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    • 2. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜提供地形图像和磁图像
    • US5939715A
    • 1999-08-17
    • US31641
    • 1997-02-27
    • Shinichi KitamuraTakashi Sueyoshi
    • Shinichi KitamuraTakashi Sueyoshi
    • G01B21/30G01B7/00G01B7/34G01N37/00G01Q30/04G01Q60/00G01Q60/08G01Q60/24G01Q60/32G01Q60/50G01Q60/56G01R33/038H01J3/14
    • G01Q60/08B82Y35/00G01B7/00G01Q60/32G01Q60/52G01R33/0385B82Y25/00Y10S977/865
    • There is disclosed a scanning probe microscope capable of producing a topographic image and a magnetic image of a surface of a sample in one measurement. The microscope has a probe tip made of a magnetic material. A physical force, such as an atomic force, is exerted between the probe tip and the sample. When this physical force does not act on the probe tip, it vibrates at a first vibrational frequency. Displacements of the probe tip are detected by a photodetector. A topographic information-extracting portion including a voltage-to-current converter, a phase shifter, an FM demodulator, a low-pass filter, and an error amplifier extracts a signal representative of topographic information from the output from the photodetector. A magnetic distribution-extracting portion, including an oscillator and a lock-in amplifier, extracts information about the magnetism of the sample from the output from the photodetector.
    • 公开了一种能够在一次测量中产生样品表面的地形图像和磁性图像的扫描探针显微镜。 显微镜具有由磁性材料制成的探针尖端。 在探针尖端和样品之间施加诸如原子力的物理力。 当该物理力不作用于探针尖端时,其以第一振动频率振动。 探针尖端的位移由光检测器检测。 包括电压 - 电流转换器,移相器,FM解调器,低通滤波器和误差放大器的地形信息提取部分从光电检测器的输出中提取表示地形信息的信号。 包括振荡器和锁定放大器的磁分布提取部分从光电检测器的输出中提取关于样品的磁性的信息。
    • 4. 发明授权
    • Vibrating probe atomic force microscope
    • 振动探头原子力显微镜
    • US5631410A
    • 1997-05-20
    • US570758
    • 1995-12-12
    • Shinichi Kitamura
    • Shinichi Kitamura
    • G01B21/30G01B5/28G01N37/00G01Q20/00G01Q60/24G01Q60/32H01J37/28
    • G01Q60/32B82Y35/00Y10S977/851
    • An atomic force microscope capable of vibrating a cantilever at a constant amplitude at all times. Variations in the vibration of the cantilever are sensed by detecting the variation in the position of reflected light by a photodetector. The output signal from the photodetector is fed to a band-pass filter to extract those frequency components which are close to the resonance frequency of the cantilever. The output from the filter is fed to a waveform converter to convert the signal into a square-wave signal of a constant amplitude via a phase-adjusting circuit. The output from this waveform converter is supplied as a driving signal to a piezoelectric device via an amplitude-adjusting circuit and also to a frequency-to-voltage converter to convert the signal into a voltage signal V.sub.fv corresponding to the frequency. A reference voltage comparator produces the difference between the voltage signal V.sub.fv and a reference signal. This difference signal is supplied as a feedback signal to a z-scanner drive circuit.
    • 能够始终以恒定幅度振动悬臂的原子力显微镜。 通过检测由光电检测器反射的光的位置的变化来检测悬臂的振动的变化。 来自光电检测器的输出信号被馈送到带通滤波器以提取接近于悬臂共振频率的那些频率分量。 来自滤波器的输出被馈送到波形转换器,以通过相位调整电路将信号转换成恒定幅度的方波信号。 来自该波形转换器的输出通过振幅调节电路作为驱动信号提供给压电装置,并且还提供给频率 - 电压转换器,以将信号转换成对应于频率的电压信号Vfv。 参考电压比较器产生电压信号Vfv和参考信号之间的差值。 该差分信号作为反馈信号提供给z扫描器驱动电路。