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    • 5. 发明申请
    • Process of microlens mold
    • 微透镜模具的工艺
    • US20070102842A1
    • 2007-05-10
    • US11528517
    • 2006-09-28
    • Irizo NaniwaMasatoshi KanamaruTakeshi ShimanoShigeo NakamuraMasaya HorinoYumiko Anzai
    • Irizo NaniwaMasatoshi KanamaruTakeshi ShimanoShigeo NakamuraMasaya HorinoYumiko Anzai
    • B29C33/40
    • B29C33/3842B29D11/00365B29L2011/0016
    • The present invention provides a method of making a mold for manufacturing a microlens having a smooth surface and an arbitrary aspherical surface, or more specifically, an aspheric microlens of dimensions such that an aperture is equal to or less than 1 mm and a thickness is equal to or more than 0.5 mm. A mask layer having plural circular apertures with different sizes formed therein for a mold for one lens is formed on a silicon substrate. Plural holes are formed for the lens in the silicon substrate by applying anisotropic dry etching to a surface to be processed, which is the surface having the mask layer formed thereon. The depths of the respective holes vary depending on the sizes of the circular apertures. Isotropic etching is performed to remove sidewalls of the plural holes with different depths formed in the silicon substrate, thereby merging the holes into one hole corresponding to the lens.
    • 本发明提供一种制造用于制造具有平滑表面和任意非球面的微透镜的模具的方法,或者更具体地说,是使得孔径等于或小于1mm并且厚度相等的尺寸的非球面微透镜 至或大于0.5mm。 在硅基板上形成具有用于一个透镜的模具形成有多个具有不同尺寸的圆形孔的掩模层。 通过对作为其上形成有掩模层的表面的待加工表面施加各向异性干蚀刻,在硅衬底中形成多个孔。 各个孔的深度根据圆形孔的尺寸而变化。 进行各向同性蚀刻以去除在硅衬底中形成的不同深度的多个孔的侧壁,从而将孔合并成与透镜相对应的一个孔。