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    • 2. 发明授权
    • Reduced voltage field emission cathode and method for manufacturing same
    • 降低电场发射阴极及其制造方法
    • US06409565B1
    • 2002-06-25
    • US09317864
    • 1999-05-25
    • Shigeo ItohJunji ItohSeigo Kanemaru
    • Shigeo ItohJunji ItohSeigo Kanemaru
    • H01J900
    • H01J9/025
    • A field emission cathode capable of emitting electrons under a low voltage. Lead-out electrodes are formed on an insulating layer and openings are formed at a lamination between the insulating layer and each of the lead-out electrodes. Emitters each are arranged in each of the openings. The insulating layer is provided on a lower surface thereof with a photoresist layer modified by heating. The modified photoresist layer is electrically connected through a resistive layer to a cathode electrode. The cathode electrode is formed in a pattern on a cathode substrate made of glass or the like. The emitters each are constituted by a distal end of each of projections of the modified photoresist layer exposed from the insulating layer. The photoresist is modified by heating, resulting in being provided with electrical conductivity and exhibiting stable electron emitting characteristics under a low voltage.
    • 能够在低电压下发射电子的场发射阴极。 引出电极形成在绝缘层上,并且在绝缘层和每个引出电极之间的叠层处形成开口。 发射器各自布置在每个开口中。 绝缘层在其下表面上设置有通过加热改性的光致抗蚀剂层。 改性光致抗蚀剂层通过电阻层电连接到阴极电极。 在由玻璃等制成的阴极基板上形成阴极电极。 发射体各自由从绝缘层露出的改性光致抗蚀剂层的每个突起的远端构成。 通过加热改性光致抗蚀剂,从而提供导电性并在低电压下表现出稳定的电子发射特性。