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    • 1. 发明授权
    • System for measuring polarimetric spectrum and other properties of a sample
    • 用于测量样品的偏振光谱和其他性质的系统
    • US06184984B2
    • 2001-02-06
    • US09246922
    • 1999-02-09
    • Shing LeeHaiming WangAdam NortonMehrdad Nikoonahad
    • Shing LeeHaiming WangAdam NortonMehrdad Nikoonahad
    • G01N2121
    • G01J4/02G01J3/447G01N21/21
    • A polarized sample beam of broadband radiation is focused onto the surface of a sample and the radiation modified by the sample is collected by means of a mirror system in different planes of incidence. The sample beam focused to the sample has a multitude of polarization states. The modified radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. Preferably the polarization of the sample beam is altered only by the focusing and the sample, and the analyzing is done with respect to a fixed polarization plane. In the preferred embodiment, the focusing of the sample beam and the collection of the modified radiation are repeated employing two different apertures to detect the presence or absence of a birefringence axis in the sample. In another preferred embodiment, the above-described technique may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films.
    • 将宽带辐射的极化样品束聚焦到样品的表面上,并且通过不同入射平面的反射镜系统收集由样品改性的辐射。 聚焦到样品的样品束具有许多极化状态。 相对于偏振平面分析修改的辐射以提供偏振光谱。 然后可以从光谱导出厚度和折射信息。 优选地,样品光束的偏振仅由聚焦和样品改变,并且相对于固定的偏振平面进行分析。 在优选实施例中,使用两个不同的孔来重复样品束的聚焦和修改的辐射的收集,以检测样品中双折射轴的存在或不存在。 在另一个优选实施例中,上述技术可以与用于确定薄膜的厚度和折射率的椭偏仪组合。
    • 5. 发明授权
    • System for analyzing surface characteristics with self-calibrating capability
    • 用于分析具有自校准能力的表面特性的系统
    • US06804003B1
    • 2004-10-12
    • US09405716
    • 1999-09-24
    • Haiming WangPatrick M. MaxtonKenneth C. JohnsonMehrdad Nikoonahad
    • Haiming WangPatrick M. MaxtonKenneth C. JohnsonMehrdad Nikoonahad
    • G01J400
    • G01J3/447G01B11/0641G01J4/02G01N21/21G01N21/211
    • Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. Radiation so modulated and modified by the sample is detected and up to 25 harmonics may be derived from the detected signal. The up to 25 harmonics may be used to derive ellipsometric and system parameters, such as parameters related to the angles of fixed polarizing elements, circular deattenuation, depolarization of the polarizing elements and retardances of phase modulators. A portion of the radiation may be diverted for detecting sample tilt or a change in sample height. A cylindrical objective may be used for focusing the beam onto the sample to illuminate a circular spot on the sample. The above-described self-calibrating ellipsometer may be combined with another optical measurement instrument such as a polarimeter, a spectroreflectometer or another ellipsometer to improve the accuracy of measurement and/or to provide calibration standards for the optical measurement instrument. The self-calibrating ellipsometer as well as the combined system may be used for measuring sample characteristics such as film thickness and depolarization of radiation caused by the sample.
    • 采用两相调制器或偏振元件来调制光束已被待测样品修改之前和之后的询问辐射束的极化。 检测由样本调制和修改的辐射,并且可以从检测到的信号导出多达25个谐波。 可以使用多达25个谐波来导出椭偏和系统参数,例如与固定偏振元件的角度相关的参数,圆形去衰减,偏振元件的去极化和相位调制器的延迟。 可以转移一部分辐射以检测样品倾斜或样品高度的变化。 可以使用圆柱形物镜将光束聚焦到样品上以照亮样品上的圆形斑点。 上述自校准椭偏仪可以与另一种光学测量仪器如偏振计,分光光度计或其他椭偏仪组合,以提高测量精度和/或为光学测量仪器提供校准标准。 自校准椭偏仪以及组合系统可用于测量样品特性,如样品的膜厚度和辐射的去极化。
    • 10. 发明授权
    • Flexible measurements in unlicensed band
    • 未经授权的频段灵活测量
    • US09408103B2
    • 2016-08-02
    • US14354248
    • 2011-10-26
    • Wei BaiTero HenttonenNa WeiJing HanHaiming Wang
    • Wei BaiTero HenttonenNa WeiJing HanHaiming Wang
    • H04W24/10H04W72/04H04W16/14
    • H04W24/10H04W16/14H04W72/0413H04W72/042
    • The specification and drawings present a new method, apparatus and software related product (e.g., a computer readable memory) for implementing enhanced and flexible radio aperiodic measurements, e.g., on an unlicensed band in LTE wireless systems and providing effective and timely reporting. A UE may receive from a wireless network an aperiodic measurement request to measure a special measurement object (e.g., a neighbor cell) specified in the aperiodic measurement request, e.g., in an unlicensed band. In response to the aperiodic measurement request, the UE may perform the measurement of the special management object until a further instruction from the wireless network or for a determined period of time. Inter-frequency measurements may be performed during the measurement gap determined from the aperiodic measurement request.
    • 说明书和附图提出了用于实现增强和灵活的无线电非周期测量的新方法,装置和软件相关产品(例如,计算机可读存储器),例如在LTE无线系统中的未许可频带上并且提供有效和及时的报告。 UE可以从无线网络接收非周期测量请求,以测量在非周期性测量请求中指定的特殊测量对象(例如,相邻小区),例如在非许可频带中。 响应于非周期测量请求,UE可以执行特殊管理对象的测量,直到来自无线网络的进一步指令或在确定的时间段内。 在从非周期测量请求确定的测量间隙期间可以执行频率间测量。