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    • 6. 发明授权
    • Vibrating probe atomic force microscope
    • 振动探头原子力显微镜
    • US5631410A
    • 1997-05-20
    • US570758
    • 1995-12-12
    • Shinichi Kitamura
    • Shinichi Kitamura
    • G01B21/30G01B5/28G01N37/00G01Q20/00G01Q60/24G01Q60/32H01J37/28
    • G01Q60/32B82Y35/00Y10S977/851
    • An atomic force microscope capable of vibrating a cantilever at a constant amplitude at all times. Variations in the vibration of the cantilever are sensed by detecting the variation in the position of reflected light by a photodetector. The output signal from the photodetector is fed to a band-pass filter to extract those frequency components which are close to the resonance frequency of the cantilever. The output from the filter is fed to a waveform converter to convert the signal into a square-wave signal of a constant amplitude via a phase-adjusting circuit. The output from this waveform converter is supplied as a driving signal to a piezoelectric device via an amplitude-adjusting circuit and also to a frequency-to-voltage converter to convert the signal into a voltage signal V.sub.fv corresponding to the frequency. A reference voltage comparator produces the difference between the voltage signal V.sub.fv and a reference signal. This difference signal is supplied as a feedback signal to a z-scanner drive circuit.
    • 能够始终以恒定幅度振动悬臂的原子力显微镜。 通过检测由光电检测器反射的光的位置的变化来检测悬臂的振动的变化。 来自光电检测器的输出信号被馈送到带通滤波器以提取接近于悬臂共振频率的那些频率分量。 来自滤波器的输出被馈送到波形转换器,以通过相位调整电路将信号转换成恒定幅度的方波信号。 来自该波形转换器的输出通过振幅调节电路作为驱动信号提供给压电装置,并且还提供给频率 - 电压转换器,以将信号转换成对应于频率的电压信号Vfv。 参考电压比较器产生电压信号Vfv和参考信号之间的差值。 该差分信号作为反馈信号提供给z扫描器驱动电路。