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    • 8. 发明授权
    • Method of manufacturing fine pattern and printed circuit board manufactured with this method
    • 使用该方法制造精细图案和印刷电路板的方法
    • US06383720B1
    • 2002-05-07
    • US09376357
    • 1999-08-18
    • Koji NakashimaToyokazu YoshinoShinobu Kamizuru
    • Koji NakashimaToyokazu YoshinoShinobu Kamizuru
    • C25D906
    • H05K3/205
    • A method of manufacturing fine pattern of the invention comprises (a) a step of manufacturing a master substrate having a film of precious metal or an alloy thereof formed as an insoluble electrode on the electrode, (b) a step of forming a fine pattern film on the insoluble electrode with anion type electro-deposition, and (c) a step of exfoliating and transferring the fine pattern film onto another substrate. Another method of manufacturing fine pattern further includes a step of manufacturing a master substrate, of which a surface is provided with at least a repeatedly reproducible sacrificial electrode. Still another method of manufacturing fine pattern includes a step of forming a pattern electrode on a conductive substrate by electro-forming, and transferring the electrode onto another substrate. Yet another method of manufacturing fine pattern includes a structure wherein a transparent section is provided in a portion of a master substrate in order to facilitate a positional alignment. The invention provides reliable and accurate mass production of fine-line and high-density films of fine pattern having good transfer ability and durability at low cost. A fine-line and high-density printed circuit board can be made at low cost with the methods of manufacturing fine pattern as disclosed above.
    • 制造本发明的精细图案的方法包括(a)制造具有在电极上形成为不溶性电极的贵金属或其合金膜的母基板的工序,(b)形成精细图案膜的工序 在具有阴离子型电沉积的不溶性电极上,和(c)将精细图案膜剥离并转印到另一个基底上的步骤。 制造精细图案的另一种方法还包括制造母基板的步骤,其中表面设置有至少一个可重复再现的牺牲电极。 制造精细图案的另一种方法包括通过电成型在导电衬底上形成图案电极并将电极转移到另一衬底上的步骤。 制造精细图案的另一种方法包括其中在主基板的一部分中设置透明部分以便于进行位置对准的结构。 本发明提供了以低成本具有良好的转印能力和耐久性的精细图案的细线和高密度薄膜的可靠和准确的批量生产。 通过上述制造精细图案的方法,可以以低成本制造细线和高密度印刷电路板。