专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5616768A Process for purifying phosphoric esters 失效
标题翻译：磷酸酯的纯化方法
公开(公告)号：US5616768A
公开(公告)日：1997-04-01
申请号：US491402
申请日：1995-06-19
申请人： Shigeru Kawata , Kazuo Noguchi , Kenji Ako , Shin Nakamura
发明人： Shigeru Kawata , Kazuo Noguchi , Kenji Ako , Shin Nakamura
IPC分类号： C07F9/02
CPC分类号： C07F9/025
摘要： A process for purifying a phosphoric ester, which comprises treating a crude phosphoric ester with an epoxy compound, heating the resultant in the presence of water, washing the resultant with water, and removing the residual water. The obtained phosphoric esters have low acid value and are excellent in physical properties such as heat resistance, resistance to hydrolysis and storage stability, and are useful as plasticizers and/or flame-retardants.
摘要翻译：一种磷酸酯的纯化方法，其包括用环氧化合物处理粗磷酸酯，在水的存在下加热所得物，用水洗涤所得物，除去残留的水。所得磷酸酯的酸值低，耐热性，耐水解性，贮存稳定性等物理性能优异，可用作增塑剂和/或阻燃剂。

2. 发明授权

US5880308A Process for preparing aromatic bisphosphates 失效
标题翻译：制备芳族二磷酸盐的方法
公开(公告)号：US5880308A
公开(公告)日：1999-03-09
申请号：US761376
申请日：1996-12-09
申请人： Shigeru Kawata , Kiyoharu Hirao , Kazuo Noguchi
发明人： Shigeru Kawata , Kiyoharu Hirao , Kazuo Noguchi
IPC分类号： B01J27/06 , C07B61/00 , C07F9/09 , C07F9/12 , C08K5/52 , C08K5/523 , C09K21/12
CPC分类号： C07F9/12
摘要： A process for preparing aromatic bisphosphates includes: a first step of reacting an aromatic monohydroxy compound having a steric hindrance group at the ortho position, with a phosphorus oxyhalide in the presence of a Lewis acid catalyst (a) to yield a reaction mixture containing diarylphosphorohalidate, and a second step of reacting the reaction mixture of the first step with an aromatic dihydroxy compound in the presence of a Lewis acid catalyst (b) to obtain an aromatic bisphosphate, wherein the aromatic monohydroxy compound and the phosphorus oxyhalide are reacted in a molar ratio of 2.0:1.0-1.1 in the first step, and the reaction mixture of the first step is subjected to a distillation treatment before the reaction of the second step, thereby obtaining the aromatic bisphosphate of high purity.
摘要翻译：一种制备芳族二磷酸盐的方法包括：在路易斯酸催化剂（a）存在下，使在邻位具有位阻基团的芳族单羟基化合物与磷酰卤反应的第一步骤，得到含有二芳基次氯酸盐的反应混合物，和在路易斯酸催化剂（b）的存在下使第一步反应混合物与芳族二羟基化合物反应得到芳族二磷酸酯的第二步骤，其中芳族单羟基化合物和磷酰卤以摩尔比为2.0:1.0-1.1，第一步骤的反应混合物在第二步反应之前进行蒸馏处理，从而得到高纯度的芳族二磷酸盐。

3. 发明授权

US07381270B2 Slit nozzle and apparatus for supplying treatment liquid using slit nozzle 有权
标题翻译：狭缝喷嘴和使用狭缝喷嘴供给处理液的装置
公开(公告)号：US07381270B2
公开(公告)日：2008-06-03
申请号：US11214480
申请日：2005-08-29
申请人： Futoshi Shimai , Shigeru Kawata
发明人： Futoshi Shimai , Shigeru Kawata
IPC分类号： B05C5/00 , B05C11/00 , B05C3/00 , B05B1/04
CPC分类号： B05C5/0254 , B05C5/0262 , B05C11/1042
摘要： A slit nozzle which is easily manufactured and in which no capillary action occurs, and an apparatus for supplying a treatment liquid using the slit nozzle are disclosed. The slit nozzle is constructed of a left portion and a right portion joined to each other, one of which is made of metal and the other of which is made of resin. In the apparatus for supplying a treatment liquid using one or more of the slit nozzles, the slit nozzles are provided in a circulating passage of a treatment liquid whose temperature is controlled.
摘要翻译：公开了一种易于制造并且不发生毛细作用的狭缝喷嘴，以及使用该狭缝喷嘴供给处理液的装置。狭缝喷嘴由彼此连接的左部和右部构成，其中一个由金属制成，另一个由树脂制成。在使用一个以上的狭缝喷嘴供给处理液的装置中，狭缝喷嘴设置在温度受控的处理液的循环通路中。

