的溶胶浸渍。在光束照射工序中，通过在浸渍工序后用高能量射束照射第一绝缘层和溶胶，形成由第二金属氧化物构成的第二绝缘膜。

9. 发明授权

US07390583B2 Sprayed coating and production method for the same 有权
标题翻译：喷涂及生产方法相同
公开(公告)号：US07390583B2
公开(公告)日：2008-06-24
申请号：US10751109
申请日：2004-01-05
申请人： Shinya Miyaji , Shinji Saito
发明人： Shinya Miyaji , Shinji Saito
IPC分类号： B32B9/00
CPC分类号： C23C4/11
摘要： A sprayed coating is proposed in which a problem of a condition of oxygen defect which cannot be solved by conventional densification of the sprayed coating is solved, whereby excellent electrical insulation and corrosion resistance can be simultaneously obtained. A sprayed coating formed by plasma spraying inside a semiconductor processing device comprises a metal oxide or a semiconductor oxide, and composition ratio of oxygen with respect to a metal or a semiconductor which composes oxides, that is (oxygen/(metal or semiconductor)) is not less than 80% of a composition ratio in the case of stoichiometric composition.
摘要翻译：提出了一种喷涂涂层，其中解决了通过喷涂的常规致密化不能解决的氧缺陷状态的问题，从而可以同时获得优异的电绝缘性和耐腐蚀性。通过在半导体处理装置内等离子体喷涂形成的喷镀涂层包括金属氧化物或半导体氧化物，氧相对于构成氧化物（即氧（金属或半导体））的金属或半导体的组成比为在化学计量组成的情况下不少于80％的组成比。

10. 发明授权

US07142405B2 Electrostatic chuck and production method therefor 失效
标题翻译：静电吸盘及其制作方法
公开(公告)号：US07142405B2
公开(公告)日：2006-11-28
申请号：US10737816
申请日：2003-12-18
申请人： Shinya Miyaji , Shinji Saito
发明人： Shinya Miyaji , Shinji Saito
IPC分类号： H02N13/00
CPC分类号： B23Q3/154 , Y10T279/23
摘要： The present invention relates to an electrostatic chuck in which unification of a dielectric layer and a heating and cooling flange is omitted, whereby production cost can be decreased, resulting in having adequate corrosion resistance especially for high temperature processes for semiconductor. The electrostatic chuck comprises a stage and a dielectric layer formed on an upper surface of the stage by thermal spraying, and the dielectric layer is made of magnesium oxide.
摘要翻译：本发明涉及一种静电卡盘，其中省略了电介质层和加热和冷却法兰的统一，从而可以降低生产成本，从而具有足够的耐腐蚀性，特别是对于半导体的高温工艺。静电卡盘包括通过热喷涂形成在台的上表面上的载物台和电介质层，并且电介质层由氧化镁制成。

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