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    • 5. 发明授权
    • Methods utilizing scanning probe microscope tips and products thereof or produced thereby
    • 使用扫描探针显微镜尖端及其产品或由其制造的方法
    • US07446324B2
    • 2008-11-04
    • US10951031
    • 2004-09-28
    • Chad A. MirkinRichard PinerSeunghun Hong
    • Chad A. MirkinRichard PinerSeunghun Hong
    • G21G5/00
    • B82B3/00B05D1/007B05D1/185B05D1/26G01Q80/00G03F7/0002G03F7/165Y10S977/849Y10S977/853Y10S977/854Y10S977/855Y10S977/856Y10S977/857Y10S977/86Y10S977/88Y10S977/884Y10S977/885Y10S977/886Y10S977/895Y10T428/24802
    • The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN, including submicrometer combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air. The method comprises coating an AFM tip with a hydrophobic compound, the hydrophobic compound being selected so that AFM imaging performed using the coated AFM tip is improved compared to AFM imaging performed using an uncoated AFM tip. Finally, the invention provides AFM tips coated with the hydrophobic compounds.
    • 本发明提供了称为“浸笔”纳米光刻(DPN)的光刻方法。 DPN使用扫描探针显微镜(SPM)尖端(例如,原子力显微镜(AFM)尖端)作为“笔”,固态基底(例如,金)作为“纸”,并且具有化学亲和力的分子 固态基板为“墨水”。 在DPN中使用分子从SPM尖端到固体基质的毛细管传输,以直接写入由亚微米尺寸的相对小的分子集合组成的图案,使得DPN可用于制造各种微尺寸和纳米尺寸的器件。 本发明还提供由DPN图案化的衬底,包括亚微米组合阵列,以及用于执行DPN的试剂盒,装置和软件。 本发明还提供了一种在空气中进行AFM成像的方法。 该方法包括用疏水性化合物涂覆AFM尖端,选择疏水性化合物,使得与使用未涂覆的AFM尖端进行的AFM成像相比,使用涂覆的AFM尖端进行的AFM成像得到改善。 最后,本发明提供涂覆有疏水化合物的AFM尖端。
    • 6. 发明授权
    • Methods utilizing scanning probe microscope tips and products therefor or produced thereby
    • 方法利用扫描探针显微镜尖端及其产品或由此产生
    • US06827979B2
    • 2004-12-07
    • US09866533
    • 2001-05-24
    • Chad A. MirkinRichard PinerSeunghun Hong
    • Chad A. MirkinRichard PinerSeunghun Hong
    • B05D500
    • B82B3/00B05D1/007B05D1/185B05D1/26G01Q80/00G03F7/0002G03F7/165Y10S977/849Y10S977/853Y10S977/854Y10S977/855Y10S977/856Y10S977/857Y10S977/86Y10S977/88Y10S977/884Y10S977/885Y10S977/886Y10S977/895Y10T428/24802
    • The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN, including submicrometer combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air. The method comprises coating an AFM tip with a hydrophobic compound, the hydrophobic compound being selected so that AFM imaging performed using the coated AFM tip is improved compared to AFM imaging performed using an uncoated AFM tip. Finally, the invention provides AFM tips coated with the hydrophobic compounds.
    • 本发明提供了称为“浸笔”纳米光刻(DPN)的光刻方法。 DPN使用扫描探针显微镜(SPM)尖端(例如,原子力显微镜(AFM)尖端)作为“笔”,固态基底(例如,金)作为“纸”,并且具有化学亲和力的分子 固态基板为“墨水”。 在DPN中使用分子从SPM尖端到固体基质的毛细管传输,以直接写入由亚微米尺寸的相对小的分子集合组成的图案,使得DPN可用于制造各种微尺寸和纳米尺寸的器件。 本发明还提供由DPN图案化的衬底,包括亚微米组合阵列,以及用于执行DPN的试剂盒,装置和软件。 本发明还提供了一种在空气中进行AFM成像的方法。 该方法包括用疏水性化合物涂覆AFM尖端,选择疏水性化合物,使得与使用未涂覆的AFM尖端进行的AFM成像相比,使用涂覆的AFM尖端进行的AFM成像得到改善。 最后,本发明提供涂覆有疏水化合物的AFM尖端。
    • 8. 发明授权
    • Methods utilizing scanning probe microscope tips and products thereof or produced thereby
    • 使用扫描探针显微镜尖端及其产品或由其制造的方法
    • US08187673B2
    • 2012-05-29
    • US11933251
    • 2007-10-31
    • Chad A. MirkinRichard PinerSeunghun Hong
    • Chad A. MirkinRichard PinerSeunghun Hong
    • B05D3/00
    • B82B3/00B05D1/007B05D1/185B05D1/26G01Q80/00G03F7/0002G03F7/165Y10S977/849Y10S977/853Y10S977/854Y10S977/855Y10S977/856Y10S977/857Y10S977/86Y10S977/88Y10S977/884Y10S977/885Y10S977/886Y10S977/895Y10T428/24802
    • The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN, including submicrometer combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air. The method comprises coating an AFM tip with a hydrophobic compound, the hydrophobic compound being selected so that AFM imaging performed using the coated AFM tip is improved compared to AFM imaging performed using an uncoated AFM tip. Finally, the invention provides AFM tips coated with the hydrophobic compounds.
    • 本发明提供了称为“浸笔”纳米光刻(DPN)的光刻方法。 DPN使用扫描探针显微镜(SPM)尖端(例如,原子力显微镜(AFM)尖端)作为“笔”,固态基底(例如,金)作为“纸”,并且具有化学亲和力的分子 固体底物作为“墨水”。DPN中使用分子从SPM尖端到固体基质的毛细管转运,以直接写入由亚微米尺寸的相对小的分子集合组成的图案,使得DPN可用于制造 各种微米级和纳米级器件。 本发明还提供由DPN图案化的衬底,包括亚微米组合阵列,以及用于执行DPN的试剂盒,装置和软件。 本发明还提供了一种在空气中进行AFM成像的方法。 该方法包括用疏水性化合物涂覆AFM尖端,选择疏水性化合物,使得与使用未涂覆的AFM尖端进行的AFM成像相比,使用涂覆的AFM尖端进行的AFM成像得到改善。 最后,本发明提供涂覆有疏水化合物的AFM尖端。