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    • 4. 发明申请
    • Method and apparatus for pump fault prediction
    • 泵故障预测方法与装置
    • US20080294382A1
    • 2008-11-27
    • US12149938
    • 2008-05-09
    • Ki-hwan LimTae-ho KimSeung-ki ChaeSang-gon LeeByoung-hoon Moon
    • Ki-hwan LimTae-ho KimSeung-ki ChaeSang-gon LeeByoung-hoon Moon
    • G21C17/00
    • H01L21/67288G05B23/024
    • Example embodiments relate to a method and apparatus for pump fault prediction. A method of predicting a pump fault according to example embodiments may include collecting data in real time for qualitative variables associated with a pump and a corresponding semiconductor fabricating process, wherein the pump is configured to create a vacuum in a chamber during the semiconductor fabricating process. Principal components may be identified based on the collected data. Principal components exerting a primary influence on the operation of the pump may be selected from the identified principal components. A management variable may be generated to represent variations of the selected principal components. The management-variable may be monitored in real time to predict a pump fault. A pump fault prediction apparatus according to example embodiments may include a sensor connected to a pump to collect data in real time for qualitative variables associated with the pump and a corresponding semiconductor fabricating process. A controller may be connected to the sensor and may determine that the pump is in an abnormal state if the management variable (e.g., T2 value) exceeds an upper control line.
    • 示例实施例涉及用于泵故障预测的方法和装置。 根据示例性实施例的预测泵故障的方法可以包括实时收集与泵和相应的半导体制造过程相关的定性变量的数据,其中所述泵被配置为在半导体制造过程期间在腔室中产生真空。 可以基于所收集的数据来识别主要组件。 对泵的运行产生主要影响的主要部件可以从所识别的主要部件中选择。 可以生成管理变量来表示所选择的主要组件的变化。 可以实时监控管理变量以预测泵故障。 根据示例实施例的泵故障预测装置可以包括连接到泵的传感器,以实时获取与泵相关的定性变量的数据以及相应的半导体制造过程。 如果管理变量(例如,T2值)超过上限控制线,控制器可以连接到传感器并且可以确定泵处于异常状态。
    • 6. 发明申请
    • APPARATUS AND METHOD FOR CONTROLLING LIGHTING BASED ON DALI COMMUNICATION
    • 基于大连通讯控制照明的装置及方法
    • US20120212140A1
    • 2012-08-23
    • US13354013
    • 2012-01-19
    • Ki-young KIMSang-hun LeeNam-yeol LeeSang-gon LeeTe-o JungChang-sub Lee
    • Ki-young KIMSang-hun LeeNam-yeol LeeSang-gon LeeTe-o JungChang-sub Lee
    • H05B37/02
    • H05B37/0254H05B33/0842
    • A lighting controlling apparatus including: a management server generating control information based on information received from a user; a digital addressable lighting interface (DALI) master that is connected to the management server via wired or wireless communication and generates a control message based on the control information; and a DALI ballast that is connected to the DALI master via DALI communication and drives a lighting apparatus by using the control message. Accordingly, a plurality of DALI masters may be locally or remotely controlled via the management server. Also, not only the DALI ballast may be controlled by using the DALI master via DALI communication but also, it may be selectively controlled in regard to the relationship between a DALI switch. In addition, the DALI ballast may be directly controlled by using a sensor and a remote controller.
    • 一种照明控制装置,包括:管理服务器,基于从用户接收的信息生成控制信息; 数字可寻址照明接口(DALI)主机,通过有线或无线通信连接到管理服务器,并基于控制信息生成控制消息; 和DALI镇流器,其通过DALI通信连接到DALI主机,并通过使用控制消息驱动照明装置。 因此,多个DALI主机可以经由管理服务器在本地或远程控制。 此外,不仅可以通过DALI通信使用DALI主机来控制DALI镇流器,而且还可以对DALI开关之间的关系进行选择性控制。 此外,DALI镇流器可以通过使用传感器和遥控器直接控制。