4. 发明授权

US08189169B2 Cooling apparatus and substrate treating apparatus 失效
标题翻译：冷却装置和基板处理装置
公开(公告)号：US08189169B2
公开(公告)日：2012-05-29
申请号：US12156896
申请日：2008-06-05
申请人： Futoshi Shimai , Shigeru Kawata
发明人： Futoshi Shimai , Shigeru Kawata
IPC分类号： G03B27/42
CPC分类号： H01L21/67109
摘要： The object of the present invention is to provide a cooling apparatus which makes it possible to cool a substrate uniformly in a short period of time even if the substrate has a large area. The cooling apparatus 3 comprises a flat-box-shaped body 10, a cooling medium supply tube 11 which is inserted into the body 10, a nozzle 12 which is attached to the cooling medium supply tube 11 so as to eject the cooling medium toward the internal surface of the body, a pipe 13 for withdrawing water (refrigerant) ejected from the nozzle 12 toward the body 10, a chiller 14 for cooling the water from the pipe 13 to a predetermined temperature, and a circulating pipe 15 for sending the water which has been cooled by the chiller 14 back to the cooling medium supply tube 11.
摘要翻译：本发明的目的是提供一种能够在短时间内均匀地冷却基板，即使基板面积大的冷却装置。冷却装置3包括平盒体10，插入主体10的冷却介质供给管11，安装在冷却介质供给管11上的喷嘴12，以将冷却介质朝向主体的内表面，用于将从喷嘴12排出的水（制冷剂）向主体10排出的管道13，用于将水从管道13冷却到预定温度的冷却器14，以及用于将水其被冷却器14冷却回冷却介质供应管11。

5. 发明申请

US20080304027A1 Cooling apparatus and substrate treating apparatus 失效
标题翻译：冷却装置和基板处理装置
公开(公告)号：US20080304027A1
公开(公告)日：2008-12-11
申请号：US12156896
申请日：2008-06-05
申请人： Futoshi Shimai , Shigeru Kawata
发明人： Futoshi Shimai , Shigeru Kawata
IPC分类号： G03B27/52
CPC分类号： H01L21/67109
摘要： The object of the present invention is to provide a cooling apparatus which makes it possible to cool a substrate uniformly in a short period of time even if the substrate has a large area. The cooling apparatus 3 comprises a flat-box-shaped body 10, a cooling medium supply tube 11 which is inserted into the body 10, a nozzle 12 which is attached to the cooling medium supply tube 11 so as to eject the cooling medium toward the internal surface of the body, a pipe 13 for withdrawing water (refrigerant) ejected from the nozzle 12 toward the body 10, a chiller 14 for cooling the water from the pipe 13 to a predetermined temperature, and a circulating pipe 15 for sending the water which has been cooled by the chiller 14 back to the cooling medium supply tube 11.
摘要翻译：本发明的目的是提供一种能够在短时间内均匀地冷却基板，即使基板面积大的冷却装置。冷却装置3包括平盒体10，插入主体10的冷却介质供给管11，安装在冷却介质供给管11上的喷嘴12，以将冷却介质朝向主体的内表面，用于将从喷嘴12排出的水（制冷剂）向主体10排出的管道13，用于将水从管道13冷却到预定温度的冷却器14，以及用于将水其被冷却器14冷却回冷却介质供应管11。

6. 发明申请

US20070240642A1 Substrate processing apparatus 审中-公开
标题翻译：基板加工装置
公开(公告)号：US20070240642A1
公开(公告)日：2007-10-18
申请号：US11786202
申请日：2007-04-11
申请人： Futoshi Shimai , Shigeru Kawata
发明人： Futoshi Shimai , Shigeru Kawata
IPC分类号： B05B7/06 , B05B1/28 , B05C13/02 , B05C13/00
CPC分类号： H01L21/67051 , H01L21/67034
摘要： A multi-stage substrate processing apparatus in which each processing stage is carried out on a substrate while conveying said substrate includes a processing liquid supply device and a drying device arranged successively along a conveying direction of the substrate. The drying device comprises an air knife for drying a processing liquid on the substrate. A plurality of nozzles for supplying the processing liquid onto the substrate are provided in the processing liquid supply device. At least the nozzle in the final stage among the plurality of nozzles is pointed in an opposite direction to the conveying direction of the substrate. This apparatus shortens tact time of the processed substrate.
摘要翻译：一种多层基板处理装置，其中在输送所述基板的同时在基板上进行各处理台包括沿基板的输送方向依次配置的处理液供给装置和干燥装置。干燥装置包括用于干燥基板上的处理液体的气刀。在处理液供给装置中设置有用于将处理液供给到基板上的多个喷嘴。至少在多个喷嘴中的最后阶段的喷嘴相对于基板的传送方向指向相反的方向。该装置缩短处理后的基板的节拍时间。

7. 发明申请

US20070044712A1 Slit nozzle and apparatus for supplying treatment liquid using slit nozzle 有权
标题翻译：狭缝喷嘴和使用狭缝喷嘴供给处理液的装置
公开(公告)号：US20070044712A1
公开(公告)日：2007-03-01
申请号：US11214480
申请日：2005-08-29
申请人： Futoshi Shimai , Shigeru Kawata
发明人： Futoshi Shimai , Shigeru Kawata
IPC分类号： B05C5/00 , B05C11/00 , B05B1/14
CPC分类号： B05C5/0254 , B05C5/0262 , B05C11/1042
摘要： A slit nozzle which is easily manufactured and in which no capillary action occurs, and an apparatus for supplying a treatment liquid using the slit nozzle are disclosed. The slit nozzle is constructed of a left portion and a right portion joined to each other, one of which is made of metal and the other of which is made of resin. In the apparatus for supplying a treatment liquid using one or more of the slit nozzles, the slit nozzles are provided in a circulating passage of a treatment liquid whose temperature is controlled.
摘要翻译：公开了一种易于制造并且不发生毛细作用的狭缝喷嘴，以及使用该狭缝喷嘴供给处理液的装置。狭缝喷嘴由彼此连接的左部和右部构成，其中一个由金属制成，另一个由树脂制成。在使用一个以上的狭缝喷嘴供给处理液的装置中，狭缝喷嘴设置在温度受控的处理液的循环通路中。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式