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1. 发明申请

US20080294382A1 Method and apparatus for pump fault prediction 审中-公开
标题翻译：泵故障预测方法与装置
公开(公告)号：US20080294382A1
公开(公告)日：2008-11-27
申请号：US12149938
申请日：2008-05-09
申请人： Ki-hwan Lim , Tae-ho Kim , Seung-ki Chae , Sang-gon Lee , Byoung-hoon Moon
发明人： Ki-hwan Lim , Tae-ho Kim , Seung-ki Chae , Sang-gon Lee , Byoung-hoon Moon
IPC分类号： G21C17/00
CPC分类号： H01L21/67288 , G05B23/024
摘要： Example embodiments relate to a method and apparatus for pump fault prediction. A method of predicting a pump fault according to example embodiments may include collecting data in real time for qualitative variables associated with a pump and a corresponding semiconductor fabricating process, wherein the pump is configured to create a vacuum in a chamber during the semiconductor fabricating process. Principal components may be identified based on the collected data. Principal components exerting a primary influence on the operation of the pump may be selected from the identified principal components. A management variable may be generated to represent variations of the selected principal components. The management-variable may be monitored in real time to predict a pump fault. A pump fault prediction apparatus according to example embodiments may include a sensor connected to a pump to collect data in real time for qualitative variables associated with the pump and a corresponding semiconductor fabricating process. A controller may be connected to the sensor and may determine that the pump is in an abnormal state if the management variable (e.g., T2 value) exceeds an upper control line.
摘要翻译：示例实施例涉及用于泵故障预测的方法和装置。根据示例性实施例的预测泵故障的方法可以包括实时收集与泵和相应的半导体制造过程相关的定性变量的数据，其中所述泵被配置为在半导体制造过程期间在腔室中产生真空。可以基于所收集的数据来识别主要组件。对泵的运行产生主要影响的主要部件可以从所识别的主要部件中选择。可以生成管理变量来表示所选择的主要组件的变化。可以实时监控管理变量以预测泵故障。根据示例实施例的泵故障预测装置可以包括连接到泵的传感器，以实时获取与泵相关的定性变量的数据以及相应的半导体制造过程。如果管理变量（例如，T2值）超过上限控制线，控制器可以连接到传感器并且可以确定泵处于异常状态。

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