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    • 9. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • 基板处理装置和基板处理方法
    • US20110206486A1
    • 2011-08-25
    • US12971171
    • 2010-12-17
    • Kenichirou MATSUYAMATakeshi Matsumoto
    • Kenichirou MATSUYAMATakeshi Matsumoto
    • H01L21/67
    • H01L21/67225H01L21/67196
    • Even when a module constituting a multi-module becomes an unavailable module, transfer of substrates can be promptly performed, while restricting generation of inferior products. When a destination module of a multi-module becomes unavailable before a substrate is transferred to the destination module, a destination of the substrate is changed to a module to which a substrate subsequent to the substrate is to be loaded. Upon generation of an unavailable module, before the transfer unit accesses the module on an upstream end of the transfer cycle, the transfer cycle proceeds until a precedent substrate becomes ready to be unloaded from the changed destination module. Alternatively, upon generation of an unavailable module, when the transfer unit is located on an upstream side of the unavailable module in the transfer cycle, the transfer operation of the transfer unit is made standby until a precedent substrate becomes ready to be unloaded in the changed destination module.
    • 即使构成多模块的模块成为不可用模块,也可以迅速地进行基板的转印,同时限制劣质产品的产生。 当在将基板传送到目的地模块之前,多模块的目的地模块变得不可用时,将基板的目的地改变为要在基板之后的基板被加载到的模块。 在生成不可用模块之前,在传送单元在传送周期的上游端访问模块之前,传送周期继续进行,直到先前的基板准备好从改变的目的地模块卸载。 或者,当生成不可用模块时,当传送单元位于传送周期中的不可用模块的上游侧时,传送单元的传送操作被备用直到先前的基板准备好在改变后的装载中被卸载 目的地模块。